ã«ã³ã¶ã¹å·ç«å¤§å¦ã®ç ç©¶ãã¼ã ã¯ãã°ã©ãã§ã³ã大éåæã§ããæ°ããæ¹æ³ãçºè¦ãããçç´ ã®ä¾çµ¦æºã¨ãªãã¢ã»ãã¬ã³ãã¨ã¿ãã¼ã«ãªã©ã®ææã¬ã¹ãé ¸ç´ ã¨ãã£ããã«å®¹å¨å ã«å°å ¥ããèªåè»ã¨ã³ã¸ã³ç¨ã®ç¹ç«ãã©ã°ã使ã£ã¦çç«ãççºãããã ãã§ã°ã©ã åä½ã®ã°ã©ãã§ã³ãå¾ããããç ç©¶ãã¼ã ã¯ãã®ã°ã©ãã§ã³éç£æ³ã®ç¹è¨±ãå徿¸ã¿ã§ããã¨ããã ã°ã©ãã§ã³ã大éåæãã代表çãªæ¹æ³ã¨ãã¦ã¯ãåå¦çæ°ç¸æé·æ³(CVD)ãSiCç±æè¯æ³ãã°ã©ãã¡ã¤ãå¥é¢æ³ãªã©ããããCVDæ³ã§ã¯ç空ãã£ã³ãå ã«ã¡ã¿ã³ãªã©ã®ææã¬ã¹ãä¾çµ¦ããé ç®ãªã©ã®åºæ¿ä¸ã«ã°ã©ãã§ã³ãæé·ãããã大é¢ç©ãã¤é«å質ã®ã°ã©ãã§ã³èèãå¾ãããæ¹æ³ã§ããããããã»ã¹æ¸©åº¦ã®èª¿æ´ãé£ãããçç©ºè£ ç½®ã使ããã製é ã³ã¹ããé«ãã SiCç±æè¯æ³ã¯ãã·ãªã³ã³ã«ã¼ãã¤ã(SiC)åºæ¿ã1100â以ä¸ã®é«æ¸©ã«å ç±ãããã¨ã«ãã£ã¦è¡¨é¢ã®ã·ãªã³ã³ååãæè¯ãããåºæ¿ä¸ã«æ®


{{#tags}}- {{label}}
{{/tags}}