APPLIED MATERIALS

300mm Ultima
HDP-CVD
Maintenance Manual

January 2000 Revision 001

Confidentiality Notice

The materials and information contained herein are being provided by Applied Materials
to its Customer solely for Customer’s use for its internal business purposes.
Applied Materials retains all right, title, interest in and copyrights to the materials and
information herein. The materials and information contained herein constitute
confidential information of Applied Materials and Customer shall not disclose or
transfer any of these materials or information to any third party.

PUBLICATION HISTORY

Revision: 001
Date: January 2000
Cleanroom Part Number 0230-00134
Standard Part Number 0230-00133

3050 Bowers Avenue

Santa Clara, California 95054
_________________

U.S. and Foreign Patents Pending

Applied Materials, the Applied Materials logo, Centura, and Precision 5000
are registered trademarks of Applied Materials, Inc. in the U.S. and other countries;
DARC, DCVD, DxZ, Giga-Fill, GPLIS, µClean, Optima, Precision Liquid Injection System,
Producer, Remote Clean, SACVD, and Twin Chamber
are trademarks of Applied Materials, Inc. in the U.S. and other countries

Copyright  Applied Materials, Inc., 1999, 2000

3050 Bowers Avenue
Santa Clara, California 95054

All rights reserved. No part of this book may be reproduced in any form
without written permission from Applied Materials, Inc.
Trademarks

The following registered trademarks are some of the trademarks used in

Applied Materials manuals.

Name Owner

Baratron Registered trademark of MKS Instruments, Inc.

Cajon Registered trademark of Swagelok Company
Conflat Registered trademark of Varian Associates, Inc.
Convectron Registered trademark of Granville-Phillips Company
DRYVAC Registered trademark of Leybold Vacuum Products Inc.
FastRegen Trademark of the CTI Cryogenics, Inc.
Freon Registered trademark of E.I. DuPont de Nemours & Co., Inc.
Kalrez Registered trademark of E.I. DuPont de Nemours & Co., Inc.
Kovar Registered trademark of Westinghouse Electric Corporation
Krytox Registered trademark of E.I. DuPont de Nemours & Co., Inc.
Lucite Registered trademark of E.I. DuPont de Nemours & Co., Inc.
Procomm Registered trademark of DATASTORM Technologies Inc.
Pyrex Registered trademark of Corning Glass Works
Q-tip Registered trademark of Cheseborough Ponds
RUVAC Registered trademark of Leybold Vacuum Products Inc.
Snap-Loc Registered trademark of Nor-Cal Products, Inc.
Swagelok Registered trademark of Swagelok Company
Scotch-Brite Registered trademark of 3M Corporation
Teflon Registered trademark of E.I. DuPont de Nemours & Co., Inc.
TRIVAC Registered trademark of Leybold Vacuum Products Inc.
Unival Registered trademark of Unival Company
VCR Registered trademark of The Swagelok Company
VCO Registered trademark of The Swagelok Company
Viton Registered trademark of E.I. DuPont de Nemours & Co., Inc.

X-Acto Registered trademark of Hunt Manufacturing Co.
CONTENTS C 300mm Ultima HDP-CVD Maintenance Manual 311-023-02 C-i

Table of Contents

Title Page

1 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.1 Safety Hazard Alerts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.2 Emergency Shutdown . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
1.3 Lockout/Tagout (LOTO) Safety Procedure for the Centura System . . . . . . . . . . 1-5
1.3.1 Policy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.3.2 Scope . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.3.3 Objectives . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.3.4 Reference Documents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.3.5 Prerequisites . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.4 General Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.4.1 Notification of Maintenance Activity. . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.4.2 Use/Availability of Lockout Devices. . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.4.3 Testing and Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.4.4 Shift Change Lockout/Tagout Procedure . . . . . . . . . . . . . . . . . . . . . . 1-6
1.4.5 Non-Standard Removal of Lockout/Tagout Equipment . . . . . . . . . . . . 1-7
1.4.6 300mm Ultima HDP-CVD Chamber Lockout Procedure . . . . . . . . . . . 1-7
1.5 Maintenance Task Classifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
1.6 Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
1.6.1 Electrical Devices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
1.6.1.1 AC Power Systems. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
1.6.1.2 DC Power Systems. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
1.6.1.3 RF/ASTRON Power Systems (RF Gen-Rack) . . . . . . . . . 1-10
1.6.2 Mechanical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
1.6.2.1 Robot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
1.6.2.2 Loadlock Elevators (Cassette Indexer). . . . . . . . . . . . . . . 1-12
1.6.2.3 Slit Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
1.6.2.4 Chemical. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
1.6.2.5 Thermal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
1.6.3 Specific Activities. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
1.6.3.1 Chamber Maintenance (i.e., Wet Cleans, Process
Kit Change, Window Replacement, Etc.) . . . . . . . . . . . . . 1-15
1.7 Gas Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
1.7.1 Process Gas Lockout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
1.7.2 Process Gas Introduction Preparations. . . . . . . . . . . . . . . . . . . . . . . . 1-17
1.7.3 Radio Frequency (RF) Lockout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-19
1.7.4 Chamber Heater Lockout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-19
1.7.5 ESC Lockout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-20
1.7.6 Slit Valve Lockout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-20
1.7.7 Transfer Chamber Lockout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-21
1.7.8 Inboard Leak Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-22
1.7.9 Outboard Leak Test. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-23
1.7.10 Isoproply Alcohol (IPA) Warning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-23
1.7.11 Interlock Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-24
1.7.12 Hazardous Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-25
C-ii 311-023-02 300mm Ultima HDP-CVD Maintenance Manual CONTENTS C

2 Preventative Maintenance Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

2.1 300mm Ultima HDP-CVD Chamber Preventive Maintenance Procedures. . . . . . 2-2
2.1.1 Daily PM Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
2.1.1.1 Check the Gas Line Pressure . . . . . . . . . . . . . . . . . . . . . . 2-2
2.1.1.2 Check Turbo Pump N2 Pressure . . . . . . . . . . . . . . . . . . . .2-2
2.1.1.3 Dry Pump Facilities Verification . . . . . . . . . . . . . . . . . . . . . 2-3
2.1.1.4 RF Generator Facilities H2O Verification . . . . . . . . . . . . . . 2-3
2.1.1.5 Daily Process Qualification. . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.1.1.6 Helium Cooling Verification . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.1.1.7 SMC Facilities H2O Verification . . . . . . . . . . . . . . . . . . . . . 2-3
2.1.1.8 Verify CDA Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.1.1.9 Sign Checklist. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.1.2 Weekly PM Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
2.1.2.1 Rate-of-Rise Verification . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.1.2.2 SMC Hot Loop Coolant Level Verification . . . . . . . . . . . . . 2-4
2.1.2.3 Hot Loop Resistivity Verification. . . . . . . . . . . . . . . . . . . . . 2-4
2.1.2.4 Remote Clean Coolant Flow Verification . . . . . . . . . . . . . . 2-4
2.1.2.5 Wall Temperature Verification . . . . . . . . . . . . . . . . . . . . . . 2-4
2.1.2.6 Sign Checklist. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.1.3 Monthly PM Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.1.3.1 MFC Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.1.3.2 Manometer Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.1.3.3 Independent Helium Dump Calibration . . . . . . . . . . . . . . . 2-4
2.1.3.4 SMC Hot Loop Maintenance . . . . . . . . . . . . . . . . . . . . . . .2-5
2.1.3.5 Sign Checklist. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
2.1.4 2,500 Wafer PM Procedure (1.6 mm FSG). . . . . . . . . . . . . . . . . . . . . . 2-5
2.1.4.1 Perform the Chamber Fingerprint. . . . . . . . . . . . . . . . . . . . 2-5
2.1.4.2 Slit Valve Door Replacement . . . . . . . . . . . . . . . . . . . . . . . 2-5
2.1.4.3 Turbo N2 Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
2.1.5 10,000 Wafer PM Procedure (1.6 mm FSG). . . . . . . . . . . . . . . . . . . . . 2-6
2.1.5.1 Perform the Chamber Fingerprint. . . . . . . . . . . . . . . . . . . . 2-6
2.1.5.2 Center Nozzle Assembly O-ring Replacement. . . . . . . . . . 2-6
2.1.5.3 Gate Valve O-ring Replacement . . . . . . . . . . . . . . . . . . . .2-7
2.1.5.4 Slit Valve Door Replacement . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.1.5.5 Turbo N2 Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.1.5.6 Lift Pin Height Verification . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.1.5.7 Complete the Chamber Recovery . . . . . . . . . . . . . . . . . . . 2-8
2.1.6 15,000 Wafer PM Procedure (1.6 mm FSG). . . . . . . . . . . . . . . . . . . . . 2-9
2.1.6.1 Perform the Chamber Fingerprint. . . . . . . . . . . . . . . . . . . . 2-9
2.1.6.2 Turbo Throttle Valve O-ring Replacement . . . . . . . . . . . . . 2-9
2.1.6.3 Replace the ESC O-rings . . . . . . . . . . . . . . . . . . . . . . . . . .2-9
2.1.6.4 Replace the Baratron O-ring . . . . . . . . . . . . . . . . . . . . . . .2-9
2.1.6.5 Replace the Chamber Body O-rings . . . . . . . . . . . . . . . . . 2-9
2.1.6.6 Slit Valve Door Replacement . . . . . . . . . . . . . . . . . . . . . . . 2-9
2.1.6.7 Turbo N2 Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
2.1.6.8 Lift Pin Height Verification . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
2.1.6.9 Complete the Chamber Recovery . . . . . . . . . . . . . . . . . . . 2-10
2.1.7 30,000 Wafer PM Procedure (1.6 mm FSG). . . . . . . . . . . . . . . . . . . . . 2-10
2.1.7.1 Perform the Chamber Fingerprint. . . . . . . . . . . . . . . . . . . . 2-10
2.1.7.2 Center Nozzle Assembly O-ring Replacement. . . . . . . . . . 2-10
2.1.7.3 Turbo Throttle Valve O-ring Replacement . . . . . . . . . . . . . 2-10
2.1.7.4 Gate Valve O-ring Replacement . . . . . . . . . . . . . . . . . . . .2-10
2.1.7.5 Replace the ESC O-rings . . . . . . . . . . . . . . . . . . . . . . . . . .2-11
2.1.7.6 Replace the Baratron O-ring . . . . . . . . . . . . . . . . . . . . . . .2-11
2.1.7.7 Replace the Chamber Body O-rings . . . . . . . . . . . . . . . . . 2-11
2.1.7.8 Replace the Turbo and Rough Isolation Valve O-rings . . . 2-11
2.1.7.9 Replace the Viewport Lenses and O-rings. . . . . . . . . . . . . 2-11
CONTENTS C 300mm Ultima HDP-CVD Maintenance Manual 311-023-02 C-iii

2.1.7.10 Replace the Remote Clean O-rings. . . . . . . . . . . . . . . . . 2-12

2.1.7.11 Replace the Side Nozzle Washers . . . . . . . . . . . . . . . . . . 2-12
2.1.7.12 Slit Valve Door Replacement . . . . . . . . . . . . . . . . . . . . . . 2-13
2.1.7.13 Turbo N2 Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13
2.1.7.14 Lift Pin Height Verification. . . . . . . . . . . . . . . . . . . . . . . . . 2-13
2.1.7.15 Complete the Chamber Recovery . . . . . . . . . . . . . . . . . . 2-13
2.2 Preventive Maintenance (PM) Checklists . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14
2.2.1 Daily Preventive Checklist . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-15
2.2.2 Weekly Preventive Checklist . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16
2.2.3 Monthly Preventive Checklist . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17
2.2.4 2,500 Wafer Preventative Maintenance Checklist. . . . . . . . . . . . . . . . 2-18
2.2.5 10,000 Wafer Preventative Maintenance Checklist. . . . . . . . . . . . . . . 2-20
2.2.6 15,000 Wafer Preventative Maintenance Checklist. . . . . . . . . . . . . . . 2-22
2.2.7 30,000 Wafer Preventive Maintenance Checklist . . . . . . . . . . . . . . . . 2-24
2.2.8 PM Parts List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-27
2.3 300mm Ultima HDP-CVD Chamber Wet Clean Procedure. . . . . . . . . . . . . . . . . 2-28
2.3.1 Cleaning Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-28
2.3.2 Equipment and Materials. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-29
2.3.3 Chamber Parts Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-29
2.3.4 Wet Clean Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-30
2.3.4.1 Materials and Tools Required for a
Chamber Wet Clean . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-30
2.3.4.2 PM Recovery Procedure, Ultima HDP-CVD . . . . . . . . . . . 2-30
2.3.4.3 Chamber Preparation (Approximately 45 minutes). . . . . . 2-31
2.3.4.4 Chamber Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-31
2.3.4.5 Wipe Down Surfaces (Approximately 15 minutes) . . . . . . 2-31
2.3.4.6 Wipe Down Recovery (Approximately 1–3 hours) . . . . . . 2-31
2.3.4.7 Production Qualification (Approximately 1–3 hours). . . . . 2-32

3 Calibration Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

3.1 Independent Helium Control Verification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
3.1.1 Chamber Leak Up Rate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.1.2 IHC Line Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.1.3 Closed Wafer Valve Flow Verification . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
3.1.4 Open Wafer Valve Flow Verification . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
3.2 Wafer Lift Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
3.3 MFC Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
3.3.1 Preliminaries:. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
3.3.2 Linearity Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
3.3.3 Repeatability Check. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
3.3.4 MFC Flow Verification (optional) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
3.3.4.1 Pre-Startup Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
3.3.4.2 Running Flow Verification . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
3.4 ESC Power Supply Setup Verification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
3.4.1 Required Tools and Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
3.4.2 Interlock Checkout. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
3.4.3 High Voltage Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
3.4.4 Voltage OK Signal Setup (V OK). . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15
3.4.5 Current OK Signal Setup (I OK) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15
3.5 RF Generator Setup and Calibrations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
3.5.1 Recommended Tools . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
3.5.2 RF Generator Rack Descriptions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
3.5.3 RF Power Calibrations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
3.5.3.1 Top Source Calibrations . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
3.5.3.2 Side Source Calibrations . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
3.5.3.3 Bias Generator Calibrations . . . . . . . . . . . . . . . . . . . . . . . 3-18
C-iv 311-023-02 300mm Ultima HDP-CVD Maintenance Manual CONTENTS C

3.5.4 RF Generator Frequency Tunning . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19

3.5.4.1 TOP HFV-8000 Generator Frequency Limit
Setup Procedure: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19
3.5.4.2 “SIDE” HVF-8000 Generator Frequency Limit
Setup Procedure: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
3.6 Remote Plasma Clean Setup and Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
3.6.1 Astron Facilities Requirement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
3.6.2 Plasma Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21
3.7 Dome Heater Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21
3.7.1 Dome Instrumentation Checkout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
3.7.2 Thermocouple Interlock Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-24
3.7.3 Heat Up Dome to Operating Temperature . . . . . . . . . . . . . . . . . . . . . . 3-26
3.7.4 Run Hot Leak Rates . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26
3.8 Chamber Manometer Calibration and Verification . . . . . . . . . . . . . . . . . . . . . . . . 3-27
3.8.1 100 mTorr Manometer Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27
3.8.2 10 Torr Baratron Adjustment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28
3.8.3 1000 Torr Baratron Adjustment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28
3.8.4 Chamber Foreline Manometer Adjustment . . . . . . . . . . . . . . . . . . . . . . 3-28
3.8.5 Pressure Interlock Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29
3.9 Chamber Temp Calibration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29
3.10 Wafer Temperature Monitor Setup/Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
3.10.1 Parts Required . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
3.10.2 Tools Required . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
3.10.3 Preparation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-32
3.10.4 Calibration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32
3.10.5 Software Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-35

4 Corrective Maintenance Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.1 Turbo Throttle Valve O-ring Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.1 Parts Required . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.2 Tools Required . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.3 Preparation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-2
4.1.4 Disassembly Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.1.5 Reassembly Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
4.1.6 Chamber Recovery . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-6
4.1.7 Turbo Throttle Valve Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
4.2 Cathode Rebuild Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
4.2.1 Parts Required . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
4.2.2 Tools Required. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-8
4.2.3 Cathode Removal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
4.2.4 ESC Removal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
4.2.5 ESC Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14
4.2.6 Cathode Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15
4.3 300mm Side Coil Trouble Shooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16
4.4 Side Coil Inspection Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17
4.4.1 Tools and Materials Required . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17
4.4.2 Inspection Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17
4.5 Side Coil Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
4.5.1 Tools and Materials Required . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
4.5.2 Installation Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21
4.5.2.1 Preparation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21
4.5.2.2 Disassembly procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21
4.5.2.3 Re-assembly Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22

5 Spare Parts Identifier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

5.1 Throttle Valve Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.2 Wafer Lift Mechanism Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
CONTENTS C 300mm Ultima HDP-CVD Maintenance Manual 311-023-02 C-v

5.3 Lower Chamber Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8

5.4 Upper Chamber Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19
5.5 Cathode Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-29

A Equipment Decontamination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1

A.1 Equipment Decontamination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1
A.2 Policy. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1
A.3 Scope . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1
A.4 Definitions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-2
A.4.1 Limitations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-2
A.5 Requirements for Contaminated Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-2
A.5.1 Responsibility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-2
A.5.1.1 External Customer/Equipment Owner . . . . . . . . . . . . . . . A-2
A.5.1.2 Applied Materials Management . . . . . . . . . . . . . . . . . . . . A-3
A.5.1.3 Local Safety Department . . . . . . . . . . . . . . . . . . . . . . . . . A-3
A.5.2 Handling of Contaminated Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-3
A.5.3 Testing and Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-4
A.6 Process Kit, Gate Valves, and Miscellaneous Parts . . . . . . . . . . . . . . . . . . . . . . A-4
A.6.1 Labeling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-5
A.6.2 Purging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-6
A.6.3 Labeling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-6
A.7 Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-7
A.7.1 Labeling/Marking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-8
C-vi 311-023-02 300mm Ultima HDP-CVD Maintenance Manual CONTENTS C

List of Tables

Title Page

Table 1-1. Ultima HDP-CVD Hardware Interlocks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

Table 1-2. Maintenance Task Classifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
Table 1-3. Gas Line Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-18
Table 1-4. Gas Line Leak Rates. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-22
Table 2-1. Daily Preventive Maintenance Checklist — Chamber. . . . . . . . . . . . . . . . . . . 2-15
Table 2-2. Weekly Preventive Maintenance Checklist . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16
Table 2-3. Monthly Preventive Maintenance Checklist — Chamber . . . . . . . . . . . . . . . . 2-17
Table 2-4. 2,500 Wafer Preventive Maintenance Checklist . . . . . . . . . . . . . . . . . . . . . . . 2-18
Table 2-5. 10,000 Wafer Preventive Maintenance Checklist . . . . . . . . . . . . . . . . . . . . . . 2-20
Table 2-6. 15,000 Wafer Preventive Maintenance Checklist . . . . . . . . . . . . . . . . . . . . . . 2-22
Table 2-7. 30,000 Wafer Preventive Maintenance Checklist . . . . . . . . . . . . . . . . . . . . . . 2-24
Table 2-8. PM Parts List. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-27
Table 2-9. PM Recovery Procedure, Ultima HDP-CVD . . . . . . . . . . . . . . . . . . . . . . . . . .2-30
Table 3-1. Chamber Leak Up Rate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Table 3-2. IHC Line Leak Rates (mTorr/min) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Table 3-3. IHC Flow at 5 Torr (sccm) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4
Table 3-4. Condition 1 Helium Flow Rate — Chamber A. . . . . . . . . . . . . . . . . . . . . . . . . 3-5
Table 3-5. MFC Calibration Record . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
Table 3-6. USG MFC Flow Setpoints . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-8
Table 3-7. FSG MFC Flow Setpoints . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-9
Table 3-8. PSG MFC Flow Setpoints . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-9
Table 3-9. MFC Repeatability Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-9
Table 3-10. DO Assignments ESC Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
Table 3-11. ESC Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
Table 3-12. Positive Voltage Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
Table 3-13. TP3 Values 300mm Chambers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15
Table 3-14. ASTRON Facilities Requirement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
Table 3-15. LCD Display Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
Table 3-16. Base Pressure Manometer Setpoints . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27
Table 3-17. Manometer AI Voltage Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-27
Table 3-18. Chamber Foreline Pressure (mTorr) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28
Table 4-1. Cathode Assembly O-rings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
Table 4-2. Dome Heater Ramp Down Constants. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16
Table 4-3. Thermologic Control Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-16
Table 4-4. SIDE COIL REPLACEMENT PARTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
Table 5-1. 0010-02368 Throttle Valve Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
Table 5-2. 0010-02309 Lift Mechanism Assy 300mm Ultima HDP-CVD . . . . . . . . . . . . . 5-6
Table 5-3. 0010-18225 Lower Chamber Assy, 300mm, Ultima . . . . . . . . . . . . . . . . . . . . 5-8
Table 5-4. Upper Chamber Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19
Table 5-5. Cathode Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-29
CONTENTS C 300mm Ultima HDP-CVD Maintenance Manual 311-023-02 C-vii

