CMOS Technology

Here we report on the mask-less deposition of Au–SnO 2 nanocomposites with a silicon-on-insulator (SOI) complementary metal oxide semiconductor (CMOS) micro electro mechanical system (MEMS) platform through the use of dip pen nanolithography (DPN) to create a low-cost ethanol sensor. MEMS technology is used in order to achieve low power consumption, by the employment of a membrane structure formed using deep reactive ion etching technique. The device consists of an embedded tungsten micro-heater with gold interdigitated electrodes on top of the SOI membrane. The tungsten micro-heater is used to raise the membrane temperature up to its operating temperature and the electrodes are used to measure the resistance of the nanocomposite sensing layer. The CMOS MEMS devices have high electro-thermal efficiency, with 8.2 °C temperature increase per mW power of consumption. The sensing material (Au– SnO 2 nanocomposite) was synthesised starting from SnO nanoplates, then Au nanoparticles were attached chemically to the surface of SnO nanoplates, finally the mixture was heated at 700 °C in an oven in air for 4 h. This composite material was sonicated for 2 h in terpineol to make a viscous homogeneous slurry and then 'written' directly across the electrode area using the DPN technique without any mask. The devices were characterised by exposure to ethanol vapour in humid air in the concentration range of 100–1000 ppm. The sensitivity varied from 1.2 to 0.27 ppm −1 for 100–1000 ppm of ethanol at 10% relative humid air. Selectivity measurements showed that the sensors were selective towards ethanol when they were exposed to acetone and toluene. S Online supplementary data available from stacks.iop.org/NANO/27/125502/mmedia

Dielectrophoretic alignment is found to be a simple and efficient method to deposit the solution prepared ZnO nanowires onto micro hot plate substrates. Due to the strong surface effects, positive temperature coefficient for resistance was encountered with ZnO nanowires in the high temperature range (>250 • C). The response to ammonia (NH 3) was evaluated in isothermal and temperature-pulsed operation mode; the relative higher response observed in the latter case demonstrates that the use of this methodology is a good strategy to improve the performance of metal oxide sensors based on nanomaterials. Here, we evaluate the response to NH 3 and qualitatively describe the sensing mechanism in temperature-pulsed mode, highlighting the main differences compared to the standard isothermal methodology.