å®å®ç§å¦ç 究æã¯ãLSIã®é«éåã»ä½æ¶è²»é»ååãæå¾ ããã¦ããæå 端ã®æ°çSOI(Silicon On Insulator)ããã»ã¹ãç¨ãã¦ãã½ããã¨ã©ã¼(æ¾å°ç·ã«ãããããå転ã¨ã©ã¼)çºç確çã極ãã¦ä½ã128Kbit-SRAM(Static Random Access Memory)ã®éçºã«ä¸çã§åãã¦æåãããæ¬SRAMã¯SOIæ§é ã®æ¡ç¨ã¨åè·¯ä¸ã®å·¥å¤«ã«ããã½ããã¨ã©ã¼çºçã®ãããå¤LET(è·é»ç²åãåå°ä½ã«ä¸ããã¨ãã«ã®ã¼éã§è¡¨ã)ã45MeV/(mg/cm2)以ä¸(æ°çåã®ç´20å)ã¨é«ãä¸ãã·ã³ã°ã«ã¤ãã³ãã©ããã¢ãã(æ¾å°ç·ã«ããé大é»æµãæµãã¦æ°¸ä¹ æå·ã«ãªãå¯è½æ§ãããã¨ã©ã¼)ã¨ããå¥ã®é害ãå ¨ãèµ·ãããªãã¨ããç¹æ§ãæã¤ããã®ãããå¤LETå¤ããæ¨å®ãããéæ¢è»éä¸ã§ã®ã½ããã¨ã©ã¼çºç確çã¯ãç´9000å¹´ã«1åã¨æ¥µãã¦å°ããã å®å®ç¨é¨åã«ããã¦ã¯ãå®å®æ¾å°ç·ã«ããã½ãã
{{#tags}}- {{label}}
{{/tags}}