List of Figures

Title Page

Figure 1-1. Hazard Alert Label. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

Figure 1-2. On/Off Switch Lockout Device. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Figure 1-3. Power Cord Lockout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
Figure 1-4. Gas Line Lockout. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
Figure 2-1. Center Nozzle Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Figure 2-2. ViewPort Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12
Figure 3-1. IHC Helium Valve Names and Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Figure 3-2. Dome Heater Detail Screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
Figure 3-3. Temperature Measurement Point . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30
Figure 3-4. Temperature Match Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
Figure 3-5. WTM Calibration Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32
Figure 3-6. Radiometer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-33
Figure 3-7. Temp Match Plate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-34
Figure 4-1. Turbo Throttle Valve Assembly (1 of 3) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Figure 4-2. Turbo Throttle Valve Assembly (2 of 3) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
Figure 4-3. Turbo Throttle Valve Assembly (3 of 3) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Figure 4-4. 300mm Ultima HDP-CVD Cathode Assembly. . . . . . . . . . . . . . . . . . . . . . . . 4-11
Figure 4-5. Bias Match and RF Feedthrough. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12
Figure 4-6. 300mm Ultima HDP-CVD Cathode Port Locations . . . . . . . . . . . . . . . . . . . . 4-13
Figure 4-7. Dome Heater Terminal Block . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18
Figure 4-8. Side Coil Resistance Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-19
Figure 4-9. Side Coil Assembly (1 of 3) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-25
Figure 4-10. Side Coil Assembly (2 of 3) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26
Figure 4-11. Side Coil Assembly (3 of 3) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-27
Figure 4-12. Heater Stack and Top Gas Feed. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-28
Figure 4-13. Spacer and Clamp Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-29
Figure 4-14. Side Coil Tensioning Mechanism . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-30
Figure 4-15. Side Coil Tensioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-31
Figure 4-16. Compressed Spacer Block . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-32
Figure 5-1. Turbo Throttle Valve (1 of 3) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
Figure 5-2. Turbo Throttle Valve (2 of 3) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
Figure 5-3. Turbo Throttle Valve (3 of 3) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
Figure 5-4. Wafer Lift Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
Figure 5-5. 0010-18255 Lower Chamber Assembly (1 of 7) . . . . . . . . . . . . . . . . . . . . . . 5-12
Figure 5-6. 0010-18255 Lower Chamber Assembly (2 of 7) . . . . . . . . . . . . . . . . . . . . . . 5-13
Figure 5-7. 0010-18255 Lower Chamber Assembly (3 of 7) . . . . . . . . . . . . . . . . . . . . . . 5-14
Figure 5-8. 0010-18255 Lower Chamber Assembly (4 of 7) . . . . . . . . . . . . . . . . . . . . . . 5-15
Figure 5-9. 0010-18255 Lower Chamber Assembly (5 of 7) . . . . . . . . . . . . . . . . . . . . . . 5-16
Figure 5-10. 0010-18255 Lower Chamber Assembly (6 of 7) . . . . . . . . . . . . . . . . . . . . . . 5-17
Figure 5-11. 0010-18255 Lower Chamber Assembly (7 of 7) . . . . . . . . . . . . . . . . . . . . . . 5-18
Figure 5-12. 300mm Ultima HDP-CVD Upper Chamber Assembly (1 of 6) . . . . . . . . . . . 5-23
Figure 5-13. 300mm Ultima HDP-CVD Upper Chamber Assembly (2 of 6) . . . . . . . . . . . 5-24
Figure 5-14. 300mm Ultima HDP-CVD Upper Chamber Assembly (3 of 6) . . . . . . . . . . . 5-25
Figure 5-15. 300mm Ultima HDP-CVD Upper Chamber Assembly (4 of 6) . . . . . . . . . . . 5-26
Figure 5-16. 300mm Ultima HDP-CVD Upper Chamber Assembly (5 of 6) . . . . . . . . . . . 5-27
Figure 5-17. 300mm Ultima HDP-CVD Upper Chamber Assembly (6 of 6) . . . . . . . . . . . 5-28
Figure 5-18. 300mm Ultima HDP-CVD Cathode Assembly (1 of 2) . . . . . . . . . . . . . . . . . 5-30
Figure 5-19. 300mm Ultima HDP-CVD Cathode Assembly (2 of 2) . . . . . . . . . . . . . . . . . 5-31
C-viii 311-023-02 300mm Ultima HDP-CVD Maintenance Manual CONTENTS C
CHAPTER 1 Safety 311-023-02 1-1

1 Safety
The 300mm Ultima HDP-CVD (dielectric chemical vapor deposition) Centura system uses
high voltage electrical power and radio frequency (RF) energy. The system may also be
configured to use reactive gases that require careful handling. These gases can be toxic,
poisonous, pyrofaric, or caustic.

Hardware and software interlocks, hazard alert labels and protective guards are used on
potentially hazardous areas of the HDP-CVD Centura system. These safeguards protect
personnel from exposure to hazards during normal operation and maintenance.

MODIFYING THE EQUIPMENT, OVERRIDING OR DEFEATING THE INTERLOCKS,

OR FAILING TO FOLLOW RECOMMENDED PROCEDURES CAN CAUSE EXPOSURE
TO HAZARDS THAT CAN INJURE OR KILL.

For additional safety information concerning the HDP-CVD Centura system, see the
Applied Materials Centura 300 Safety Manual.

1.1 Safety Hazard Alerts

The 300mm Ultima HDP-CVD Centura manuals provide hazard alerts before each step that
may involve hazards to personnel. The hazard alerts use the key words danger, warning, and
caution with a hazard icon showing a type of hazard:

• DANGER indicates immediate hazards that WILL cause severe personal injury
or death.
• WARNING indicates hazards or unsafe practices that COULD cause severe
personal injury or death.
• CAUTION indicates hazardous or unsafe practices that COULD cause minor
personal injury or damage to products or property.

Read and understand the warnings and cautions found in the appropriate manual before
performing any maintenance.
1-2 311-023-02 Safety CHAPTER 1

BACKGROUND
COLOR
SAFETY ALERT SIGNAL WORD
BLACK WHITE SYMBOL PANEL
BORDER BACKGROUND

HAZARDOUS VOLTAGE
Contact may cause electric
shock or burn. Turn off &
lock out system before
servicing.

0060-76128 Rev. B

YELLOW MESSAGE
BACKGROUND PANEL
PART NUMBER

Figure 1-1. Hazard Alert Label

For complete safety information, see the Centura 300 Safety Manual.
CHAPTER 1 Safety 311-023-02 1-3

1.2 Emergency Shutdown

The 300mm Centura system has an Emergency Off (EMO) circuit which is used to bring the
system to a safe shutdown condition in an emergency to ensure safety of the Fab personnel
and the equipment. The EMO circuit is activated by EMO buttons which are located on the
mainframe and remote components.

The EMO buttons are large, red push-buttons. Press one of the EMO buttons when you see
a potential hazard in the system and want to stop the entire system immediately. When any
EMO button is pressed, the EMO circuit will power down the system immediately and place
the whole system in the following safe shutdown condition:

• All AC power downstream of the main contactor is removed.

• All other contactors open up and are prevented from turning on.
• The RF generators and other energy sources are turned off.
• All moving parts are de-energized and prevented from operating, including:
– The robot — it stops at its current position.
– The slit valves — all slit valves stop at the current position.
– The loadlock indexers — all loadlock indexers stop at the current position.
– The chamber heater lifts — all chamber heater lifts stop at the current position.
– All MFCs and process gas valves are closed.
– The system controller shuts down, resulting in:
Aborting the current process recipe.
• All other chamber operations stop immediately and are prevented from operating,
including pumpdown and venting.
• All pneumatic valves stop at the default position, depending on the type (normally
closed or normally open).
• All remote components (pumps, heat exchangers, chillers, etc.) are turned off.

However, the electrical components upstream of the main contactor remain energized, even
when the EMO circuit is activated. These components are all located in the System Controller.

NOTE
The EMO circuit is intended to be used only in emergency situations.
Whenever possible, remove power to the specific component, rather than
using the EMO circuit to power down the entire system.

See Table 1-1 for a description of the interlocks provided in the design and operation of the
300mm Ultima HDP-CVD Chamber.
1-4 311-023-02 Safety CHAPTER 1

Table 1-1. Ultima HDP-CVD Hardware Interlocks

Item Conditions Interlock

Lid Closed Switch lid closed Rough Isolation Valve

Gate Valve
Gas Final Valves
RF Generator
Astron unit
ESC Power Supply
Dome Heater

Foreline Pressure pressure > 10 Torr Turbo Isolation Valve

Switch Gate Valve
Gas Final Valve
RF Generator
Astron unit
ESC Power Supply

Chamber Pressure chamber >10 Torr Turbo Isolation Valve

Gate Valve
Gas Final Valve
RF Generator
Astron unit
ESC Power Supply

Lid Cover Switch lid cover open RF Generator

Astron unit
ESC Power Supply
Dome Heater

Water flow water flow < 4 gpm RF Generator

< 1.5 gpm Astron unit
<1 gpm ESC Power Supply
<1 gpm Dome Heater

Coax Cable Coax in place RF Generator

Switches Astron unit
ESC Power Supply
CHAPTER 1 Safety 311-023-02 1-5

1.3 Lockout/Tagout (LOTO) Safety Procedure for the Centura System

1.3.1 Policy
It is the policy of Applied Materials to control and eliminate injury or equipment damage
resulting from the accidental start-up or release of stored energy, and to comply with pertinent
governmental laws and regulations

1.3.2 Scope
This procedure covers all 300mm Centura Service Personnel, Equipment and System
Maintenance Operations.

1.3.3 Objectives
This document is intended to provide specific information, and supplement the
Applied Materials Corporate Safety “Lockout/Tagout” procedure regarding safe installation,
service, and maintenance of the 300mm Centura system.

1.3.4 Reference Documents

Applied Materials Corporate Safety and Health Policies and Procedures: Hazardous Energy
Control Program (lockout/tagout) Standard No. 23.2

• OSHA 29 CFR 1910.147

• OSHA 29 CFR 1910.331-335

1.3.5 Prerequisites
All Personnel installing, servicing, and maintaining the 300mm Centura systems must be
trained in regulatory requirements and this procedure.

The following hazards are present on the Applied Materials 300mm Centura system:

• Electrical
• Mechanical
• Hazardous Gases/Liquids
• Thermal
1-6 311-023-02 Safety CHAPTER 1

1.4 General Requirements

1.4.1 Notification of Maintenance Activity

1. Notify the people working in the immediate area that the machine is under
maintenance control.
2. Display a “Do Not Operate” tag on the console (in the Production Area) and in
the maintenance or chase area.

1.4.2 Use/Availability of Lockout Devices

1. Lockout/tagout equipment must be available near the equipment or in the
possession of service personnel. The equipment consists of locks, tags, multiple
lock devices, plug locks, and circuit breaker locks.

CAUTION
In compliance with the safety regulations, a software feature is not an acceptable means of
controlling Hazardous Energies. Software feature/command must be backed up with a physical
lock or blocking device with LOTO capability.

2. If the required equipment is not available it should be requested through the

supervisor or manager of that area.

1.4.3 Testing and Verification

After a lockout device is applied, test or verify that the energy source is truly isolated
(i.e., voltage reading at zero with an volt meter).

1.4.4 Shift Change Lockout/Tagout Procedure

If service activities continue beyond the shift and includes a change in service personnel, a
complete and accurate passdown must be provided and, the lockouts must be removed and
another lock applied by the new service persons, so that the equipment is not left unlocked
at any time.
CHAPTER 1 Safety 311-023-02 1-7

1.4.5 Non-Standard Removal of Lockout/Tagout Equipment

1. Locks and tags should be removed only by the individual who places them.
2. If necessary, non-standard removal of lockout/tagout equipment can be done only
in accordance with OSHA standards and the Applied Materials
Lockout/Tagout procedure. A local Safety representative may remove a lock
ONLY IF all of the following conditions are met:
• The employee who placed the lock is unavailable, or no lockout tag was
placed.
• It is verified that the employee who applied it is not at the facility.
• A reasonable effort is made to notify the employee who applied it.
• The employee who applied it is notified of its removal before he/she resumes
work.
• A document exists describing the event and the procedures that were followed.
This document should be kept on file for one year.
• Affected employees are notified and the work area is checked to verify that
it is safe to turn on the energy source.

1.4.6 300mm Ultima HDP-CVD Chamber Lockout Procedure

During normal operation, hardware based safety interlocks protect personnel from exposure
to hazards associated with process chambers. This includes exposure to hazardous gases,
electrical energy, hot surfaces, RF radiation, and magnetic fields. During process chamber
maintenance procedures, interlocks cannot be relied upon to provide protection from these
hazards. Instead, all forms of hazardous energy must be locked out from the chamber while
maintenance is being performed.
Lockout of hazardous energies associated with process chambers includes lockout of the
following areas:
• Process Gas Lockout, Section 1.7.1
• Chamber Heater Lockout, Section 1.7.4
• ESC Lockout, Section 1.7.5
• Slit Valve Lockout, Section 1.7.6
Lockouts of all hazardous energies should be performed whenever performing maintenance
on a process chamber, unless the written maintenance procedure specifically instructs you
to only lockout particular items.
For example, temperature calibration procedures may require that the heaters remain
energized, therefore heater lockout would not be performed for this maintenance task.
However, all other energies would still be locked out and verified, and additional safety
precautions should be taken to avoid exposure to any remaining hazardous energies, such as
the thermal and electrical energy associated with the heaters.
The lockout procedures for each chamber’s hazardous energy is listed in the following topics.
1-8 311-023-02 Safety CHAPTER 1

1.5 Maintenance Task Classifications

There are five maintenance task types for the 300mm Centura system. See Table 1-2 for the
definition of maintenance types.

Table 1-2. Maintenance Task Classifications

Type Description

Type 1 Equipment is fully de-energized (electrically “cold”).

Type 2 Equipment is energized. Live circuits are covered or insulated. Work is

performed at a remote location to preclude accidental shock.

Type 3 Equipment is energized. Live circuits are exposed and accidental contact is
possible. Potential exposures are less than 30 VRMS, 42.2 volts peak,
240 V-amps, and 20 joules.

Type 4 Equipment is energized. Live circuits are exposed and accidental contact is
possible. Voltage potentials are greater than 30 VRMS, 42.2 volts peak,
240 V-amps, 20 joules, or radio frequency (RF) is present.

Type 5 Equipment is energized, and measurements and adjustments require physical

entry into the equipment, or equipment configuration will not allow the use of
clamp-on probes.

The 300mm Centura system has been designed to prevent exposure to electrical energy during
most maintenance tasks, which are classified as Type 1 or Type 2. However, some Type 3 and
Type 4 maintenance tasks do exist.

NOTE
There are no Type 5 maintenance tasks associated with the 300mm Centura
system.

Type 3 or Type 4 maintenance tasks are identified in the maintenance manuals. These tasks
include specific instructions on how to avoid the electrical hazards and perform the
maintenance tasks safely. Always follow the maintenance procedures carefully.

Any service that requires the system to be locked out (Type 1 tasks), should only be performed
by trained personnel, who are authorized to perform the lockouts. Service that involves
exposure to electrical hazards (Type 3 and Type 4 tasks), must only be performed by trained
and qualified service personnel, familiar with the hazards of electrical energy.

Reference the following documents for more information:

• 29 CFR 1910.147, The Control of hazardous Energy (Lockout/Tagout)

• 29 CFR 1910.331-334, Safety Related Work Practices
• NFPA 70E-1988, Electrical Safety Requirements for Employee Workplaces,
Part 11, Safely Related work practices.
CHAPTER 1 Safety 311-023-02 1-9

DO NOT service or adjust the system alone. Always have another person familiar with
hazards of the system within sight in case of an emergency. Some tasks may specifically
require additional personnel.

WARNING
To prevent injury or death, due to possible
hazards, do not service or adjust the system
alone. Make use of other personnel who are
familiar with the system hazards and are
within visual sight in case of an emergency.

1.6 Procedures

1.6.1 Electrical Devices

Figure 1-2. On/Off Switch Lockout Device

1-10 311-023-02 Safety CHAPTER 1

1.6.1.1 AC Power Systems

1. At the Remote Frame: The Main Circuit Breaker must be locked and tagged any
time work is to be performed requiring access to the interior of the
AC Distribution box (behind protective covers).
2. At the System: The appropriate circuit breaker must be locked and tagged any
time work is to be performed on components of the AC system, where the power
supply switch is not under your direct control (within reach), including Lamp
Drivers and Circuit Breakers.
3. Verify the shutdown of electrical power with an voltmeter. Ensure that there are
no backup power sources (i.e., UPS batteries, charged capacitors, etc.)

1.6.1.2 DC Power Systems

1. At the Remote Frame: Work performed on a DC system component where the
power supply switch is not under your direct control (within reach) requires
locking out the DC Power supply circuit breaker with the appropriate device and
tag.
2. Verify the shutdown of electrical power with an voltmeter. Ensure that there are
no backup power sources (i.e., UPS batteries, charged capacitors, etc.)

1.6.1.3 RF/ASTRON Power Systems (RF Gen-Rack)

1. When working on the RF/ASTRON Power System, the system power switch must
be off and under your direct control (reaching distance) or the power supply must
be locked out with the appropriate device. Also see RF Gen-Rack for details.
CHAPTER 1 Safety 311-023-02 1-11

Figure 1-3. Power Cord Lockout

NOTE
If the entire system is locked out the RF source need not be locked out.

2. The RF power supply may be locked out with a circuit breaker on the main
AC controller with a lock-out device.
3. Verify the shutdown of electrical with an voltmeter. Ensure that there are no backup
power sources (i.e., UPS batteries, charged capacitors, etc.)
1-12 311-023-02 Safety CHAPTER 1

NOTE
For lockout of the power supplies in any remote frame corridor from within
the clean room: The person performing service and maintenance activities
shall install the lockout and maintain the key within their possession.

WARNING
HEAVY OBJECT
Lifting a heavy part or being in an awkward
position can result in muscle strain or
permanent back injury.
Use proper lifting techniques, mechanical
lifting aids, and assistance (two or more
people) when lifting heavy objects. Use two
people or lifting aids when removing or
installing the ASTRON.

1.6.2 Mechanical

1.6.2.1 Robot
1. Work can safely be performed on the robot by turning off the NSK driver power
at the mainframe controller then disconnecting the power cable at the robot
assembly connection. This does not require a lockout device if it is under your
control (i.e., within reach).

1.6.2.2 Loadlock Elevators (Cassette Indexer)

1. Work performed on loadlock elevators that require tools or body parts to be in the
location of the elevator mechanisms requires a lockout device.
2. The electrical power can be locked out by removal of electrical connector for the
loadlock elevators or locking out the circuit breaker that supplies the power with
the appropriate device

1.6.2.3 Slit Valves

1. Work performed on Slit valves requiring tools or body parts to be in the path of
the valve mechanisms’ movements must be locked out.
2. The Slit Valves can be locked out by removal of pneumatic lines at the slit valve
or locking out the pneumatic quick disconnect at the system facilities interface
panel with the appropriate device.
CHAPTER 1 Safety 311-023-02 1-13

Figure 1-4. Gas Line Lockout

1-14 311-023-02 Safety CHAPTER 1

1.6.2.4 Chemical
Pertaining to all HAZARDOUS gases and liquid sources:

1. The area around any hazardous gas bottle change, or open MFC area must be
cordoned off on a 10′ radius. During these activities, Self Contained Breathing
Apparatus (SCBA) or airline respirators must be worn by all service personnel
(minimum of 2) until work is complete.
2. Depending on the need, the gas/liquid delivery system can be locked out by
mechanically locking off the final valve pneumatic supply (all gas/liquid lines) or
by physically removing the final valve pneumatic air line (individual gas/liquid
lines). Customer fab requirements may differ on this requirement.
3. Lockout/tagout (LOTO) of the manual valve.
4. Any hazardous gas or liquid-containing line that is required to be opened must be
cycle purged with Nitrogen or Argon. (Follow the pump and purge procedure).
5. There should be at least two purged shutoff valves between the active gas and the
working area.
6. Before opening any connection to a gas line verify that the gas line is fully
evacuated.
7. After completion of the work, leak check the gas line that was serviced.
8. Before leaving the work area make sure that all components are secured and in a
safe “running” condition.

1.6.2.5 Thermal
1. Extra precaution must be taken when working on the following areas if the
potential thermal hazards exists.
• Dome (150 °C)
CHAPTER 1 Safety 311-023-02 1-15

1.6.3 Specific Activities

1.6.3.1 Chamber Maintenance (i.e., Wet Cleans, Process Kit Change, Window
Replacement, Etc.)
1. Service personnel not specifically trained for 300mm CENTURA
MAINTENANCE SHOULD NOT ATTEMPT to access the equipment.
2. Prior to venting a process chamber for a wet clean or venting a chamber for other
maintenance:
• Follow the procedures listed in Section 1.4.1, Notification of Maintenance
Activity.
• Remove sources of power from the mechanical assemblies to be worked on
as described in Section 1.3.2, Procedures.
• Remove source of RF/ASTRON power to the chambers to be worked on as
described in the 300mm Ultima HDP-CVD Startup Manual.
3. Servicing the SMC Heat Exchamger (i.e., DI canister change), ESC, and upper
chamber can cause coolant leakage of Ethylene Glycol. Follow all applicable
safety considerations when handling or disposing of Ethylene Glycol.
For further information Refer to the manufacture’s MSDS.
• ACCIDENTAL RELEASE MEASURES
– Small Spill
Absorb liquid on vermiculite, floor absorbent, or other absorbent
material and transfer to hood.

– Large Spill
Eliminate all ignition sources (flares, flames including pilot
lights, electrical sparks). Persons not wearing protective equipment
should be excluded from area of spill until clean-up has been completed.
Stop spill at source. Prevent from entering drains, sewers, streams or
other bodies of water. Prevent from spreading. If runoff occurs, notify
authorities as required. Pump or vacuum transfer spilled product to clean
containers for recovery. Absorb unrecoverable product. Transfer
contaminated absorbent, soil and other materials to containers for
disposal.
• DISPOSAL CONSIDERATION
– Waste Management Information

Destroy by liquid incineration in accordance with applicable regulations.

1-16 311-023-02 Safety CHAPTER 1

1.7 Gas Introduction

1.7.1 Process Gas Lockout

Process gases supplied to chambers can be toxic, corrosive, flammable, pyrophoric,
oxidizing, or asphyxiating. To avoid exposure to hazardous process gases during chamber
servicing, all process gas supplies to the chamber being serviced should be locked out as
follows.

1. Turn off all process gas supplies to the chamber using the system software.
2. Isolate all process gas supplies to the chamber by closing the manual gas valve
on each gas stick associated with the chamber being serviced.
The manual gas valves are located at the top of each gas stick in the Centura Gas
Panel.

NOTE
Opening the Gas Panel doors to access the manual gas valves will activate an
interlock which will shut down all process chambers. Finish any wafer
processing before opening the Gas Panel doors to perform lockout, or wafer
damage may occur.

3. Lock the manual gas valves in the OFF position using gas valve lockout devices
and your locks, and also attach lockout tags.
4. After all manual gas valves have been locked out, the Gas Panel doors should be
re-closed.
5. Verify the gas supplies have been properly locked out by attempting to flow gases
to the chamber using the system software.
Residual gas pressure in the gas lines will allow a small amount gas to flow the
chamber. However, once the pressure has dropped, a fault should appear indicating
the gas flow could not be maintained. If no fault appears, the wrong manual gas
valves may have been locked out in step 2 and step 3 above.
6. Cycle purge all of the gas supply lines from the gas panel to the chamber.
CHAPTER 1 Safety 311-023-02 1-17

1.7.2 Process Gas Introduction Preparations

WARNING
The possibility of an explosion due to
over-pressurization exists. This could be the
result of a chemical reaction.

NOTE
Process gases used in the Ultima HDP-CVD chamber are toxic, flammable,
corrosive, and potentially explosive if improperly handled.

When introducing process gases into the system, be sure to follow all applicable safety
precautions as outlined in the Centura Safety Manual and as required by company and
industry safety guidelines. Consult the customer’s Industrial Hygiene department if
necessary.

After any maintenance or service on positive pressure silane fittings, you must verify the
leak integrity of the connection by conducting inboard and outboard leak checks.

WARNING
TOXIC CHEMICALS may be present in
cooling system. Skin contact may be
hazardous to your health. Use appropriate
skin protection

WARNING
FLAMMABLE MATERIALS may be present.
Some of these may ignite spontaneously
when exposed to air. See specifics in the

WARNING
CORROSIVE CHEMICALS are located
within enclosure. Exposure may result in
severe injury.
1-18 311-023-02 Safety CHAPTER 1

____ 1. Before process gases are introduced, each facility gas line must be checked for
leaks, moisture and particles.
____ 2. Verify that all gas lines meet the requirements shown in Table 1-3.
____ 3. Once the facility gas lines have been tested, the Centura gas panel may be
connected to the facility gas lines.

Table 1-3. Gas Line Requirements

Helium leak check: < 1 X 10−9 cc/sec

Pressurized helium leak < 1 ppm (He)

check

O2 levels < 200 ppb

Moisture levels: < 200 ppb

< 50 ppb for SiH4

Total hydrocarbons: < 120 ppb

Particles: 0.2 micron < 10 parts per cubic foot

0.3 micron < 1 part per cubic foot

1 micron or above 0 parts per cubic foot

CAUTION
The filters in the Centura gas panel must remain capped until usage. If any of the filters are
not capped, the filter should be replaced before continuing.

The filters, MFCs, and gas lines absorb moisture and contaminates when exposed to
atmosphere, so the exposure times must be minimized.
CHAPTER 1 Safety 311-023-02 1-19

1.7.3 Radio Frequency (RF) Lockout

Process chambers may use RF energy for generating a plasma. To avoid exposure to
RF radiation and electrical energy during chamber servicing, the RF generators associated
with the chamber being serviced should be locked out as follows:

1. Turn off the RF generators using the system software.

2. Turn off the appropriate RF generators using the ON/OFF switch found on each
generator.
The RF generators are located in the Generator Rack, which may be located in
the service chase near the mainframe, or may be located remotely in the sub-fab.
3. Isolate the electrical supply to each RF Generator Rack by turning off the
appropriate RF Generator Rack supply circuit breaker.
These circuit breakers will be located at the front of the Generator Rack.
4. Lock each circuit breaker in the OFF position using a circuit breaker lockout
device and one of your locks, and also attach lockout tags.
5. Verify the RF generators have been properly locked out by attempting to turn on
the RF generators using the system software. A fault should appear indicating the
RF generators were unable to turn on. If no fault appears, the wrong supply circuit
breaker may have been locked out in step 3 and step 4 above.

1.7.4 Chamber Heater Lockout

Process chambers may be heated using resistive heating elements or lamps. To avoid exposure
to electrical and thermal energy during chamber servicing, the heaters on the chamber being
serviced should be locked out as follows:

1. Turn off the heaters using the system software.

2. Isolate the electrical supply to the heaters by turning off the appropriate heater
supply circuit breaker.
This circuit breaker will be located on the System Controller and will be labeled
“CH. ___ HEATER” or equivalent.
3. Lock the circuit breaker in the OFF position, using a circuit breaker lockout device
and your lock, and then attach a lockout tag.
4. Verify the heater has been properly locked out by attempting to turn on the heater
using the system software.
A fault should appear indicating that the heater was unable to turn on. If no fault
appears, the wrong heater supply circuit breaker may have been locked out in
step 2 and step 3 above.
1-20 311-023-02 Safety CHAPTER 1

1.7.5 ESC Lockout

Process chambers may contain an Electrostatic Chuck (ESC) which uses high voltage
electrical potentials for wafer clamping. To avoid exposure to high voltage electrical energy
during chamber servicing, the ESC on the chamber being serviced should be locked out as
follows:

1. Turn off the ESC using the system software.

2. Isolate the electrical supply to the ESC by removing the power cable.
3. Verify the ESC has been properly locked out by attempting to turn on the ESC
using the system software.
A fault should appear indicating that the ESC was unable to turn on. If no fault
appears, the wrong ESC supply circuit breaker may have been locked out in
step 2 and step 3 above.

1.7.6 Slit Valve Lockout

A pneumatically operated slit valve is located between each process chamber and transfer
chamber. To avoid mechanical injury hazards associated with the slit valve during chamber
servicing, the slit valve should be locked out as follows:

1. Close the slit valve using the system software.

2. Isolate the pneumatic supply to the slit valve by removing the poly line to the slit
valve pneumatic cylinder.
3. Verify the slit valve has been properly isolated by attempting to open the slit valve
using the system software.
The slit valve should not open.
4. If the slit valve does open, the wrong pneumatic poly line may have been removed
in step 2 above.
CHAPTER 1 Safety 311-023-02 1-21

1.7.7 Transfer Chamber Lockout

During normal operation, the transfer chamber robot is enclosed within the transfer chamber
to protect personnel from exposure to mechanical injury hazards. When the transfer chamber
is opened for maintenance, personnel may be exposed to mechanical hazards associated with
the robot.

To protect personnel against these hazards, the robot must be locked out while maintenance
is being performed. Lockout of all of the robot should be performed whenever performing
maintenance inside the transfer chamber, unless the written maintenance procedure
specifically instructs you to not lockout the robot. Refer to the following robot’s lockout
procedure:

1. Stop the transfer chamber robot using the system software.

2. Isolate the electrical supply to the transfer chamber robot, by turning off the
NSK driver and disconnecting the control cable located on bottom of the transfer
chamber.
3. Verify the transfer chamber robot has been properly isolated, by attempting to
move the robot using the system software.
The robot should not move.
If the robot does move, the wrong control cables may have been disconnected in step 2, above.
1-22 311-023-02 Safety CHAPTER 1

1.7.8 Inboard Leak Test

____ 1. Turn off the facilities gas valves closest to the system and pump down the gas
lines through the chamber.
____ 2. Helium leak check the gas panel to the facilities gas line at the top of the gas panel,
and any other fittings that were assembled.
____ 3. Measure the rate-of-rise of each gas line one line at a time. The rate-of-rise of the
chamber plus the gas line must be < 0.2 mTorr/min. greater than the chamber
rate-of-rise.

NOTE
Ensure that the MFC and upstream valve in the gas panel are open during the
leak check.

Table 1-4. Gas Line Leak Rates

Gas Line Chamber A Chamber B Chamber C Chamber D

SiF4 ______________ ______________ ______________ ______________
PH3/SiH4 ______________ ______________ ______________ ______________
O2 ______________ ______________ ______________ ______________
SiH4 ______________ ______________ ______________ ______________
Ar ______________ ______________ ______________ ______________
PH3/SiH4-TOP ______________ ______________ ______________ ______________
SiH4-TOP ______________ ______________ ______________ ______________
Ar-TOP ______________ ______________ ______________ ______________
NF3 ______________ ______________ ______________ ______________
Ar-MW ______________ ______________ ______________ ______________
O2-TOP ______________ ______________ ______________ ______________
N2 Purge R ______________ ______________ ______________ ______________
N2 Purge L ______________ ______________ ______________ ______________
CHAPTER 1 Safety 311-023-02 1-23

1.7.9 Outboard Leak Test

____ 1. Pressurize the line with helium to a positive operating pressure (20 psi) from the
facility Gas Isolation Box (GIB) to the MFC.
____ 2. Perform an external helium leak check at each pressurized fitting to detect
escaping helium.

NOTE
You should detect less than 1ppm (He).

Prior to introducing process gases to the process chamber, check the gas panel operation.
Verify each gas using house purge N2. During this procedure, the gas names will be configured
into the system software. The information is given at the end of this chapter.

This procedure must be followed whenever servicing any part of the gas delivery system that
uses hazardous gases.

1. Turn off and lock out the manual gas valve inside the facilities valve cabinet.
2. Purge the gas line and the chamber by pumping them to base pressure and cycle
purging them with N2 for at least 15 cycles.

1.7.10 Isoproply Alcohol (IPA) Warning

WARNING
To prevent fire, due to IPA (Isoproply Alcohol)
vapors, do not spray IPA onto hot surfaces
during cleaning operations. Allow hot surfaces
to cool and ensure no ignition sources are
present before using IPA. IPA VAPORS are
FLAMMABLE.

WARNING
To prevent possible skin or eye injury, due to
IPA (Isoproply Alcohol), wear suitable skin
and eye protection when using IPA.
IPA IS A SKIN IRRITANT.
1-24 311-023-02 Safety CHAPTER 1

1.7.11 Interlock Safety

DO NOT override or defeat interlocks unless the written maintenance procedure explicitly
directs you to. If an interlock is defeated for any reason, it must be identified as being open
and dangerous. Applied Materials recommends that a sign or poster be displayed on the
system and near the location of the interlock during the time the interlock is defeated. Always
be sure to restore the interlock to normal operation once the need for defeating the interlock
has been completed.

Care must be taken whenever any internal components or wiring are exposed. To prevent
exposure to energized electrical parts, lockout all electrical energy sources supplying energy
to the area being serviced, whenever possible, before performing maintenance.

The equipment consists of locks, tags, multiple lock devices, plug locks, and circuit breaker
locks. See the Applied Materials Lockout/Tagout Parts List, for a description of the various
available devices.

NOTE
In compliance with safety regulations, a software interlock is not an
acceptable lockout device and must be backed up with a physical lock or
blocking device.

1. If the required equipment is not available, it should be requested through the

supervisor or manager of that area.
2. After a lockout device is applied, test or verify the energy source is truly isolated.
3. For example, verify a voltage reading of zero with an ohmmeter.
4. If service activities continue beyond the shift and include a change in service
personnel, observe the following precautions:
a. Provide a complete and accurate pass-down of lockouts and tool status.
b. The new service personnel must remove existing lockouts and apply new
lockouts, so the equipment is not left unlocked at any time.
5. Only the individual who placed the lock and tag should remove it.
If necessary, non-standard removal of lockout/tagout equipment can be done only
in accordance with OSHA standards and the Applied Materials lockout/tagout
standard.
CHAPTER 1 Safety 311-023-02 1-25

6. A lock may be removed by a local safety representative, ONLY IF all of the

following conditions are met:
a. The employee who placed the lock is unavailable, or no lockout tag was
placed.
b. It has been verified the employee who applied the lock is not in the facility.
c. A reasonable effort is made to notify the employee who applied the lock.
d. The employee who applied the lock is notified of its removal before resuming
work.
e. A document exists describing the event and the procedures that were followed.
This document should be kept on file for one year.
f. Affected employees are notified and the work area is checked to verify that
it is safe before turning on the energy source.

1.7.12 Hazardous Materials

The 300mm Ultima HDP-CVD Chamber uses hazardous raw materials and produces
hazardous by-products which may be subject to environmental, health and/or safety
regulatory requirements. It is the responsibility of the equipment user to ensure compliance
with all applicable regulatory requirements.
The following chemicals are used in the center point recipe for the HDP-CVD Chamber.
This list provides examples of potential chemical hazards and is not intended to be an
exhaustive list of all chemicals potentially used in the chamber:
• Fluorocarbons
Fluorocarbons (such as CF4 , C2F6) and other fluorine compounds
(such as NF3, SIF4) are not considered to be ODS, but are subject to regulation
under air toxics programs as “fluorides and compounds.” As an example of toxics
program requirements, the Texas Air Control Board regulations for fluoride
compounds (Regulation 3-113) require that levels of these compounds measured
as hydrogen fluoride at the fence line (or maximally exposed off-site receptor) be
below a level of 6 parts per billion volume average over three consecutive hours.
Stack height and distance to the receptor may be accounted for in the determination
of the predicted fence line concentration.
• Ammonia, phosphine, diborane, and ozone
Ammonia, phosphine, diborane, and ozone are regulated under U.S. EPAs SARA
Section 302 as Extremely Hazardous Substances. As such, they are subject to
stringent reporting in the event of release and, in California, are subject to Risk
Management and Prevention Planning (RMPP) requirements. These gases are also
regulated in many localities (including Santa Clara County, California and Austin,
Texas) as Class II toxic gases under the local Toxic Gas Ordinance. As such, they
are subject to certain containment and detection requirements.
• Ammonia
Ammonia is a listed chemical under AB2588 — Air Toxic “Hot Spots” regulation
and severe regulatory emission requirements are placed on its use.
• Nitrogen trifluoride and silicon tetrafluoride
Nitrogen trifluoride and silicon tetrafluoride use may result in the generation of
fluoride species that could include hydrogen fluoride. HF is regulated as an acutely
hazardous material and an extremely hazardous waste.
1-26 311-023-02 Safety CHAPTER 1
CHAPTER 2 Preventative Maintenance Procedures 311-023-02 2-1

2 Preventative Maintenance Procedures

This chapter contains the preventative maintenance procedures and checklists needed to
maintain the 300mm Ultima HDP-CVD Chamber and remote components. The chapter
includes the following sections:

• Section 2.1, 300mm Ultima HDP-CVD Chamber Preventive Maintenance

Procedures
• Section 2.1.1, Daily PM Procedure
• Section 2.1.2, Weekly PM Procedure
• Section 2.2, Preventive Maintenance (PM) Checklists
• Section 2.1.3, Monthly PM Procedure
• Section 2.1.4, 2,500 Wafer PM Procedure (1.6 µm FSG)
• Section 2.1.5, 10,000 Wafer PM Procedure (1.6 µm FSG)
• Section 2.1.6, 15,000 Wafer PM Procedure (1.6 µm FSG)
• Section 2.1.7, 30,000 Wafer PM Procedure (1.6 µm FSG)
• Section 2.2.1, Daily Preventive Checklist
• Section 2.2.2, Weekly Preventive Checklist
• Section 2.2.3, Monthly Preventive Checklist
• Section 2.2.4, 2,500 Wafer Preventative Maintenance Checklist
• Section 2.2.5, 10,000 Wafer Preventative Maintenance Checklist
• Section 2.2.6, 15,000 Wafer Preventative Maintenance Checklist
• Section 2.2.7, 30,000 Wafer Preventive Maintenance Checklist
• Section 2.3, 300mm Ultima HDP-CVD Chamber Wet Clean Procedure
2-2 311-023-02 Preventative Maintenance Procedures CHAPTER 2

2.1 300mm Ultima HDP-CVD Chamber Preventive Maintenance Procedures

The checklists supplied in the following sections in this chapter are to be used as a supplement
to these procedures. They include spaces for the maintenance engineer to indicate when the
procedure is completed. Photocopy these checklists and use them as routine performance
checklists, to be signed and dated when the checks are complete.

Maintenance personnel should be thoroughly familiar with the system’s screens and how to
use them. For additional information, refer to the Operations and Programming Chapter
found in the 300mm Ultima HDP-CVD Chamber Manual.

The following procedures are in this sections:

• Section 2.1.1, Daily PM Procedure

• Section 2.1.2, Weekly PM Procedure
• Section 2.1.3, Monthly PM Procedure
• Section 2.1.4, 2,500 Wafer PM Procedure (1.6 µm FSG)
• Section 2.1.5, 10,000 Wafer PM Procedure (1.6 µm FSG)
• Section 2.1.6, 15,000 Wafer PM Procedure (1.6 µm FSG)
• Section 2.1.7, 30,000 Wafer PM Procedure (1.6 µm FSG)

2.1.1 Daily PM Procedure

This procedure needs to be performed once daily for each Ultima HDP-CVD Chamber. Fill
out the Checklist in Section 2.2.1, Daily Preventive Checklist, while following this
procedure.

2.1.1.1 Check the Gas Line Pressure

Some systems will have transducers with digital displays or the pressure can be viewed from
the software on the Gas Panel Screen. If the system does not have transducers, individual
gauges and regulators have been supplied by the customer to address this need.

____ 1. Write down the gas name in the appropriate location for each gas stick.
____ 2. Write down the pressure readings for each gas stick.
____ 3. Verify all pressures are within specification (5 psig–10 psig for MFCs 100 sccm
and smaller and 10 psig–15 psig for MFCs greater than 100 sccm). The NF3 MFC
pressure should be adjusted to 15 psia.
____ 4. Verify no unusual drift over time.

2.1.1.2 Check Turbo Pump N2 Pressure

____ Record N2 pressure being supplied to the for the Turbo pumps. Specification is
7 psig–10 psig.
CHAPTER 2 Preventative Maintenance Procedures 311-023-02 2-3

2.1.1.3 Dry Pump Facilities Verification

____ 1. Verify N2 Pressure to the Alcatel dry pump and record pressure on the checklist.
Specification is 30 psig ± 5 psig.
____ 2. Verify facilities water flow to the Alacatel pump and record flow on the checklist.
Specification is 0.5 gpm minimum.

2.1.1.4 RF Generator Facilities H2O Verification

____ Verify facilities water flow to each RF the Generator and record flow on the
checklist. Specification is 4 gpm minimum.

2.1.1.5 Daily Process Qualification

This section could vary from site to site, system to system and chamber to chamber. Most
customers run a daily process qualification to check basic process parameters and the results
should be monitored for drift. The basic measurements usually performed are Thickness,
Uniformity, Refractive Index (RI) and Particles. The customer will be performing these tests.
Request the data daily and record it into the checklist.

2.1.1.6 Helium Cooling Verification

____ Verify the helium supply pressure. Specification is 5 psig–10 psig.

2.1.1.7 SMC Facilities H2O Verification

____ Verify facilities water flow and pressure to the SMC Hot Loop. Specification is
6.5 gpm @ 43 psig.

2.1.1.8 Verify CDA Pressure

____ Verify the mainframe Clean Dry Air (CDA) pressure on the digital SMC gauge
under the Transfer Chamber. Record pressure on the checklist. Specification is
80 psig ± 5 psig.

2.1.1.9 Sign Checklist

____ Initial the Checklist upon completion of each chamber checklist for verification
purposes.

2.1.2 Weekly PM Procedure

This procedure needs to be performed once every week for each Ultima HDP-CVD chamber.
Fill out the Checklist in Section 2.2.2, Weekly Preventive Checklist, while following this
procedure.

2.1.2.1 Rate-of-Rise Verification

____ 1. Put the Chamber in the Offline mode.
____ 2. Verify that the Chamber is at base pressure.
____ 3. Verify that the chamber leak-up is within the specification (< 1 mTorr/min) by
running the service routine.
2-4 311-023-02 Preventative Maintenance Procedures CHAPTER 2

2.1.2.2 SMC Hot Loop Coolant Level Verification

____ Verify the coolant level for the Hot Loop of the Heat Exchanger and refill if
necessary with 50% Glycol and 50% DI water.

2.1.2.3 Hot Loop Resistivity Verification

____ On the Configure Heat Exchanger Screen, verify that Hot Loop resistivity is within
specification (>2 MOhms).

2.1.2.4 Remote Clean Coolant Flow Verification

____ Verify that the Remote Clean coolant flow through the digital SMC flow gauge.
Specification is 1.5 gpm.

2.1.2.5 Wall Temperature Verification

____ Verify the chamber side wall temperature by using a thermal couple. Make sure
that temperature is 70 °C with the Heat Exchanger Setpoint at 70. The
measurement must be made 2″ to the right of the Remote Clean Conductance tube.
See Figure 3-3. in Chapter 3, Calibration Procedures.

2.1.2.6 Sign Checklist

____ Initial the Checklist upon completion of the system checklist for verification
purposes.

2.1.3 Monthly PM Procedure

This procedure needs to be performed once every month for each Ultima HDP-CVD chamber.
Fill out the Checklist in Section 2.2.3, Monthly Preventive Checklist, while following this
procedure.

2.1.3.1 MFC Calibration

____ Perform MFC Calibrations for each chamber. Follow the MFC Calibration
procedure in Chapter 13 in the 300mm Ultima HDP-CVD StartUp Manual. Record
the results in the PM checklist.

2.1.3.2 Manometer Calibration

____ Perform manometer calibration for 100 mTorr and 10 Torr manometers. Follow
the Manometer Calibration procedure in Chapter 10 in the 300mm Ultima
HDP-CVD StartUp Manual. Record the results in the PM checklist

2.1.3.3 Independent Helium Dump Calibration

____ Perform the IHC calibration for inner and outer supplies. Follow the IHC
Calibration procedure in Chapter 16 in the 300mm Ultima HDP-CVD StartUp
Manual. Record the results in the PM checklist.
CHAPTER 2 Preventative Maintenance Procedures 311-023-02 2-5

2.1.3.4 SMC Hot Loop Maintenance

____ 1. Replace the Hot Loop Deionizer Tanks every 3 months. Applied Materials
Part No. 3250-01007.
____ 2. Replace the Hot Loop Filter every 6 months. Applied Materials Part No.
0190-18425.

2.1.3.5 Sign Checklist

____ Initial the Checklist upon completion of the system checklist for verification
purposes.

2.1.4 2,500 Wafer PM Procedure (1.6 µm FSG)

2.1.4.1 Perform the Chamber Fingerprint

____ Complete the Fingerprint procedure. Refer to PM Checklists.

2.1.4.2 Slit Valve Door Replacement

____ 1. Turn off the chamber dome heater and allow chamber dome to cool to 70 °C.
____ 2. Vent the chamber using the Chamber Vent routine.
____ 3. Home all robot axis for the transfer chamber.
____ 4. Vent the transfer chamber using the Transfer Chamber Vent routine.
____ 5. Remove the transfer chamber lid.
____ 6. Turn off the NSK driver. With driver off, turn the dual blade arms to allow for
clear access to the slit valve door to be replaced.
____ 7. With the Slit valve in the closed position, remove the top bolts of the brackets.
The brackets secure the slit valve door to the slit valve assembly. There is one top
bolt per bracket.
____ 8. Remove the bottom bolts and brackets.
____ 9. Open the slit valve and remove the slit valve door. Remove the pneumatics
connected to the slit valve actuator. This will allow you to move the slit valve
along its plane of motion during the installation of the new slit valve.
____ 10. Mount new slit valve door (Applied Materials Part No. 0040-13883) and secure
the door by evenly turning the two bottom bolts of the bracket. Turn the bottom
bolts until there is an even gap between top section of both brackets and the slit
valve assembly. DO NOT torque down the bottom bolts.
____ 11. Install the top bolts of the brackets and torque down evenly. By applying torque
on the top bolts, tension will be created for the bottom bolts.
____ 12. Connect the pneumatics to the slit valve actuator.
____ 13. Open and close the slit valve. In the close position, verify that there is even spacing
between both side and top gaps. If the spacing is uneven, remove the slit valve
door and remount the door to until equal spacing is attained.
2-6 311-023-02 Preventative Maintenance Procedures CHAPTER 2

2.1.4.3 Turbo N2 Setup

____ Perform the Turbo N2 Setup. Follow the Turbo N2 Setup procedure in Chapter 8
in the 300mm Ultima HDP-CVD StartUp Manual.

____ Complete the Chamber Recovery

____ Complete the Chamber recovery procedure. See Section 2.3.4.6.

2.1.5 10,000 Wafer PM Procedure (1.6 µm FSG)

2.1.5.1 Perform the Chamber Fingerprint

____ Complete the Fingerprint procedure. Refer to PM Checklists.

2.1.5.2 Center Nozzle Assembly O-ring Replacement

____ Complete the Center Nozzle Assembly O-ring Replacement procedure.

Figure 2-1. Center Nozzle Assembly

CHAPTER 2 Preventative Maintenance Procedures 311-023-02 2-7

2.1.5.3 Gate Valve O-ring Replacement

____ 1. Turn off the chamber dome heater and allow chamber dome to cool to 70 °C.
____ 2. Close the gate valve and the turbo isolation valve.
____ 3. Turn off the turbo pump. Verify that the brake LED is illuminated on the turbo
pump controller. Allow turbo pump to come to a stop.
____ 4. Vent the chamber using the Chamber Vent routine.
____ 5. Turn off the chamber dry pump.
____ 6. Open the VCR cap upstream of the turbo isolation valve. This will allow
atmosphere to enter the turbo pump.
____ 7. Remove the gate valve actuator cover.
____ 8. With a screwdriver, turn the red screw of the solenoid to open the gate valve.
____ 9. Disconnect the pneumatic line and communication lines from the gate valve
actuator.
____ 10. Loosen the screws that secure the gate valve actuator to the gate valve body.
____ 11. Turn the quick bonnet lock to slide the bonnet lock bar. Do this for the top and
bottom bonnet lock bars.
____ 12. Remove the four screws (two on the top and two on the bottom) which prevent
the lock bars from being removed.
____ 13. Remove the lock bars.
____ 14. Remove the gate valve actuator and gate valve for the gate valve body.
____ 15. Remove the gate valve O-ring from the gate valve.
____ 16. Clean the gate valve and gate valve body.
____ 17. Install the new gate valve O-ring (Applied Materials Part No. (not released
25-383)).
____ 18. Install gate valve actuator and gate valve to the gate valve body.
____ 19. Mount the bonnet lock bar and install four screws.
____ 20. Turn the quick bonnet locks to secure the gate valve actuator and gate valve to the
gate valve body.
____ 21. Torque down the screws.
____ 22. Connect the pneumatic line and communication lines.
____ 23. With a screwdriver, turn the red screw of the solenoid to close the gate valve.
____ 24. Install the gate valve actuator cover.
____ 25. Turn of the chamber dry pump. Allow the foreline to pumpdown below 10 Torr.
____ 26. Pumpdown the chamber with the Chamber Pumpdown routine.
2-8 311-023-02 Preventative Maintenance Procedures CHAPTER 2

2.1.5.4 Slit Valve Door Replacement

____ 1. Turn off the chamber dome heater and allow chamber dome to cool to 70 °C.
____ 2. Vent the chamber using the Chamber Vent routine.
____ 3. Home all robot axis for the transfer chamber.
____ 4. Vent the transfer chamber using the Transfer Chamber Vent routine.
____ 5. Remove the transfer chamber lid.
____ 6. Turn off the NSK driver. With driver off, turn the dual blade arms to allow for
clear access to the slit valve door to be replaced.
____ 7. With the Slit valve in the closed position, remove the top bolts of the brackets.
The brackets secure the slit valve door to the slit valve assembly. There is one top
bolt per bracket.
____ 8. Remove the bottom bolts and brackets.
____ 9. Open the slit valve and remove the slit valve door. Remove the pneumatics
connected to the slit valve actuator. This will allow you to move the slit valve
along its plane of motion during the installation of the new slit valve.
____ 10. Mount new slit valve door (Applied Materials Part No. 0040-13883) and secure
the door by evenly turning the two bottom bolts of the bracket. Turn the bottom
bolts until there is an even gap between top section of both brackets and the slit
valve assembly. DO NOT torque down the bottom bolts.
____ 11. Install the top bolts of the brackets and torque down evenly. By applying torque
on the top bolts, tension will be created for the bottom bolts.
____ 12. Connect the pneumatics to the slit valve actuator.
____ 13. Open and close the slit valve. In the close position, verify that there is even spacing
between both side and top gaps. If the spacing is uneven, remove the slit valve
door and remount the door to until equal spacing is attained.

2.1.5.5 Turbo N2 Setup

____ Perform the Turbo N2 Setup. Follow the Turbo N2 Setup procedure in Chapter 8
in the 300mm Ultima HDP-CVD StartUp Manual.

2.1.5.6 Lift Pin Height Verification

____ Verify all three Lift Pins are 80-90 mils from the surface of the ESC when in
release position.

2.1.5.7 Complete the Chamber Recovery

____ Complete the Chamber recovery procedure. See Section 2.3.4.6.
CHAPTER 2 Preventative Maintenance Procedures 311-023-02 2-9

2.1.6 15,000 Wafer PM Procedure (1.6 µm FSG)

2.1.6.1 Perform the Chamber Fingerprint

____ Complete the Fingerprint procedure. Refer to PM Checklists.

2.1.6.2 Turbo Throttle Valve O-ring Replacement

____ Complete the Turbo Throttle Valve O-ring Replacement procedure. See
Section 4.1, Turbo Throttle Valve O-ring Replacement.

2.1.6.3 Replace the ESC O-rings

____ Complete the ESC O-rings Replacement procedure. See Section 4.2, Cathode
Rebuild Procedure.

2.1.6.4 Replace the Baratron O-ring

____ Replace the Baratron O-ring. Applied Materials Part No. 3700-01035.

2.1.6.5 Replace the Chamber Body O-rings

____ Replace the Chamber Body O-rings. Applied Materials Part No. 3700-02515 (1×),
3700-02329 (2×) and 3700-02518 (1×).

2.1.6.6 Slit Valve Door Replacement

____ 1. Turn off the chamber dome heater and allow chamber dome to cool to 70 °C.
____ 2. Vent the chamber using the Chamber Vent routine.
____ 3. Home all robot axis for the transfer chamber.
____ 4. Vent the transfer chamber using the Transfer Chamber Vent routine.
____ 5. Remove the transfer chamber lid.
____ 6. Turn off the NSK driver. With driver off, turn the dual blade arms to allow for
clear access to the slit valve door to be replaced.
____ 7. With the Slit valve in the closed position, remove the top bolts of the brackets.
The brackets secure the slit valve door to the slit valve assembly. There is one top
bolt per bracket.
____ 8. Remove the bottom bolts and brackets.
____ 9. Open the slit valve and remove the slit valve door. Remove the pneumatics
connected to the slit valve actuator. This will allow you to move the slit valve
along its plane of motion during the installation of the new slit valve.
____ 10. Mount new slit valve door (Applied Materials Part No. 0040-13883) and secure
the door by evenly turning the two bottom bolts of the bracket. Turn the bottom
bolts until there is an even gap between top section of both brackets and the slit
valve assembly. DO NOT torque down the bottom bolts.
____ 11. Install the top bolts of the brackets and torque down evenly. By applying torque
on the top bolts, tension will be created for the bottom bolts.
____ 12. Connect the pneumatics to the slit valve actuator.
____ 13. Open and close the slit valve. In the close position, verify that there is even spacing
between both side and top gaps. If the spacing is uneven, remove the slit valve
door and remount the door to until equal spacing is attained.
2-10 311-023-02 Preventative Maintenance Procedures CHAPTER 2

2.1.6.7 Turbo N2 Setup

____ Perform the Turbo N2 Setup. Follow the Turbo N2 Setup procedure in Chapter 8
of the 300mm Ultima HDP-CVD StartUp Manual.

2.1.6.8 Lift Pin Height Verification

____ Verify all three Lift Pins are 80 mils–90 mils from the surface of the ESC when
in release position.

2.1.6.9 Complete the Chamber Recovery

____ Complete the Chamber recovery procedure. See Section 2.3.4.6.

2.1.7 30,000 Wafer PM Procedure (1.6 µm FSG)

2.1.7.1 Perform the Chamber Fingerprint

____ Complete the Fingerprint procedure. Refer to PM Checklists.

2.1.7.2 Center Nozzle Assembly O-ring Replacement

____ Complete the Center Nozzle Assembly O-ring Replacement procedure. See
Figure 2-1.

2.1.7.3 Turbo Throttle Valve O-ring Replacement

____ Complete the Turbo Throttle Valve O-ring Replacement procedure. See
Section 4.1, Turbo Throttle Valve O-ring Replacement.

2.1.7.4 Gate Valve O-ring Replacement

____ 1. Turn off the chamber dome heater and allow chamber dome to cool to 70 °C.
____ 2. Close the gate valve and the turbo isolation valve.
____ 3. Turn off the turbo pump. Verify that the brake LED is illuminated on the turbo
pump controller. Allow turbo pump to come to a stop.
____ 4. Vent the chamber using the Chamber Vent routine.
____ 5. Turn off the chamber dry pump.
____ 6. Open the VCR cap upstream of the turbo isolation valve. This will allow
atmosphere to enter the turbo pump.
____ 7. Remove the gate valve actuator cover.
____ 8. With a screwdriver, turn the red screw of the solenoid to open the gate valve.
____ 9. Disconnect the pneumatic line and communication lines from the gate valve
actuator.
____ 10. Loosen the screws that secure the gate valve actuator to the gate valve body.
____ 11. Turn the quick bonnet lock to slide the bonnet lock bar. Do this for the top and
bottom bonnet lock bars.
CHAPTER 2 Preventative Maintenance Procedures 311-023-02 2-11

____ 12. Remove the four screws (two on top and two bottom) which prevent the lock bars
from being removed.
____ 13. Remove the lock bars.
____ 14. Remove the gate valve actuator and gate valve for the gate valve body.
____ 15. Remove the gate valve O-ring from the gate valve.
____ 16. Clean the gate valve and gate valve body.
____ 17. Install the new gate valve O-ring (Applied Materials Part No. (not released
25-383)).
____ 18. Install gate valve actuator and gate valve to the gate valve body.
____ 19. Mount the bonnet lock bar and install four screws.
____ 20. Turn the quick bonnet locks to secure the gate valve actuator and gate valve to the
gate valve body.
____ 21. Torque down the screws.
____ 22. Connect the pneumatic line and communication lines.
____ 23. With a screwdriver, turn the red screw of the solenoid to close the gate valve.
____ 24. Install the gate valve actuator cover.
____ 25. Turn of the chamber dry pump. Allow the foreline to pumpdown below 10 Torr.
____ 26. Pumpdown the chamber with the Chamber Pumpdown routine.

2.1.7.5 Replace the ESC O-rings

____ Complete the ESC O-rings Replacement procedure. See Section 4.2, Cathode
Rebuild Procedure.

2.1.7.6 Replace the Baratron O-ring

____ Replace the Baratron O-ring. Applied Materials Part No. 3700-01035.

2.1.7.7 Replace the Chamber Body O-rings

____ Replace the Chamber Body O-rings. Applied Materials Part No. 3700-02515 (1×),
3700-02329 (2×) and 3700-02518 (1×).

2.1.7.8 Replace the Turbo and Rough Isolation Valve O-rings

____ Replace the Turbo and Rough Isolation Valve O-rings. Applied Materials Part No.
3700-01088 (4×).

2.1.7.9 Replace the Viewport Lenses and O-rings

____ Replace the Viewport Lenses and O-rings. Applied Materials Part No. 3440-01037
(2×) and 3700-02330 (2×).
2-12 311-023-02 Preventative Maintenance Procedures CHAPTER 2

Detail A

See Detail A

Figure 2-2. ViewPort Assembly

2.1.7.10 Replace the Remote Clean O-rings

____ Replace the Remote Clean O-rings. Applied Materials Part No. 3700-01953 (3×)
and 3700-03038 (1×).

2.1.7.11 Replace the Side Nozzle Washers

____ Replace the Side Nozzle Washers. Applied Materials Part No. 0020-18899 (30×).
CHAPTER 2 Preventative Maintenance Procedures 311-023-02 2-13

2.1.7.12 Slit Valve Door Replacement

____ 1. Turn off the chamber dome heater and allow chamber dome to cool to 70 °C.
____ 2. Vent the chamber using the Chamber Vent routine.
____ 3. Home all robot axis for the transfer chamber.
____ 4. Vent the transfer chamber using the Transfer Chamber Vent routine.
____ 5. Remove the transfer chamber lid.
____ 6. Turn off the NSK driver. With driver off, turn the dual blade arms to allow for
clear access to the slit valve door to be replaced.
____ 7. With the Slit valve in the closed position, remove the top bolts of the brackets
which secure the slit valve door to the slit valve assembly. There is one top bolt
per bracket.
____ 8. Remove the bottom bolts and brackets.
____ 9. Open the slit valve and remove the slit valve door. Remove the pneumatics
connected to the slit valve actuator. This will allow you to move the slit valve
along its plane of motion during the installation of the new slit valve.
____ 10. Mount new slit valve door (Applied Materials Part No. 0040-13883) and secure
the door by evenly turning the two bottom bolts of the bracket. Turn the bottom
bolts until there is an even gap between top section of both brackets and the slit
valve assembly. DO NOT torque down the bottom bolts.
____ 11. Install the top bolts of the brackets and torque down evenly. By applying torque
on the top bolts, tension will be created for the bottom bolts.
____ 12. Connect the pneumatics to the slit valve actuator.
____ 13. Open and close the slit valve. In the close position, verify that there is even spacing
between both side and top gaps. If the spacing is uneven, remove the slit valve
door and remount the door to until equal spacing is attained.

2.1.7.13 Turbo N2 Setup

____ Perform the Turbo N2 Setup. Follow the Turbo N2 Setup procedure in Chapter 8
of the 300mm Ultima HDP-CVD StartUp Manual.

2.1.7.14 Lift Pin Height Verification

____ Verify all three Lift Pins are 80-90 mils from the surface of the ESC when in
release position.

2.1.7.15 Complete the Chamber Recovery

____ Complete the Chamber recovery procedure. See Section 2.3.4.6.
2-14 311-023-02 Preventative Maintenance Procedures CHAPTER 2

2.2 Preventive Maintenance (PM) Checklists

This section contains routine maintenance checklists to be filled out by the maintenance
engineer. The checklists refer to step-by-step instructions provided in Section 2.1,
300mm Ultima HDP-CVD Chamber Preventive Maintenance Procedures.

The checklists indicate the minimum routine maintenance required to keep the equipment
running. They include spaces for the maintenance engineer to indicate when the procedure
is completed. Photocopy these checklists and use them as routine performance checklists, to
be signed and dated when the checks are complete. The lists may be placed in plastic holders
and used at the system as reference charts for maintenance checks. File these checklists to
maintain a permanent record of the maintenance done on each system.

Maintenance personnel should be thoroughly familiar with the system’s screens and how to
use them. For additional information, see Operations and Programming in the
300mm Ultima HDP-CVD Chamber Manual.

This section contains the following:

• Section 2.2.1, Daily Preventive Checklist

• Section 2.2.2, Weekly Preventive Checklist
• Section 2.2.3, Monthly Preventive Checklist
• Section 2.2.4, 5,000 Wafer Preventative Maintenance Checklist
• Section 2.2.5, 10,000 Wafer Preventative Maintenance Checklist
• Section 2.2.6, 20,000 Wafer Preventative Maintenance Checklist
• Section 2.2.7, 30,000 Wafer Preventive Maintenance Checklist
• Section 2.2.8, 60,000 Wafer Preventive Maintenance Checklist
• Section 2.2.9, PM Parts List
CHAPTER 2 Preventative Maintenance Procedures 311-023-02 2-15

2.2.1 Daily Preventive Checklist

Fill out Table 2-1once a day. Follow the Daily PM Procedure, Section 2.1,
300mm Ultima HDP-CVD Chamber Preventive Maintenance Procedures, for information
regarding filling out the tables.

Table 2-1. Daily Preventive Maintenance Checklist — Chamber

Complete the checklist below for each 300mm Ultima HDP-CVD Chamber
Date:
Mon Tues Wed Thurs Fri Sat Sun
1. Check gas line pressure to each Stick Gas
gas stick in the gas panel. 1
2
Specification 3
MFCs <= 100 sccm: 5 psig–10 psig 4
MFCs > 100 sccm: 10 psig–15 psig 5
6
7
8
9
10
2 Verify N2 pressure supplied to the turbo pump.
Specification 7-10 psig. Flow
3 a. Verify facilities N2 press to each Alcatel dry pump.
Specification 30 psi ±5 psi: Pressure
b. Verify facilities H20 flow to each dry pump.
This will prevent pump overheat.
Specification 0.5 gpm. Flow
4. Verify facilities H2O flow to each RF generator.
Specification 4 gpm
5. Process check: 1 wafer for deposition Thickness
thickness, Uniformity, RI and particles. Uniformity
Check versus customer specifications. RI
Particles
6. Check facilities helium pressure to the Independent
Helium Cooling module (IHC).
Specification 5 psi–10 psi: Pressure
7. a. Facilities water flow to the SMC Hot Loop
Heat Exchanger. (if applicable) Flow
Specification 6.5 gpm @ 43 psi Pressure
8. Verify mainframe CDA pressure on digital
SMC gauge under the transfer chamber.
Specification 80 psig ± 5 psig Pressure
9. Initial after completing Daily Preventive Checklist
2-16 311-023-02 Preventative Maintenance Procedures CHAPTER 2

2.2.2 Weekly Preventive Checklist

Table 2-2. Weekly Preventive Maintenance Checklist

Complete the checklist below for each 300mm Ultima HDP-CVD Chamber
Date:
Week 1 2 3 4 5
1. Verify HDP-CVD Chamber rate of rise using “Leak Up Service” routine.
Specification: < 1 mTorr/minute. Leak Rate
2. Verify Hot Loop Heat Exchanger coolant level. Reservoir should be filled
with a 50/50 DI water/glycol mixture. Check Full
3. On the Configure Heat Exchanger screen, verify SMC
Hot Loop resistivity for the HDP-CVD chamber.
Resistivity specification: > 2 MOhms: Resistivity
4. Verify Remote Clean water flow through the digital
SMC flow gauge.
Specification: =>.7 GPM Flow
5. Verify the chamber wall temperature calibration. Using a thermal
couple, verify that the wall is 70 °C with the Heat Exchanger setpoint
at 70 °C. This measurement must be made 2″ to the right
of the Remote Clean conductance tube.
TC Temperature
6. Initial after completing Daily Preventive Checklist
CHAPTER 2 Preventative Maintenance Procedures 311-023-02 2-17

2.2.3 Monthly Preventive Checklist

Table 2-3. Monthly Preventive Maintenance Checklist — Chamber

Complete the checklist below for each 300mm Ultima HDP-CVD Chamber
Date:
Month 1 2 3 4 5 6 7 8 9 10 11 12
1 Complete chamber MFC Line Gas
calibrations. 1
(AFC Cals or MFC Flow Verify) 2
3
4
Log Correction Factor values to 5
track MFC performance. 6
7
MFC Specification: <10% offset 8
9
10
2 Complete Manometer Calibration for 100 mTorr
and 10 Torr Heads.
Initial Complete
3 Calibrate IHC Dump
Specification 2.0 sccm ±.2 @ 5 Torr Inner
Specification 2.0 sccm ±.2 @ 5 Torr Outer
Date:
Month 1 2 3 4 5 6 7 8 9 10 11 12
4 PM the SMC Heat Exchanger (if applicable).
a. Replace the Hot Loop Deionizer Tanks
every 3 months.
3250-01007 Deionizer tank SS qty 2
Initial Complete
b. Replace the Hot Loop Filter every 6 months.
0190-18425 20 Micron Filter qty 1
Initial Complete
2-18 311-023-02 Preventative Maintenance Procedures CHAPTER 2

2.2.4 2,500 Wafer Preventative Maintenance Checklist

Table 2-4. 2,500 Wafer Preventive Maintenance Checklist (1 of 2) Date:

Complete the checklist below for each 300mm Ultima HDP-CVD Chamber Wafer Count:
1 Chamber Fingerprint
a. Chamber Leak Rate Chamber Leak Rate mTorr/min
b. Chuck-Dechuck Test ESC Voltage Volts
ESC Current mA
IHC Leak Inner sccm
IHC Leak Outer sccm
c. Site specific customer daily qualification Angstroms
Customer Qualification: Thickness
Uniformity %
RI
Particles
d. Sputter Test Sputter Rate Angstroms
Sputter Uniformity %
e. Throttle Valve Check Throttle Closed Position Steps
Pressure mTorr
f. Clean Rate Test A/min A/min
2 Replace Chamber Slit Valve
0040-13883 Slit Valve QTY 1 Initial Complete
3 Verify Turbo N2 Setup for each chamber. The foreline pressure should be 40 mTorr to 50
mTorr above the foreline base pressure
Initial Complete
4 Chamber Recovery
a. Check the dual pressure slit valve under vacuum Spec. 15 psi–20 psi psi
(< 5 Torr)
b. Transfer Chamber Leak Test with Chamber servo Spec. < 5 mTorr/min mTorr/min
3 Torr
c. Process Chamber Leak Test, Transfer Chamber at Spec. < 2 mTorr/min mTorr/min
Atmosphere
d. Process Chamber Leak Test, Chamber at Temperature Spec. < 2 mTorr/min mT/min
e. After Cycle Purge Spec. < 1 mTorr/min mT/min
f. Twenty Wafer Chuck-Dechuck Test (values for wafer 19)
Strike Pressure Spec. 50 - 70 mTorr mTorr
Voltage Spec. 950V or 800V Volts
Current Spec. < 200 µA mA
Inner Spec. < 2 sccm sccm
CHAPTER 2 Preventative Maintenance Procedures 311-023-02 2-19

Table 2-4. 2,500 Wafer Preventive Maintenance Checklist (2 of 2) Date:

Complete the checklist below for each 300mm Ultima HDP-CVD Chamber Wafer Count:
Outer Spec. < 4 sccm sccm
Mechanical Spec. < 20
Particles
g. Nine wafer BKM Deposition Test Wafer 8 Thickness Spec. 8000±400 Angstroms
Uniformity Spec. < 2.5% %
Particles Spec. < 50
Pressure Spec. 5.0 - 6.5 mTorr mTorr
Wafer 9 Thickness Spec. 8000 ±400 Angstroms
Uniformity Spec. < 2.5% %
Particles Spec. < 50
Pressure Spec. 5.0 mTorr– 6.5 mTorr
h. Clean Rate Test Clean Rate A/min A/min
i. Site specific customer daily qualification Customer Thickness Angstroms
Qualification:
Uniformity %
RI
Particles
2-20 311-023-02 Preventative Maintenance Procedures CHAPTER 2

2.2.5 10,000 Wafer Preventative Maintenance Checklist

Table 2-5. 10,000 Wafer Preventive Maintenance Checklist (1 of 2) Date:

Complete the checklist below for each 300mm Ultima HDP-CVD Chamber Wafer Count:
1 Chamber Fingerprint
a. Chamber Leak Rate Chamber Leak Rate mTorr/min
b. Chuck-Dechuck Test ESC Voltage Volts
ESC Current mA
IHC Leak Inner sccm
IHC Leak Outer sccm
c. Site specific customer daily qualification Angstroms
Customer Qualification: Thickness
Uniformity %
RI
Particles
d. Sputter Test Sputter Rate Angstroms
Sputter Uniformity %
e. Throttle Valve Check Throttle Closed Position Steps
Pressure mTorr
f. Clean Rate Test A/min A/min
2 Replace the Gate Valve O-ring.
25-383 O-ring Size (Kalrez) Qty 1 (NOT YET RELEASED) Initial Complete
3 Replace Chamber Slit Valve
0040-13883 Slit Valve QTY 1 Initial Complete
4 Verify Turbo Pump N2 purge for each chamber. The foreline pressure should be
40 mTorr–50 mTorr above the foreline base pressure Initial Complete
5 Verify Lift Pin Height in release position.
Initial Complete
6 Chamber Recovery
a. Check the dual pressure slit valve under vacuum (< 5 Torr) Spec. 15 psi– 20 psi psi
b. Transfer Chamber Leak Test with Chamber servo 3 Torr Spec. < 5 mTorr/min mTorr/min
c. Process Chamber Leak Test, Transfer Chamber at Spec. < 2 mTorr/min mTorr/min
Atmosphere
d. Process Chamber Leak Test, Chamber at Temperature Spec. < 2 mTorr/min mTorr/min
e. After Cycle Purge Spec. < 1 mTorr/min mTorr/min
f. Twenty Wafer Chuck-Dechuck Test (values for wafer 19)
Strike Pressure Spec. 50 - 70 mTorr mTorr
Voltage Spec. 950V or 800V Volts
CHAPTER 2 Preventative Maintenance Procedures 311-023-02 2-21

Table 2-5. 10,000 Wafer Preventive Maintenance Checklist (2 of 2) Date:

Complete the checklist below for each 300mm Ultima HDP-CVD Chamber Wafer Count:
Current Spec. < 200 µA mA
Inner Spec. < 2 sccm sccm
Outer Spec. < 4 sccm sccm
Mechanical Spec. < 20
Particles
g. Nine wafer BKM Deposition Test Wafer 8 Thickness Spec. 8000 ± 400 Angstroms
Uniformity Spec. < 2.5% %
Particles Spec. < 50
Pressure Spec. 5.0 - 6.5 mTorr mTorr
Wafer 9 Thickness Spec. 8000 ±400 Angstroms
Uniformity Spec. < 2.5% %
Particles Spec. < 50 mTorr
Pressure Spec. 5.0 mTorr–6.5 mTorr
h. Clean Rate Test Clean Rate A/min A/min
i. Site specific customer daily qualification Customer Qualification: Thickness Angstroms
Uniformity %
RI
Particles
2-22 311-023-02 Preventative Maintenance Procedures CHAPTER 2

2.2.6 15,000 Wafer Preventative Maintenance Checklist

Table 2-6. 15,000 Wafer Preventive Maintenance Checklist (1 of 2) Date:

Complete the checklist below for each 300mm Ultima HDP-CVD Chamber Wafer Count:
1 Chamber Fingerprint
a. Chamber Leak Rate Chamber Leak Rate mTorr/min
b. Chuck-Dechuck Test ESC Voltage Volts
ESC Current mA
IHC Leak Inner sccm
IHC Leak Outer sccm
c. Site specific customer daily qualification Angstroms
Customer Qualification: Thickness
Uniformity %
RI
Particles
d. Sputter Test Sputter Rate Angstroms
Sputter Uniformity %
e. Throttle Valve Check Throttle Closed Position Steps
Pressure mTorr
f. Clean Rate Test A/min A/min
2 Replace the Turbo Throttle Valve O-rings.
3700-01635 O-ring, qty 3
Initial Complete
3 Replace the ESC O-rings.
3700-01036 O-ring, Viton qty 2 3700-02681 O-ring, Chemraz qty 2
3700-01852 O-ring, Viton qty 2 3700-02678 O-ring, Chemraz qty 1
3700-03026 O-ring, Chemraz qty 3
3700-02183 O-ring, Viton qty 2
3700-02677 O-ring, Chemraz qty 2
3700-02663 O-ring, Chemraz qty 3

Initial Complete
4 Replace the Batron O-ring.
3700-01035 O-ring, Viton qty 1 Initial Complete
5 Replace the Chamber Body O-rings.
3700-02515 O-ring, Chemraz qty 1 3700-02518 O-ring, Teflon qty 1
3700-022329 O-ring, Chemraz qty 2 Initial Complete
6 Replace Chamber Slit Valve.
3700-13883 Slit Valve O-ring. Initial Complete
CHAPTER 2 Preventative Maintenance Procedures 311-023-02 2-23

Table 2-6. 15,000 Wafer Preventive Maintenance Checklist (2 of 2) Date:

Complete the checklist below for each 300mm Ultima HDP-CVD Chamber Wafer Count:
7 Verify Turbo N2 Setup for each chamber. the foreline pressure should be 40
to 50mT above foreline base pressure. Initial Complete
8 Verify lift pin height in release position. Initial Complete
9 Chamber Recovery
a. Check the dual pressure slit valve under vacuum (< 5 Torr) Spec. 15 - 20 psi psi
b. Transfer Chamber Leak Test with Chamber servo 3 Torr Spec. < 5 mTorr/min mTorr/min
c. Process Chamber Leak Test, Transfer Chamber at Spec. < 2 mTorr/min mTorr/min
Atmosphere
d. Process Chamber Leak Test, Chamber at Temperature Spec. < 2 mTorr/min mTorr/min
e. After Cycle Purge Spec. < 1 mTorr/min mTorr/min
f. Twenty Wafer Chuck-Dechuck Test (values for wafer 19)
Strike Pressure Spec. 50 mTorr– 70 mTorr mTorr
Voltage Spec. 950V or 800V Volts
Current Spec. < 200µA mA
Inner Spec. < 2 sccm sccm
Outer Spec. < 4 sccm sccm
Mechanical Spec. < 20
Particles
g. Nine wafer BKM Deposition Test Wafer 8 Thickness Spec. 8000 ±400 Angstroms
Uniformity Spec. < 2.5% %
Particles Spec. < 50
Pressure Spec. 5.0 mTorr–6.5 mTorr mTorr
Wafer 9 Thickness Spec. 8000 ±400 Angstroms
Uniformity Spec. < 2.5% %
Particles Spec. < 50 mTorr
Pressure Spec. 5.0 mTorr – 6.5 mTorr
h. Clean Rate Test Clean Rate A/min A/min
i. Site specific customer daily qualification Customer Qualification: Thickness Angstroms
Uniformity %
RI
Particles
2-24 311-023-02 Preventative Maintenance Procedures CHAPTER 2

2.2.7 30,000 Wafer Preventive Maintenance Checklist

Table 2-7. 30,000 Wafer Preventive Maintenance Checklist (1 of 3) Date:

Complete the checklist below for each 300mm Ultima HDP-CVD Chamber Wafer Count:

1 Chamber Fingerprint
a. Chamber Leak Rate Chamber Leak Rate mTorr/min
b. Chuck-Dechuck Test ESC Voltage Volts
ESC Current mA
IHC Leak Inner sccm
IHC Leak Outer sccm
c. Site specific customer daily qualification Angstroms
Customer Qualification: Thickness
Uniformity %
RI
Particles
d. Sputter Test Sputter Rate Angstroms
Sputter Uniformity %
e. Throttle Valve Check Throttle Closed Position Steps
Pressure mTorr
f. Clean Rate Test A/min A/min
2 Replace the center nozzle assembly orangs.
3700-01725 O-ring Chemraz qty 1 3700- Initial Complete
02025oring, Viton qty 1 0020-18899 Teflon Washer
qty 1
3 Replace the center nozzle assembly O-rings.
3700-01725 O-ring Chemraz qty 1 3700-O-ring, Initial Complete
Viton qty 1
0020-18899 Teflon Washer qty
4 Replace the Turbo Throttle Valve O-rings.
3700-01635 O-ring, qty 3 Initial Complete
5 Replace the Gate Valve O-ring.
25-383 O-ring Size (Kalrez) Qty 1 (NOT YET Initial Complete
RELEASED)
CHAPTER 2 Preventative Maintenance Procedures 311-023-02 2-25

Table 2-7. 30,000 Wafer Preventive Maintenance Checklist (2 of 3) Date:

Complete the checklist below for each 300mm Ultima HDP-CVD Chamber Wafer Count:

6 Replace the ESC O-rings.

3700-01036 O-ring, Viton qty 2 3700-02681 O-ring, Chemraz qty 2
3700-01852 O-ring, Viton qty 2 3700-02678 O-ring, Chemraz qty 1
3700-03026 O-ring, Chemraz qty 3
3700-02183 O-ring, Viton qty 2
3700-02677 O-ring, Chemraz qty 2
3700-02663 O-ring, Chemraz qty 3

Initial Complete
7 Replace the Batron O-ring.
3700-01035 O-ring, Viton qty 1 Initial Complete
8 Replace the Chamber Body O-rings.
3700-02515 O-ring, Chemraz qty 1 3700-02518 O-ring, Teflon qty 1
3700-022329 O-ring, Chemraz qty 2 Initial Complete
9 Replace Turbo and Rough Isolation Valve O-rings
3700-01088 O-ring, Chemaz qty 4 Initial Complete
10 Replace Viewport Lenses and O-rings
3700-01037 Saphire Lense Qty 2 3700-02330 O-ring, Chemraz qty 2
Initial Complete
11 Replace Remote Clean O-rings
3700-01953 O-ring Chemraz qty 3 3700-03038 O-ring Chemraz qty 1
Initial Complete
2 Replace Side Nozzle Washers
0020-18899 Teflon Washers qty 30 Initial Complete
13 Replace chamber Slit valve
0040-13883 Slit valve O-ring qty 1 Initial Complete
14 Verify Turbo N2 Setup for each chamber. the foreline pressure should be 40
to 50 mTorr above foreline base pressure. Initial Complete
15 Verify lift pin height in release position. Initial Complete
16 Chamber Recovery
a. Check the dual pressure slit valve under vacuum (< Spec. 15 psi– 20 psi psi
5 Torr)
b. Transfer Chamber Leak Test with Chamber servo 3 Spec. < 5 mTorr/min mTorr/min
Torr
c. Process Chamber Leak Test, Transfer Chamber Spec. < 2 mTorr/min mTorr/min
at Atmosphere
2-26 311-023-02 Preventative Maintenance Procedures CHAPTER 2

Table 2-7. 30,000 Wafer Preventive Maintenance Checklist (3 of 3) Date:

Complete the checklist below for each 300mm Ultima HDP-CVD Chamber Wafer Count:

d. Process Chamber Leak Test, Chamber at Spec. < 2 mTorr/min mTorr/min

Temperature
e. After Cycle Purge Spec. < 1 mTorr/min mTorr/min
f. Twenty Wafer Chuck-Dechuck Test (values for wafer
19)
Strike Pressure Spec. 50 mTorr– 70 mTorr mTorr
Voltage Spec. 950V or 800V Volts
Current Spec. < 200 µA mA
Inner Spec. < 2 sccm sccm
Outer Spec. < 4 sccm sccm
Mechanical Spec. < 20
Particles
g. Nine wafer BKM Deposition Test Wafer 8 Spec. 8000 ±400 Angstroms
Thickness
Uniformity Spec. < 2.5% %
Particles Spec. < 50
Pressure Spec mTorr– 6.5 mTorr mTorr
Wafer 9 Thickness Spec. 8000 ±400 Angstroms
Uniformity Spec. < 2.5% %
Particles Spec. < 50 mTorr
Pressure Spec. 5.0 mTorr–6.5 mTorr
h. Clean Rate Test Clean Rate A/min A/min
i. Site specific customer daily qualification Customer Thickness Angstroms
Qualification:
Uniformity %
RI
Particles
CHAPTER 2 Preventative Maintenance Procedures 311-023-02 2-27

2.2.8 PM Parts List

Wafer Count
Table 2-8. PM Parts List

Description Part No. Qty 2.5K 10K 15K 30K

Slit Valve 0040-13883 1 X X X X
O-ring, Gate Valve 25-383 1 X X
O-ring, Top nozzle, Chemraz 3700-01725 1 X
O-ring, Top nozzle, Viton 3700-02025 1 X
Teflon Washers, Nozzle 0020-18899 1 X
O-ring, Turbo throttle valve Quad 3700-01635 3 X X
O-ring, Baratron 3700-01035 1 X X
Seals, Chamber body, Teflon 3700-02518 1 X X
Seals, Chamber body, Gas feed-through 3700-02329 2 X X
O-ring, Chamber body, Chemraz 3700-02515 1 X X
O-ring, ESC 3700-01036 2 X X
O-ring, ESC 3700-01852 2 X X
O-ring, ESC 3700-03026 3 X X
O-ring, ESC 3700-02183 2 X X
O-ring, ESC 3700-02677 2 X X
O-ring, ESC 3700-2663 3 X X
O-ring, ESC 3700-02681 2 X X
O-ring, ESC WTM 3700-02678 1 X X
Teflon Washers, Nozzle 0020-18899 30 X
Sapphire lens, Viewport 3440-01037 2 X
O-ring, Viewport 3700-02330 2 X
Turbo & Rough iso valve O-rings 3700-01088 4 X
Remote Clean O-rings 3700-01953 3 X
Remote Clean O-ring 3700-03038 1 X
SMC Filter, Hot Loop (Replace every 6 0190-18425 2
months)
SMC Dionizer Tank (Replace 2 every 3 3250-01007 8
months)
2-28 311-023-02 Preventative Maintenance Procedures CHAPTER 2

2.3 300mm Ultima HDP-CVD Chamber Wet Clean Procedure

Applied Materials recommends using this cleaning procedure to achieve low particulate
levels in the 300 Ultima HDP-CVD process chamber. Only qualified personnel trained in
the operation and programming of the Ultima HDP-CVD should perform this procedure.
Familiarity with all operating and programming routines is required to perform these
procedures safely and correctly. In addition, only personnel experienced with process
chamber component and assembly should perform this procedure.

2.3.1 Cleaning Precautions

WARNING
Materials are present that may be hazardous
upon contact with the skin or eyes. Contact
your safety department for appropriate
personal protective equipment.

• Always do cleaning under Class 100 conditions or better. Transport parts outside
a controlled environment only if the parts are dried and packaged in cleanroom-
quality bagging material.
• Use dustless gloves and vapor masks when cleaning the process chamber.
Barehands are not permitted in cleaning or handling of process kit hardware.
• Use disposable cleanroom wipes and Isoproply alcohol to wipe tools (such as
screwdrivers and allen wrenches) before using them.
• Make sure all parts are stored in a cleanroom area such as a laminar flow unit or
desiccator.
• Be careful not to scratch or apply solvent to electrical or optical components of
the chamber or the system.
• Never use wire brushes or other sharp instruments to clean a process chamber.

CAUTION
Double gloves must be used to prevent possible sodium contamination of the process kit parts.
CHAPTER 2 Preventative Maintenance Procedures 311-023-02 2-29

2.3.2 Equipment and Materials

To minimize system downtime, Applied Materials recommends having all necessary spare
process components readily available. This allows you to remove the dirty process kit, clean
the process chamber and components, and install the new process kit with minimal downtime.
The following equipment and materials are required to perform the wet clean procedures
correctly:

• Complete set of allen wrenches

• Regular screwdriver
• Deionized (DI) water
• Disposable cleanroom wipes
• Lint-free cleanroom swabs
• Several pairs of cleanroom gloves
• New process kit if necessary.
• Vacuum cleaner

2.3.3 Chamber Parts Replacement

If spare parts are not available, the person performing the wet clean may decide to clean and
reuse the parts. The number of plasma hours or microns of deposition and the condition of
the part should be the criteria for deciding whether to reuse process kit components. If the
process chamber must be left idle while waiting for spare parts, leave the process chamber
pumped down.

WARNING
Hazardous gases or fumes may be present.
Contact your safety department for
appropriate personnel protective equipment
and ventilation requirements.

WARNING
Materials are present that may be hazardous
upon contact with the skin or eyes. Contact
your safety department for appropriate
personal protective equipment.
2-30 311-023-02 Preventative Maintenance Procedures CHAPTER 2

WARNING
Hot surfaces are present which could cause
severe skin burns upon contact.

2.3.4 Wet Clean Procedures

Due to the limited amount of parts in the Ultima HDP-CVD reactor, the chamber is relatively
simple to wet clean. If the chamber is being wet cleaned as a result of a periodic maintenance
requirement, Ultima HDP-CVD suggests that the wet cleaning procedure be delayed until
all O-rings (suggested by the P.M. schedule) are replaced and that all maintenance procedures
that require the chamber to be open are completed. The wet clean procedure must be
completed immediately prior to closing up and pumping down the chamber for operation. A
step by step wet clean procedure is described below:

2.3.4.1 Materials and Tools Required for a Chamber Wet Clean

• Bottle of D.I. Water
• Bag disposable cleanroom wipes (avoid paper or fibrous wipes)
• A vacuum cleaner or house vacuum hose
• A small tube that can be attached to the vacuum cleaner or house vacuum tube

2.3.4.2 PM Recovery Procedure, Ultima HDP-CVD

Table 2-9. PM Recovery Procedure, Ultima HDP-CVD

Chamber A Chamber B Chamber C Chamber D

Start Time

Ending Time
CHAPTER 2 Preventative Maintenance Procedures 311-023-02 2-31

2.3.4.3 Chamber Preparation (Approximately 45 minutes)

____ 1. Run “Clean Pre Vent” recipe.
____ 2. Take Chamber off-line.
____ 3. Turn off dome heater.
____ 4. Wait until all dome heater temperatures drop below 80 °C.
____ 5. Turn OFF Turbo Pump
____ 6. Vent the chamber using Chamber Service screen.
____ 7. After venting, open chamber and secure top lid.

2.3.4.4 Chamber Maintenance

Skip to Section 2.3.4.5, Wipe Down Surfaces (Approximately 15 minutes) if not performing
Maintenance (This section equals the time it takes to complete maintenance)

____ 1. Wet clean all replacement parts prior to installation.

____ 2. Perform necessary maintenance.
____ 3. Wet clean the new parts again after installation.

2.3.4.5 Wipe Down Surfaces (Approximately 15 minutes)

____ 1. Inspect the chuck and dome.
____ 2. With a cloth, wipe the following chamber parts (use DI only if necessary and use
sparingly);
a. ESC and process kit top surfaces. Wipe dome only if oxide is visible on dome
surface.
b. Chamber body O-ring and the 2 gas channel O-rings.
c. Slit valve are.
____ 3. Close the top lid.

2.3.4.6 Wipe Down Recovery (Approximately 1–3 hours)

____ 1. Pump down using chamber service program.
____ 2. Set dome heater to 120 °C.
____ 3. Reset all generators if necessary.
____ 4. Check the chamber leak rate using the chamber “Leak Up” routine. When chamber
leak up < 1 mTorr, Put chamber ONLINE then proceed to Section 2.3.4.7.
____ 5. Run “Baking” recipe. Return to Step 4.
2-32 311-023-02 Preventative Maintenance Procedures CHAPTER 2

2.3.4.7 Production Qualification (Approximately 1–3 hours)

____ 1. Run “Clean Recover” recipe.
____ 2. Cycle 5 wafers using the current Deposition and Clean sequence. Setup the cassette
as specified;
• Wafer 1 = dummy wafer
• Wafer 2 = dummy wafer
• Wafer 3 = dummy wafer
• Wafer 4 = particle monitor
• Wafer 5 = stress monitor
____ 3. Measure thickness, non-uniformity, and RI on wafer 4 and wafer 5.
____ 4. Confirm that all film properties are within specs. If any properties are out of
specification, repeat Step 1 and Step 2. If particle fail more than 3 times, then refer
to Particle Troubleshooting Procedure.
CHAPTER 3 Calibration Procedures 311-023-02 3-1

3 Calibration Procedures
This chapter contains step by step procedures for major calibrations on the
300mm Ultima HDP-CVD chamber. Only qualified personnel trained in the operation and
programming of the Ultima HDP-CVD should perform these procedures. Familiarity with
all operating and programming routines is required to perform these procedures safely and
correctly. In addition, only personnel experienced with process chamber component and
assembly should perform these procedures

This chapter contains the following sections:

• Section 3.1, Independent Helium Control Verification

• Section 3.2, Wafer Lift Setup
• Section 3, Calibration Procedures
• Section 3.4, ESC Power Supply Setup Verification
• Section 3.5, RF Generator Setup and Calibrations
• Section 3.6, Remote Plasma Clean Setup and Verification
• Section 3.7, Dome Heater Setup
• Section 3.8, Chamber Manometer Calibration and Verification
• Section 3.9, Chamber Temp Calibration
• Section 3.10, Wafer Temperature Monitor Setup/Calibration
3-2 311-023-02 Calibration Procedures CHAPTER 3

3.1 Independent Helium Control Verification

This section includes the following:

• Chamber Leak-up Rates, Section 3.1.1

• IHC Line Verification, Section 3.1.2
• Closed Wafer Valve Flow Verification, Section 3.1.3
• Open Wafer Valve Flow Verification, Section 3.1.4
The independent helium cooling (IHC) software control is shown in Figure 3-1. The system
has two lines to the chamber identically valved. The flow through each of these lines can be
independently set. The lines stem from a manifold to which the helium is supplied through
a single manual control valve. The IHC is actually more complex, as the figure does not show
the helium MFCs and pressure sensors.

In this procedure, first verify the functioning of the supply system, and then check the leak
rate of the IHC lines. Study the Figure 3-1 before proceeding. This procedure should be
followed step by step to ensure that valves are opened and closed at the proper point within
the tests.

Applied Materials CENTURA System 5200

System Wafer Chamber A Chamber C Chamber D Chamber F Program Misc

Monitor Chamber C
0.00slm Fnl
RF Poweroff/Poweroff
0.00slm 2nd Under Vacuum
0.00slm 3rd Name Top Side Bias
Gen 0W 0W 0W
0.00slm 4th (Offset 0.0 mTorr) 0W 0W 0W
Sp
0.00slm 5th 0W 1W 1W
FWD
Wafer Lift RLSE REFL 2W 2W 3W
Match Off
Vent N2
MW
ASTRON IDLE
PWR OFF Gen OFF
Turbo TV Rough TV SP 0W Coeff 0.0
800,800 Step 800,800 Step FWD/REFL 13W/ 1W
OPEN CMD OPEN CMD
Dome Heater
Turbo GV RoughV Contactor: OFF SP: 0 C
Zone SP: 0 0 0 0
Turbo-ON Zone TC: 62 59 54 60
N2 IHC PIDs ST: ON ON ON ON
Slow Name Inner Outer
Turbo ISO SP 5.0T 10.0T E-Chuck ST. Off
Press 2.8T 5.4T ACT Off Vol 0 V
Pump-ON Flow 0.0 0.0 PROT No Cur 0 uA
Pump OK Fl 24.367 mT He
Monitor Handler Gas Panel Monitor Process Chamber Service Previous Screen

HELIUM SUPPLY VALVE

HELIUM DUMP VALVE (OUTER)

HELIUM PURGE VALVE (OUTER)

HELIUM WAFER VALVE (OUTER)

Figure 3-1. IHC Helium Valve Names and Locations

CHAPTER 3 Calibration Procedures 311-023-02 3-3

3.1.1 Chamber Leak Up Rate

____ 1. Put the chamber in the Off-line mode.
____ 2. Verify that the chamber is at base pressure.
____ 3. Check the chamber leak up rate with the service routine. Record the results in
Table 3-1.

Table 3-1. Chamber Leak Up Rate

Chamber A ________mTorr/min

Chamber B ________mTorr/min

Chamber C ________mTorr/min

Chamber D ________mTorr/min

____ 4. Pump the chamber to base pressure.

3.1.2 IHC Line Verification

This is another indirect test of the lines, like that of the gas lines in the Gas Introduction
chapter,. The leak rate of the chamber and lines together is measured, and from that result,
the chamber leak rate is subtracted. The difference, ∆, is the line leak rate.

____ 1. Verify that the helium supply pressure is 5 psi–10 psi on the regulator in the
mainframe center tray.
____ 2. Select the Monitor Chamber screen, and open the Inner and the Outer helium purge
valves.
____ 3. Set the inner and the outer pressure set points to 10 Torr.
____ 4. Check that the pressures stabilize after 10 seconds. If the pressures do not stabilize,
check the following, and correct where necessary:
• Supply and purge valve pneumatic lines are connected and actuating
• Manual supply valve is open
• Control cables are connected to the baratron and MFC
• Vacuum leak
____ 5. Open the Inner and Outer helium wafer valves.
____ 6. Close the manual supply valve for the appropriate chamber, and wait 5 minutes.
____ 7. Check the flow rates and pressures for the inner and outer lines. The rates and
pressures should begin to decrease and zero in about 5 minutes.
____ 8. Allow the turbo pump to pump on the IHC lines for 2 hours.
____ 9. Verify that the flow rates and pressures for the inner and outer lines are 0 sccm
and 0 Torr.
3-4 311-023-02 Calibration Procedures CHAPTER 3

____ 10. Enter the chamber leak rates from Table 3-1 into Table 3-2.
____ 11. Check the chamber leak up rate with the routine on the Chamber Service screen.
This rate includes that of the IHC lines. If there is a line leak, pumping may take
a long time. Enter the results in Table 3-2.

Table 3-2. IHC Line Leak Rates (mTorr/min)

Chamber + Line Chamber ∆

Chamber A _____________ _____________ _____________

Chamber B _____________ _____________ _____________

Chamber C _____________ _____________ _____________

Chamber D _____________ _____________ _____________

____ 12. Check that the IHC leak up rate < 0.2 mTorr/min.
____ 13. Pump the chamber to base pressure. This may require more than two hours if the
leak rate is high.
____ 14. Close both wafer valves (for the verification that follows).

3.1.3 Closed Wafer Valve Flow Verification

NOTE
This procedure verifies the needle valve adjustment.

____ 1. Open the manual He valve.

____ 2. Open the inner and the outer helium purge valves.
____ 3. Set the inner and outer pressure set points to 5 Torr. Wait for pressure stability.
This may require up to 20 seconds due to the system pump down.
____ 4. Verify the flow stability in the inner and outer lines, and enter the flow rates in
Table 3-3.

Table 3-3. IHC Flow at 5 Torr (sccm)

Inner Flow Outer Flow

Chamber A _____________ _____________

Chamber B _____________ _____________

Chamber C _____________ _____________

Chamber D _____________ _____________

____ 5. Check that the flows are within the specification of 1.8 sccm−2.2 sccm.
CHAPTER 3 Calibration Procedures 311-023-02 3-5

3.1.4 Open Wafer Valve Flow Verification

NOTE
This procedures verifies Helium flow through the ESC

This checks the helium flow at different pressures for two valving conditions:

Inner Wafer Valve Outer Wafer Valve

Condition 1 Open Closed

Condition 2 Closed Open

NOTE
When changing set points during this verification, be sure to close both wafer
valves.

____ 1. Set the wafer valves for Condition 1, and record the flow rates after 10 seconds
for the following pressures.
.

Table 3-4. Condition 1 Helium Flow Rate — Chamber A

Inner SP Outer SP Wafer Wafer Inner Flow Flow

Torr Torr Inner Outer (sccm) Spec.
Valve Valve sccm

2 2 Open Closed ___________ 1−3

5 2 Open Closed ___________ 6−9

10 2 Open Closed ___________ > 10

3.2 Wafer Lift Setup

____ 1. Select the “Chamber Service Screen or Monitor Chamber Screen”, put the lift in
the PROCESS position, then move it to the RELEASE position.
____ 2. Measure the height of the lift pins. The height should be 0.075″ to 0.080″ above
the surface of the ESC.
____ 3. If a clear lid is available pump the chamber down to verify the lift pin movement.
____ 4. Select the Chamber Service screen, and put the lift in the Process Position.
____ 5. Place and center a wafer on the chuck. It maybe necessary to place a small piece
of glove material to keep the wafer from sliding.
____ 6. Put the lift in the RELEASE Position.
3-6 311-023-02 Calibration Procedures CHAPTER 3

____ 7. Verify that the pressure regulator is installed.

____ 8. Set the pressure regulator for the lift to 65 psi.
____ 9. Verify that the regulator flow arrow POINTS IN THE CORRECT DIRECTION,
TOWARDS THE LIFT.
____ 10. Put the lift in the LIFT Position. Verify that the lift moves smoothly, without
vibrating the wafer.
____ 11. Verify that the system recognizes the Lift position. If necessary, adjust the Lift
sensor by moving it up and down the grooves so that it barely trips the sensor.
____ 12. Repeat step 8 and step 9 for the RELEASE and PROCESS positions.
.

____ 13. Move the lift to all three positions, and verify that the lift moves to each position
in 2 seconds–4 seconds. The actual time should be such that the wafer does not
vibrate and a time-out fault is not made. Adjust, if necessary, with the needle valves
on the pneumatic cylinder.

PROCESS

LIFT

RELEASE

____ 14. Select the Chamber Service screen, and re-verify that the optical sensors for the
LIFT, PROCESS, and RELEASE positions are operating properly.
____ 15. Vent the Chamber to remove the clear lid.
____ 16. Carefully wipe the chuck with a cleanroom wipe and IPA after removing the clear
lid.
____ 17. Verify that there are no visible particles on the ESC.
CH A_____ CH B_____ CH C_____ CH D_____
____ 18. Put the lift in the PROCESS position.
CHAPTER 3 Calibration Procedures 311-023-02 3-7

3.3 MFC Calibration

This calibration for the mass flow controllers contains the following sections:

• Preliminaries, Section 3.3.1

• Linearity Check, Section 3.3.2
• Repeatability Check, Section 3.3.3
• MFC Flow Verification (optional), Section 3.3.4
For each procedure, there is a lot of data to be recorded. It might be helpful to do a “Screen
Dump” of the data onto a floppy disk.

3.3.1 Preliminaries:
____ 1. Check that the chamber volume is configured to xxx cc.
____ 2. Set the MFC correction factors to 1.0 or to the value recommended by the
manufacturer. (All manufacturers do not use the same correction factors.)
____ 3. Check that the MFC size selection in the Configure Gas Names screen corresponds
to the actual MFC size.
____ 4. Run the chamber Leak-up test to verify the vacuum integrity of the chamber before
performing this procedure

NOTE
Calibrations at high flows are affected by the actuation time for the gate valve
and for the gas valves. Minimize the effect of the valve actuation time by
increasing the time for calculation (increasing system constant #373, the
maximum pressure for RF power on).

3.3.2 Linearity Check

____ 1. Select Chamber Service screen, and set the dome heater to OFF.
____ 2. Set the heat exchanger to 25 °C.
____ 3. Verify that the chamber wall is 25 °C (temperature probe just below the viewport).
____ 4. Set the chamber OFFLINE, and select AFC Calibration.
____ 5. Set the flow for each MFC (gas) to be calibrated to 10% of the MFC maximum
flow.
____ 6. Select Start Calibration. Record the results in Table 3-5.
3-8 311-023-02 Calibration Procedures CHAPTER 3

Table 3-5. MFC Calibration Record

Calibration 1 Calibration 2 Calibration 3

10% Max 50% Max 90% Max

Gas 1 _________ _________ _________

Gas 2 _________ _________ _________

Gas 3 _________ _________ _________

Gas 4 _________ _________ _________

Gas 5 _________ _________ _________

Gas 6 _________ _________ _________

Gas 7 _________ _________ _________

Gas 8 _________ _________ _________

Gas 9 _________ _________ _________

Gas 10 _________ _________ _________

____ 7. Repeat the procedure at 50% and 90% of maximum flow setpoints for each MFC.

NOTE
If any flow deviates more than 10% from the setpoint, replace the MFC.

3.3.3 Repeatability Check

____ 1. Select MFC Calibration, and set the MFC flow setpoints to the current process
operating flow or to the approximate flow values shown below.

Table 3-6. USG MFC Flow Setpoints

Option SiH4-TOP 10

O2 135 Ar-TOP 15

SiH4 75 NF3 1500

Option Ar-MW 1000

Ar 110 O2-TOP 25
CHAPTER 3 Calibration Procedures 311-023-02 3-9

Table 3-7. FSG MFC Flow Setpoints

SiF4 40 SiH4-TOP 5

O2 120 Ar-TOP 5

SiH4 35 NF3 1500

Ar-MW 1000

Ar 60 O2-TOP 10

Table 3-8. PSG MFC Flow Setpoints

SiH4 45 O2-TOP 20

PH3 55 AR 60

SiH4-TOP 5 Ar-TOP 10

PH3-TOP 5 O2 160

NF3 1500 Ar-MW 1000

____ 2. Run the Service program calibrations three times to verify MFC repeatability, and
record the new factor. After the first run, enter the correction factor into the MFC
calibration page. The following calibrations must be remain at the same value.

Table 3-9. MFC Repeatability Check

Cal. 1 Cal. 2 Cal. 3

Gas 1 _________ _________ _________

Gas 2 _________ _________ _________

Gas 3 _________ _________ _________

Gas 4 _________ _________ _________

Gas 5 _________ _________ _________

Gas 6 _________ _________ _________

Gas 7 _________ _________ _________

Gas 8 _________ _________ _________

Gas 9 _________ _________ _________

Gas 10 _________ _________ _________

____ 3. Verify repeatability of the factors and enter the value as the correction factor. This
is the final correction factor setpoint for the MFC. Do not change the setpoint until
the MFC is replaced.
3-10 311-023-02 Calibration Procedures CHAPTER 3

Repeatability should be within ±1%. Before replacing a suspect MFC, verify that the facilities
and system hardware conditions are stable. While the gas flows are being calibrated, inspect
the following:

• Regulator
• Flow restrictor
• Chamber temperature
• Stable gas line ambient temperature
• Lid temperature control

3.3.4 MFC Flow Verification (optional)

This section provides the field with a standard procedure for running MFC Flow Verify. This
option is not installed on all systems. Verify the correct hardware is installed before
performing this procedure.

This chapter contains the following sections:

• Pre-Startup Procedures,
• Running Flow Verification,

3.3.4.1 Pre-Startup Procedures

____ 1. The following steps should be followed only if the system has not been previously
configured to run flow verify. They can be used to verify correct configuration.
____ 2. Touch the “Misc” header.
____ 3. Touch System Configuration.
____ 4. Touch Configure Gas Panel.
____ 5. Identify the MFC location for the designated standard (golden) MFC.
____ 6. Add the MFC location, if necessary.
____ 7. From the identified MFC, touch “Option.”
____ 8. Touch “Used by MFC Flow Verification.”
____ 9. Touch “Option” again.
____ 10. Touch “Designated MFC.”
____ 11. Touch the area above “Options.”
____ 12. Enter the flow rate of the Standard. The flow rate is 80% (40 sccm) of full scale
of the Standard.
CHAPTER 3 Calibration Procedures 311-023-02 3-11

3.3.4.2 Running Flow Verification

____ 1. From the “Chamber Service” screen, run the “leak up” routine. Leak Rate must
be < 1.0 mTorr per minute to continue.
____ 2. From the “Chamber Service” screen, touch “MFC Flow Verification.”
____ 3. Enter the flow values of the MFC to be calibrated (typically 50% of full flow or
at process recipe setpoint).
____ 4. Touch “Start Flow Verification” to run flow verify.

3.4 ESC Power Supply Setup Verification

This procedure is intended to outline the calibration setup for the 300mm Ultima HDP-CVD
ESC Power Supply. All High Voltage measurements to be made at the output of the BIAS
RF coaxial cable to the Bias Match. Refer to the Hardware Interlocks, Section 3.4.2 when
disconnecting and reconnecting any RF cables.

This section includes the following:

• Tools and Parts, Section 3.4.1

• Interlock Checkout, Section 3.4.2
• High Voltage Setup, Section 3.4.3
• Voltage OK Signal Setup, Section 3.4.4
• Current OK Signal Setup, Section 3.4.5
3-12 311-023-02 Calibration Procedures CHAPTER 3

3.4.1 Required Tools and Parts

1. Fluke Model 77 DMM (Applied Materials Part No. 1040-01027)

NOTE
Make sure that the fluke meter has a 1000 V capacity.

2. High Voltage Probe.

3. Small Phillips head screwdriver.
4. Small flat blade screwdriver.

WARNING
Hazardous Voltage. Potentially lethal
electrical voltages and currents are present
which could cause shock, burns, or death.
Type 4 Electrical “Hot Work”.

CAUTION
HIGH VOLTAGE DC is exposed during this procedure.
CHAPTER 3 Calibration Procedures 311-023-02 3-13

3.4.2 Interlock Checkout

1. Verify that all chamber interlocks have been met on the chamber interface board.
Correct any chamber interlock problems before proceeding.
2. With the power supply installed to the match and the control cable connected, The
+24V, +12V, +15V, −15V, GEN/CHUCK INTERLOCK LEDs on the ESC power
supply front panel should be ON. If the LED’s are OFF the interlocks are not being
met, proceed to the next step.
3. Remove the ESC power supply control cable. All LEDs should turn OFF at this
time.
4. Verify W1 on ECPS board 0100-40033 has pins 1 and 2 jumpered.
5. Install the control cable.
6. Push in both of the cover interlock switches. The +24V, +12V, +15V, −15V,
GEN/CHUCK INTERLOCK LEDs should turn ON at this time.
7. Remove the switch harness connectors from P2 and P3 and install jumpers. The
+24V, +12V, +15V, −15V, GEN/CHUCK INTERLOCK LEDs should be ON at
this time.
8. Select MISC. — MAINTENANCE — DI/O to access the DI/O control. Turn the
ESC SELECT 1 and ESC SELECT 2 bits ON. See Table 1 below for SELECT 1
and SELECT 2 DO assignments. The ESC power supply is now in the ground
state. The SELECT 1, SELECT 2, and CHUCK ENABLE LED’s should now also
be ON the front panel of power supply.

Table 3-10. DO Assignments ESC Power Supply

Signal Chamber A Chamber Chamber C Chamber D

Name B

SELECT 1

SELECT 2

Table 3-11. ESC Power Supply

SELECT 1 SELECT 2 STATE

OFF OFF OFF

OFF ON POSITIVE

ON OFF NEGATIVE

ON ON GROUND

9. Measure the voltage at the output of the BIAS MATCH. The output should be
0 VDC at this time.
3-14 311-023-02 Calibration Procedures CHAPTER 3

3.4.3 High Voltage Setup

NOTE
The positive voltage setting is dependent on wafer size. See Table 3-12 in
STEP11 for correct values.

NOTE
All High Voltages should be viewed on the “Monitor Chamber” screen.

1. Verify that the following LEDs are on +24 V, +15 V, −15 V, +12 V, I OK,
SELECT 1, SELECT 2, GEN/CHUCK INTERLOCK, and CHUCK ENABLE.
The V OK LED should be OFF at this time.

WARNING
Hazardous Voltage. Potentially lethal
electrical voltages and currents are present
which could cause shock, burns, or death.
Type 4 Electrical “Hot Work”.

2. Connect the DMM to TP10 24VCOM (−) and TP7(+). Adjust R22 on the power
supply PCB until 7.2 VDC is measured at TP7.

3. Adjust R23 per Table 3-12 below. (TP8 Referenced to 24 Com TP10):

Table 3-12. Positive Voltage Adjustment

Wafer TP8 Measurement Equivalent High Voltage Output

Size

300 mm − 6.00 VDC +1000 VDC ±10 VDC

4. From the DI/O screen, turn SELECT 1 OFF and SELECT 2 ON. Measure the
output of the BIAS MATCH using a DMM. The output should be close to the
appropriate value for 6″ or 8″ wafer size per Table 3-12 above. Adjust R23 until
output reads the correct value according TABLE 3 ±10 VDC.
5. From the DI/O screen, turn SELECT 1 OFF and SELECT 2 OFF. The BIAS
MATCH output should now read 0 VDC.
CHAPTER 3 Calibration Procedures 311-023-02 3-15

3.4.4 Voltage OK Signal Setup (V OK)

NOTE
All high voltages should viewed on the Monitor Chamber screen.

1. Connect the DMM to TP11 common (−) and TP4 (+). Adjust R25
until −3.25 VDC ±0.1 VDC is measured. This adjusts the upper limit for the V
OK signal to −1300 VDC.
2. Connect the DMM to TP11 common (−) and TP5 (+). Adjust R24
until −2.75 VDC ±0.1 VDC is measured. This adjusts the lower limit for the V
OK signal to −1100 VDC.

3.4.5 Current OK Signal Setup (I OK)

NOTE
All high voltages should be viewed on Monitor Chamber screen.

1. Connect the DMM to TP11 common (−) and TP1 (+). Adjust R31 until −4.00
VDC ± 0.1 VDC is measured at TP1. This adjusts the negative output current limit
for the I OK signal to −400 µA.
2. Connect the DMM to TP11 common (−) and TP2 (+). Adjust R30 until + 4.00
VDC ± 0.1 VDC is measured at TP2. This adjusts the positive output current limit
for the I OK signal to +400 µA.
3. Turn SELECT 1 OFF and SELECT 2 ON. Verify DC output voltage per Table 3-13
below. The I OK LED should be ON.
4. Connect the DMM to TP11 common(−) and TP3(+). Verify voltage per Table 3-13
below:

Table 3-13. TP3 Values 300mm Chambers

WAFER SIZE TP3 MEASUREMENT EQUIVALENT DC OUTPUT

VOLTAGE

300mm − 0.95 VDC ± 0.1 VDC + 950 VDC ± 10 VDC

5. Turn SELECT 1 ON and SELECT 2 ON.

6. The ECPS output voltage should be 0 VDC and the I OK LED should be ON.
3-16 311-023-02 Calibration Procedures CHAPTER 3

3.5 RF Generator Setup and Calibrations

This chapter includes the following sections:

• Section 3.5.1, Recommended Tools

• Section 3.5.2, RF Generator Rack Descriptions
• Section 3.5.3, RF Power Calibrations
• Section 3.5.4, RF Generator Frequency Tunning

3.5.1 Recommended Tools

• RF Power Meter (Capable of reading upto 10,000 Watts). Recommend Bird 1024
RF power meter.
Applied Materials Part No. 1040-01137
• RF Power Sensor head, Frequency range 1.5 MHz to 32 MHz.
Applied Materials Part No. 1400-01199
• RF connectors:
Applied Materials Part No. 0720-03237(Bias Coax cable), 0720-04283 (Top/Side
Coax Cable) Useful connectors: Applied Materials Part No. 0720-03327,
0720-03469, 0720-01597
• RF 10,000W water cooled dummy load.
Applied Materials Part No.: TBD

3.5.2 RF Generator Rack Descriptions

3.5.3 RF Power Calibrations

The following procedures are the calibrations of the TOP, SIDE and Bias RF generators for
the 300 HDP-CVD Chamber.

• Section 3.5.3.1, Top Source Calibrations

• Section 3.5.3.2, Side Source Calibrations
• Section 3.5.3.3, Bias Generator Calibrations

3.5.3.1 Top Source Calibrations

This section will describe the calibration of the Advanced Energy 8000 W Top RF generator.

____ 1. Turn OFF and Lock Out the main CB on the front panel of the RF generator.
____ 2. Connect an RF Watt meter and power sensor head to the dummy load.
____ 3. Disconnect the TOP source RF cable from the RF bulkhead. Connect it to the
power sensor.
____ 4. Defeat the RF bulkhead interlocks. Interlock found on the RF bulkhead.
____ 5. Turn ON the CB on the front of the RF generator.
CHAPTER 3 Calibration Procedures 311-023-02 3-17

____ 6. Flow 100 sccm Ar from the MONITOR GAS PANEL. Give the turbo throttle
valve a CLOSE command. The chamber pressure should read >50 mTorr. If not,
adjust the turbo throttle valve to get a chamber pressure above 50 mTorr.
____ 7. Turn ON the TOP RF generators on the MONITOR CHAMBER screen.
____ 8. Set the TOP FORWARD POWER SETPOINT to 3000 W.
____ 9. If the Watt meter reads 3000 W ±5 W skip to step 12.
____ 10. Turn OFF the TOP RF generator, from the monitor chamber screen. (This step is
important because it allows the system to reset the calibration factor in the
RF generator)
____ 11. Adjust the 10 V SETPOINT EQUIVALENT, (This can be found on the RF cal
page, MISC> PROCESS CHAMBER PARAMETERS> RF CALIBRATIONS.)
____ 12. Set the TOP FORWARD POWER SETPOINT to 3000 W. Repeat steps 9 to 12
until the power meter reads 3000 W ±5 W.
____ 13. From the same page adjust the 10 V FORWARD EQUVALENT until the display
the MONITOR CHAMBER screen displays 3000 W ±5 W.
____ 14. From the MONITOR CHAMBER screen turn OFF the Top RF generator.
____ 15. Shut off the gas flow to the chamber.
____ 16. Switch OFF the CB on the front of the RF generator.
____ 17. Reconnect the RF cable to the RF bulkhead on the system mainframe. Re-enable
the interlock on the bulkhead.
____ 18. Turn ON the CB.

3.5.3.2 Side Source Calibrations

This section will describe the calibration of the Advanced Energy 8000W SIDE RF generator

____ 1. Turn OFF and Lock Out the main CB on the front panel of the SIDE RF generator.
____ 2. Connect an RF Watt meter and power sensor head to the dummy load.
____ 3. Disconnect the SIDE source RF cable from the RF bulkhead. Connect it to the
power sensor.
____ 4. Defeat the RF bulkhead interlocks. Interlock found on the RF bulkhead.
____ 5. Turn ON the CB on the front of the SIDE RF generator.
____ 6. Flow 100 sccm Ar from the MONITOR GAS PANEL. Give the turbo throttle
valve a CLOSE command. The chamber pressure should read >50 mTorr. If not,
adjust the turbo throttle valve to get a chamber pressure above 50 mTorr.
____ 7. Turn ON the SIDE RF generators on the MONITOR CHAMBER screen.
____ 8. Set the SIDE FORWARD POWER SETPOINT to 3000 W.
3-18 311-023-02 Calibration Procedures CHAPTER 3

____ 9. If the Watt meter reads 3000 W ±5 W skip to step 12.

____ 10. Turn OFF the SIDE RF generator, from the monitor chamber screen.(This step is
important because it allows the system to reset the calibration factor in the
RF generator)
____ 11. Adjust the 10 V SETPOINT EQUIVALENT, (This can be found on the RF cal
page, MISC> PROCESS CHAMBER PARAMETERS> RF CALIBRATIONS.)
____ 12. Set the SIDE FORWARD POWER SETPOINT to 3000 Watts. Repeat steps 9 to
12 until the power meter reads 3000 W ±5 W.
____ 13. From the same page adjust the 10 V FORWARD EQUVALENT until the display
the MONITOR CHAMBER screen displays 3000 W ±5 W.
____ 14. From the MONITOR CHAMBER screen turn OFF the SIDE RF generator.
____ 15. Shut off the gas flow to the chamber.
____ 16. Switch OFF the CB on the front of the RF generator.
____ 17. Reconnect the RF cable to the RF bulkhead on the system mainframe. Re-enable
the interlock on the bulkhead.
____ 18. Turn ON the CB.

3.5.3.3 Bias Generator Calibrations

Advanced Energy 10 kW RF generator

____ 1. Turn OFF and Lock Out the main CB on the front panel of the BIAS RF generator.
____ 2. Connect an RF Watt meter and power sensor head to the dummy load.
____ 3. Disconnect the BIAS source RF cable from the RF bulkhead. Connect it to the
power sensor.
____ 4. Defeat the RF bulkhead interlocks. Interlock found on the RF bulkhead.
____ 5. Turn ON the CB on the front of the BIAS RF generator.
____ 6. Flow 100 sccm Ar from the MONITOR GAS PANEL. Give the turbo throttle
valve a CLOSE command. The chamber pressure should read >50 mTorr. If not,
adjust the turbo throttle valve to get a chamber pressure above 50 mTorr.
____ 7. Turn ON the BIAS RF generators on the MONITOR CHAMBER screen.
____ 8. Set the BIAS FORWARD POWER SETPOINT to 3000 W.
____ 9. If the Watt meter reads 3000 W ±5 W skip to step 12.
____ 10. Turn OFF the BIAS RF generator, from the monitor chamber screen.(This step is
important because it allows the system to reset the calibration factor in the
RF generator)
____ 11. Adjust the 10 V SETPOINT EQUIVALENT, (This can be found on the RF cal
page, MISC> PROCESS CHAMBER PARAMETERS> RF CALIBRATIONS.)
CHAPTER 3 Calibration Procedures 311-023-02 3-19

____ 12. Set the SIDE FORWARD POWER SETPOINT to 3000 Watts. Repeat step 9 to
step 12 until the power meter reads 3000 W ±5 W.
____ 13. From the same page adjust the 10 V FORWARD EQUVALENT until the display
the MONITOR CHAMBER screen displays 3000 W ±5 W.
____ 14. From the MONITOR CHAMBER screen turn OFF the BIAS RF generator.
____ 15. Shut off the gas flow to the chamber.
____ 16. Switch OFF the CB on the front of the RF generator.
____ 17. Reconnect the RF cable to the RF bulkhead on the system mainframe. Re-enable
the interlock on the bulkhead.
____ 18. Turn ON the CB.

3.5.4 RF Generator Frequency Tunning

The frequency range for the TOP RF generator is set to be between 1.765 MHz to
1.915 MHz. The frequency range for the SIDE RF generator is set between 2.015 Mhz to
2.165 Mhz.

The following procedure is for setting the frequency for the TOP and SIDe RF generators.

The tools required are:

• A Laptop or PC with DOS

• A program “HFVHOST”.
• A 9-pin D-SUB serial RS232 cable, male-female

3.5.4.1 TOP HFV-8000 Generator Frequency Limit Setup Procedure:

____ 1. Connect PC to serial port (9 pins) on the back of the top generator (previously
remove metal cover 6 by 1.5 in);
____ 2. Start “HFVHOST” program in DOS, you should see on screen (Enter command
number:);
____ 3. Enter: 3 (minimum frequency setting) type: 1765000 enter;
____ 4. Enter: 4 (maximum frequency setting) type: 1915000 enter;
____ 5. Enter: 5 (starting frequency setting) type: 1765000 enter;
____ 6. Enter: 133 (rept minimum frequency) you should see: 1765000;
____ 7. Enter: 134 (rept maximum frequency) you should see: 1915000;
____ 8. Enter: 135 (rept starting frequency) you should see: 1765000;
3-20 311-023-02 Calibration Procedures CHAPTER 3

3.5.4.2 “SIDE” HVF-8000 Generator Frequency Limit Setup Procedure:

____ 1. Connect PC to serial port on the back of the side generator;
____ 2. Start “HFVHOST” program in DOS, you should see on screen (Enter command
number:);
____ 3. Enter: 3 (minimum frequency setting) type: 2015000 enter;
____ 4. Enter: 4 (maximum frequency setting) type: 2165000 enter;
____ 5. Enter: 5 (starting frequency setting) type: 2100000 enter;
____ 6. Enter: 133 (rept minimum frequency) you should see: 2015000;
____ 7. Enter: 134 (rept maximum frequency) you should see: 2165000;
____ 8. Enter: 135 (rept starting frequency) you should see: 2100000;

3.6 Remote Plasma Clean Setup and Verification

3.6.1 Astron Facilities Requirement

Verify the following facilities requirement:

Table 3-14. ASTRON Facilities Requirement

Electrical 208 3-Phase VAC 60 Hz. Provided via connector

Cooling Facility cooling, 1.5gpm min.
Process Gas NF3 inlet pressure 15 psia–20 psia

Verify Astron power up when interlocks are satisfied. See Chapter 11, Interlock Verification
in the Startup Manual. Verify LCD screen displays READY.

Table 3-15 explains the display readout on the ASTRON.

Table 3-15. LCD Display Description

LCD Display Description

Ready XXXXX hr Indicates the Astron is ready to ignite the plasma; displays total
plasma operating time every 15 sec while in “READY” mode.
Plasma OK Indicates the Plasma is successfully running
High Line Indicates the line voltage exceeds 28 VAC
Low Line Indicates the line voltage has dropped below 180 VAC
Overtemperture Indicates that internal power board heat sink temperature has
exceeded 65 °C. Verify correct coolant flow.
Failed to Ignite Indicates the Plasma failed to ignite
Low Plasma Current Indicates the Plasma has extinguished
CHAPTER 3 Calibration Procedures 311-023-02 3-21

3.6.2 Plasma Test

The following procedure will test the ASTRON’s functionality to strike an argon plasma.

____ 1. Verify the chamber has a good leakup rate <2 mTorr/min.
____ 2. Verify all interlocks are satisfied. See Chapter 11, Interlock Verification in the
Startup Manual, to verify all interlocks.
____ 3. Isolate the chamber by closing the turbo gate valve and turbo isolation valve.
____ 4. Open the rough isolation valve.
____ 5. Flow 1000 sccm of Ar through the ASTRON.
____ 6. Pressurize the chamber between 1 Torr–4 Torr. This can be done by servoing the
pressure on the Throttle service screen.
____ 7. Turn ON the Astron from the monitor chamber screen.
____ 8. Verify the Astron displays Plasma OK on the LCD display.
____ 9. Turn OFF the astron and open the rough throttle valve.
____ 10. Turn off all gases flowing into the chamber.

3.7 Dome Heater Setup

This section contains the following:

• Section 3.7.1, Dome Instrumentation Checkout

• Section 3.7.2, Thermocouple Interlock Verification
• Section 3.7.3, Heat Up Dome to Operating Temperature
• Section 3.7.4, Run Hot Leak Rates
Prerequisites
Before beginning, the following procedures must be completed:

• Heat Exchanger Setup

____ Chamber A
____ Chamber B
____ Chamber C
____ Chamber D
3-22 311-023-02 Calibration Procedures CHAPTER 3

3.7.1 Dome Instrumentation Checkout

____ 1. Verify that the heater CB on the Primary or Secondary AC box is off.
____ 2. Select Chamber/Chamber Service/Monitor Dome.
____ 3. Set the screen variables according to:Figure 3-2

dd-mmm-yyyy Applied Materials CENTURA System 5200 0001 15:05:44

System Wafer Ch A Ch B Ch C Ch D Ch E Ch F Buff Program Misc

Chamber B Dome Heater Detail Screen

Configuration Monitor
Delta T1=(T2-T1): 0 °C | Contactor: OFF
Delta T2=(T3-T2): 5 °C | Dome TC Setpoint: 120 °C
Delta T3=(T4-T3): 5 °C | CNT TOP GSH SID
Max Zone to Zone TC Delta: 45 °C | Zone TC Setpoint: 120 120 125 130
Max TC Setpoint: 140 °C | Zone Temperature: 0 0 0 0
TC Setpoint Fault Band: 145 °C | Bids Loop Status: OFF OFF OFF OFF
Ramp Up Rate: 3 °C/min | Dual TC Reading: 0 0 0 0
Ramp Down Rate: 10 °C/min | ---------------------------------------------------------
Zone Shut Down TC: 70 °C | Task Status
Shut Down Timeout: 10 minutes | State: Fault
RS232 Serial Port: * | Fault: RS232 Receiving Fault
Read Zone TC via: RS232 | Action:
Dual Zone TC Reading: Enable * |
Max Dual Zone TC Reading Error: 30 | ---------------------------------------------------------
Max Dual Zone TC Reading Error: 30 | RS232
----------------------------------------------------- | Send: Z A 4 1
Control Parameters:...Offset Factor |Receive:
Bandwidth (°C) 2 2 10 2 | ---------------------------------------------------------
Reset Factor(°C/min):0.05 0.0 0.25 0 | Verify Parameters
Rate Factor(seconds): 1 1 6 5 | Verify: BANDWIDTH
Offset Factor(°C): 0 0 0 0 | Read back:
|
Monitor Chamber Gas Panel Monitor Process Chamber Service Previous

Figure 3-2. Dome Heater Detail Screen

RS232 Assignment

Chamber A Chamber B Chamber C Chamber D

8 9 10 11

** If the condition is “Disable”, the next line on Dual Zone TC does not appear.

____ 4. Set the Dome Temperature to 0 °C.

____ 5. Verify that the chamber is at base pressure.
CHAPTER 3 Calibration Procedures 311-023-02 3-23

____ 6. Verify that the vacuum pressure switch on the source signal conditioning box is
operational and that the vacuum is between 600 mmHg and 690 mmHg.
____ 7. Remove the stainless steel chamber top cover, and defeat the cover interlock. Tie
it closed with a tie wrap.
____ 8. Remove the Teflon vacuum line to the center gas feed assembly.
____ 9. Verify that the vacuum reading decreases to approximately 40 mmHg.
____ 10. Place thumb over exposed end of the teflon hose to create a vacuum. Vacuum
pressure should be > 650 mmHg.
____ 11. Replace the vacuum line.
____ 12. Select Monitor Chamber, and set the heat exchanger temperature to 70 °C. Proceed
with the next steps while the heat exchanger temperature is ramping up.
____ 13. Individually remove each thermocouple connector from the source signal
conditioning box, except for the side TCs.
____ 14. Measure the resistance to chassis ground of each lead with a DMM. Each lead
must read infinite resistance.
____ 15. Replace the connectors to their original positions (T1, T2, and T3 for the two
TC sets). The zone temperatures at the system display should read 0 °C when the
TC is disconnected.
____ 16. Verify that the TCs are reconnected as shown in the following table.

Thermocouple Cable Part TC Part Location

Number Number

T1 0150-18062 1310-01051 Center (Single TC)

T2 1310-01059 Top (Single TC)

T3 0150-18059 1310-01032 Ground shield

T4 0150-18060 1310-01050 Side

NOTE
The brown plastic nut securing the top TC should not be screwed in all the
way. Half of a thread is sufficient for the TC to make good contact.

____ 17. Turn on the heater CB. The dome temperature setpoint, as read in the Monitor
Chamber screen, should still be 0 °C.
____ 18. Wait for the heat exchanger to reach the 70 °C setpoint. Verify that the chamber
body temperature has stabilized at 70 °C. Check the temperature with the surface
probe just below the chamber viewport.
3-24 311-023-02 Calibration Procedures CHAPTER 3

____ 19. Select Monitor Chamber, and check the T1, T2, T3 and T4 dome thermocouples.
They should match the heat exchanger setpoints to within ± 2 °C. The side infrared
temperature sensor will read higher due to its non-linearity at lower temperatures.
Correct any problems before proceeding.

WARNING
Hazardous Voltage. Potentially lethal
electrical voltages and currents are present
which could cause shock, burns, or death.
Type 3 energized electrical “Hot Work”.

CAUTION
208 VAC is exposed at the heater terminal blocks

3.7.2 Thermocouple Interlock Verification

____ 1. Select Chamber/Chamber Service/Monitor Dome, and set ∆ T1, ∆ T2 and
∆ T3 to 0 °C, 5 °C, 5 °C.
____ 2. Set the dome temperature to 80 °C. If the temperature reading for any zone does
not increase, correct the problem before proceeding.
____ 3. Wait for the Task Status to change to Servo.
____ 4. Individually remove every TC connector from the source signal conditioning box.
Verify that a temperature deviation fault is displayed when each thermocouple is
removed. The dome heaters should turn off.
____ 5. Reinstall the TCs.
____ 6. Wait for the fault to clear and for the setpoint to go to 0. Reset the setpoint to 80 °C.
____ 7. Repeat step 4 to step 6 for every TC.
____ 8. Set the Dome Temperature to 0 °C.
____ 9. Verify that the chamber is at base pressure.
____ 10. Verify that the vacuum pressure switch on the source signal conditioning box is
operational and that the vacuum is between 600 mmHg and 690 mmHg.
____ 11. Remove the stainless steel chamber top cover, and defeat the cover interlock. Tie
it closed with a tie wrap.
____ 12. Remove the Teflon vacuum line to the center gas feed assembly.
____ 13. Verify that the vacuum reading decreases to approximately 40 mmHg.
CHAPTER 3 Calibration Procedures 311-023-02 3-25

____ 14. Place thumb over exposed end of the teflon hose to create a vacuum. Vacuum
pressure should be > 650 mmHg.
____ 15. Replace the vacuum line.
____ 16. Select Monitor Chamber, and set the heat exchanger temperature to 70 °C. Proceed
with the next steps while the heat exchanger temperature is ramping up.
____ 17. Individually remove each thermocouple connector from the source signal
conditioning box, except for the side TCs.
____ 18. Measure the resistance to chassis ground of each lead with a DMM. Each lead
must read infinite resistance.
____ 19. Replace the connectors to their original positions (T1, T2, and T3 for the two
TC sets). The zone temperatures at the system display should read 0 °C when the
TC is disconnected.
____ 20. Verify that the TCs are reconnected as shown in the following table.

Thermocouple Cable Part TC Part Location

Number Number

T1 0150-18062 1310-01051 Center (Single TC)

T2 1310-01059 Top (Single TC)

T3 0150-18059 1310-01032 Ground shield

T4 0150-18060 1310-01050 Side

NOTE
The brown plastic nut securing the top TC should not be screwed in all the
way. Half of a thread is sufficient for the TC to make good contact.

____ 21. Turn on the chamber tray and heater CBs. The dome temperature setpoint, as read
in the Monitor Chamber screen, should still be 0 °C.
____ 22. Wait for the heat exchanger to reach the 70 °C setpoint. Verify that the chamber
body temperature has stabilized at 70 °C. Check the temperature with the surface
probe just below the chamber viewport.
____ 23. Select Monitor Chamber, and check the T1, T2, T3 and T4 dome thermocouples.
They should match the heat exchanger setpoints to within ± 2 °C. The side infrared
temperature sensor will read higher due to its non-linearity at lower temperatures.
Correct any problems before proceeding.
3-26 311-023-02 Calibration Procedures CHAPTER 3

WARNING
Hazardous Voltage. Potentially lethal
electrical voltages and currents are present
which could cause shock, burns, or death.
Type 3 energized electrical “Hot Work”.

CAUTION
208 VAC is exposed at the heater terminal blocks

3.7.3 Heat Up Dome to Operating Temperature

____ 1. Verify that the heater CB on the AC controller is on.
____ 2. Verify that the chamber controller CB on the system controller box is on.
____ 3. Select Chamber/Chamber Service/Monitor Dome.
____ 4. Set the screen variables according to Figure 3-2
____ 5. Leave the Dome heating overnight.

3.7.4 Run Hot Leak Rates

With Chamber at temperature run the Leak rates as follows:

____ 1. Take the desired chamber offline for maintenance

____ 2. From the Chamber Service screen, touch Online for Maintenance and select
Chamber Leakup from the pulldown menu
____ 3. Ensure that all the variables are entered correctly
____ 4. Touch Start Leakup Program to begin the leak rate test
CHAPTER 3 Calibration Procedures 311-023-02 3-27

3.8 Chamber Manometer Calibration and Verification

Lower pressure manometers (100 mTorr and 10 Torr) are adjusted at base pressure. The
chamber must pass the manual leak up check before proceeding with the manometer
adjustments.

This section includes the following sections:

• 100 mTorr Manometer Adjustment, Section 3.8.1

• 10 Torr Manometer Adjustment, Section 3.8.2
• 1000 Torr Manometer Adjustment, Section 3.8.3
• Chamber Foreline Manometer Adjustment, Section 3.8.4

3.8.1 100 mTorr Manometer Adjustment

The isolation valve for this manometer is open below 100 mTorr. Below this pressure, both
the 10 Torr and the 100 mTorr manometers read the pressure. The pressure from both
manometers displays on the AI screen. The pressure from the 100 mTorr manometer displays
on the Monitor Chamber screen when the chamber pressure is below 100 mTorr.

____ 1. Refer to the Monitor Chamber screen to ensure that the chamber is at base pressure
and that the turbo is pumping.
____ 2. Adjust the zeroing potentiometer on the manometer to read between 0 V and
0.002 V on the AI screen. The voltages and their locations are shown in Table 3-16
and Table 3-17. DO NOT adjust the SPAN potentiometer.

Table 3-16. Base Pressure Manometer Setpoints

100 mTorr 0.00–0.08 V

10 Torr 0.002–0.005 V

Table 3-17. Manometer AI Voltage Locations

Chamber A Chamber B Chamber C Chamber D

100 mTorr 1–9 2–9 3–9 4–9

10 Torr 1–15 2–15 3–15 4–15

____ 3. Verify that the chamber pressure is between 0.20 mTorr and 0.80 mTorr. If the
pressure is not in this range, adjust the manometer until it is.
3-28 311-023-02 Calibration Procedures CHAPTER 3

3.8.2 10 Torr Baratron Adjustment.

Maintain chamber base pressure for this procedure.

____ 1. Check the chamber pressure on the Monitor Chamber screen.

____ 2. Adjust the zeroing potentiometer on the 10 Torr manometer to read, between
0.002 V–0.005 V on the AI screen. DO NOT adjust the SPAN potentiometer.

3.8.3 1000 Torr Baratron Adjustment

Maintain chamber pressure for this procedure

____ 1. Check the chamber pressure on the Monitor Chamber screen.

____ 2. Adjust the zeroing potentiometer on the 1000 Torr manometer to read, between
0.002 V–0.005 V on the AI screen.

3.8.4 Chamber Foreline Manometer Adjustment

____ 1. Verify that the gate valve is closed.
____ 2. Verify that the turbo isolation valve is closed.
____ 3. Verify that the rough valve is closed.
____ 4. Verify that the helium valves are closed.
____ 5. Wait 5 minutes.
____ 6. Select the Monitor Chamber screen, and check that P, the Foreline pressure, is
such that 2 mTorr < P < 7 mTorr. Record the readings in Table 3-18. If the pressure
is not in this range, adjust the zeroing potentiometer on the foreline manometer
achieve the correct reading.

Table 3-18. Chamber Foreline Pressure (mTorr)

Chamber A Chamber B Chamber C Chamber D

______________ ______________ ______________ _____________
CHAPTER 3 Calibration Procedures 311-023-02 3-29

3.8.5 Pressure Interlock Setup

This procedure should be followed to set the overpressure trip points of the Ultima Chamber
at 9.5 Torr for the Chamber manometer and the Chamber foreline manometer.

____ 1. Measure the DC voltage at TP2 of the Chamber Dual Manometer switch box. Set
to 9.5 V by adjusting the potentiometer. This corresponds to 9.5 Torr pressure trip
point.
____ 2. To verify the setting, perform the following steps.
____ 3. Flow 1000 sccm of Ar to the chamber.
____ 4. Close the Gate Valve and make sure that the foreline isolation valve is closed.
____ 5. Confirm that the gas flow stops and the Chamber Cover Interlock trips at 9.5 Torr.
____ 6. Open the Foreline Isolation Valve and pump the chamber to below the 200 mTorr.
____ 7. Close the Foreline Isolation Valve and open the Gate Valve
____ 8. Measure the DC voltage at TP2 of the Foreline Manometer switch box. Set to
9.5 V by adjusting the potentiometer. This corresponds to 9.5 Torr pressure trip
point.
____ 9. To verify the setting, perform the following steps.
____ 10. Isolate the Turbo Pump by closing the Gate Valve and Turbo Isolation Valve
____ 11. With all interlocks satisfied, unplug the Foreline manometer.
____ 12. Verify that the Chamber Cover Interlock trips.
____ 13. Plug the Foreline manometer back in.

3.9 Chamber Temp Calibration

See Figure 3-3 for the location of where to take the chamber wall temperature.

____ 1. Verify the chamber wall temp is 65 °C.

____ 2. Adjust the SMC heat Exchanger 10 V forward setpoint calibration until the wall
temperature is 65 °C. Depending on how far the SMC Heat exchanger is from the
chamber, allow the temperature to stabilize before making any adjustments.
3-30 311-023-02 Calibration Procedures CHAPTER 3

Measure Point
See Detail A

DETAIL A

Temperature measurement point (Some Components removed)

Figure 3-3. Temperature Measurement Point

CHAPTER 3 Calibration Procedures 311-023-02 3-31

3.10 Wafer Temperature Monitor Setup/Calibration

The purpose of this procedure is to provide step by step instructions for the calibration of the
Wafer Temperature Monitor System.

3.10.1 Parts Required

• Cathode Assembly (0010-02269) fitted with Sapphire Light Probe (1150-01033)
and Fiber Optic Cable (0620-01757) installed in chamber
• Radiometer (0190-36625) (Model 2000 OFT with/three 1020nm channels and
one 905nm calibration channel)
• Optical Fiber Transmission Cable (0620-01755 or 0620-01756) installed on
system.

3.10.2 Tools Required

• Temperature Match Kit (0190-36646) Figure 3-4

TEMP MATCH TOOL

0010-18311

TEMP MATCH PLATE

ESC

TEMP MATCH KIT 0190-36646

Figure 3-4. Temperature Match Kit

3-32 311-023-02 Calibration Procedures CHAPTER 3

3.10.3 Preparation

NOTE
Prior to completing calibration, 25 deposition wafers should be run to season
the Sapphire Light Probe

____ 1. Cool the process chamber to be calibrated to 25 °C and vent the chamber.
____ 2. Power up the Radiometer and Temperature Match and let them warm up for
30 minutes.
____ 3. Open process chamber.
____ 4. Put lift pins in process position (it makes calibration easier).
____ 5. Connect the Radiometer RS232 cable (0620-01754) to the Temp Match Tool.

3.10.4 Calibration
____ 1. At the rear of Radiometer, install the Optical Fiber Transmission Cable of the
channel to be calibrated into the fourth port (lowest port). The fourth port is the
calibration port. (Refer to Figure 3-5)

CALIBRATION PORT

Figure 3-5. WTM Calibration Port

____ 2. On the Radiometer, scroll through the Channel Menu by pressing the CH button
to get to the ZERO CAL display. Press ENTER to initiate the zero calibration.
(Refer to Figure 3-6)
CHAPTER 3 Calibration Procedures 311-023-02 3-33

Figure 3-6. Radiometer

____ 3. Scroll through the Channel Menu to get to the CH #4 display. Press enter. If CH
#4 is not on, scroll through the Input Menu by pressing the INPUT button to get
to the OFF display. Press the up arrow to turn on CH #4. Press ENTER.
____ 4. Scroll through the Input Menu and verify that the Emissivity and Sensor Factor
during calibration is 1.0. If not, change the values as needed.
____ 5. Scroll through the Input Menu to get to the TEMP display for the CH #4. Press
enter. The display should now be reading a temperature in the 300 °C–500 °C
range. This temperature is based on the ambient light being picked up by the
Sapphire Light Probe at the ESC.
____ 6. For the Temperature Match Plate, leave the Delrin Pin in place for the type of ESC
the plate has to mount on to. Remove the two Delrin Pins for the other two ESC
types. Mount the plate on to the ESC. (See Figure 3-7)
3-34 311-023-02 Calibration Procedures CHAPTER 3

DELRIN
PIN

DELRIN
PIN

DELRIN
PIN

Figure 3-7. Temp Match Plate

____ 7. Fit the Temperature Match into the Temperature Match Plate over the Sapphire
Light Probe on the ESC. Refer to Figure 3-4 Adjust the position of the Temperature
Match over the Sapphire Light Probe until you get the maximum temperature
reading on the Radiometer. This temperature is based on the light being emitted
by the Temperature Match.
____ 8. Scroll through the Input Menu to get to the TEMP display. Press ENTER. Change
the temperature displayed on the Radiometer to the temperature rating of the
Temperature Match Tool. The temperature will be on the side of the Temp Match
Tool. Use the ∧ and ∨ arrow buttons of the Radiometer to change temperature reading.
Press ENTER.
____ 9. Scroll through the Input Menu to get to the SENSOR display.
____ 10. Record the sensor factor displayed. Chamber ________ Sensor
Factor___________.
____ 11. Multiply the sensor factor by 0.781. The product is the corrected sensor factor for
the 1020nm wavelength. 0.781 is the correction factor provided by Sekidenko.
____ 12. Record the corrected sensor factor for the respective chamber. Corrected Sensor
Factor ____________. For reference, the corrected sensor factor should fall
between 0.4 and 0.7.
____ 13. Remove the Optical Fiber Transmission Cable from the calibration port and
connect it to the respective port of the channel to be used. Record channel number.
Channel ___________.
____ 14. Install the process kit.
____ 15. Repeat this calibration procedure for the other 300mm Chambers equipped with
the Wafer Temperature Monitor on the platform.
CHAPTER 3 Calibration Procedures 311-023-02 3-35

3.10.5 Software Setup

____ 1. On the system monitor, go to chamber configuration screen for the respective
chamber.
____ 2. Enable the Wafer Temperature Monitoring system.
____ 3. Verify that RS232 is reading yes. If it is not, change as needed.
____ 4. Verify that the Port to be used is 14. If it is not, change as needed.
____ 5. Change the channel number to the correct channel number. This is based on how
the Optical Fiber Transmission Cable is connected from a channel port to a
chamber cathode. For example, if an Optical Fiber Transmission Cable is
connected from channel port 1 to chamber A cathode, the correct WTM channel
for chamber A will be channel 1. If an Optical Fiber Transmission Cable is
connected from channel port 3 to chamber D cathode, the correct WTM channel
for chamber D will be channel 3. Channel ports 1 through 3 can be used on any
Ultima Chamber at one time.
____ 6. Verify that the input rate is 2.0 readings/sec. If it is not, change as needed.
3-36 311-023-02 Calibration Procedures CHAPTER 3
CHAPTER 4 Corrective Maintenance Procedures 311-023-02 4-1

4 Corrective Maintenance Procedures

This chapter contains corrective maintenance procedures for the 300mm Ultima HDP-CVD
Chamber. Maintenance personnel should be thoroughly familiar with the system’s screens
and the 300mm Ultima HDP-CVD chamber before doing the following procedures. Refer
to the 300mm Ultima HDP-CVD Chamber Manual for additional information.

This chapter contains the following sections:

• Section 4.1, Turbo Throttle Valve O-ring Replacement

• Section 4.2, Cathode Rebuild Procedure
• Section 4.3, 300mm Side Coil Trouble Shooting
• Section 4.4, Side Coil Inspection Procedure
• Section 4.5, Side Coil Replacement

4.1 Turbo Throttle Valve O-ring Replacement

After some period of operation the turbo throttle valve drive seals can begin to deteriorate.
Once the seal material begins to break down it can become a source of particles and chamber
leaks. The following procedure describes how to replace the seals.

This section contains the following:

• Section 4.1.1, Parts Required

• Section 4.1.2, Tools Required
• Section 4.1.3, Preparation
• Section 4.1.4, Disassembly Procedure
• Section 4.1.5, Reassembly Procedure
• Section 4.1.6, Chamber Recovery
• Section 4.1.7, Turbo Throttle Valve Adjustment

4.1.1 Parts Required

• Part No. 3700-01635, O-ring Quad Ring Q411, (Qty: 3)

4.1.2 Tools Required

• Standard Allen wrench set
• Small Phillips style screw driver
• Disposable cleanroom wipes
• IPA
4-2 311-023-02 Corrective Maintenance Procedures CHAPTER 4

4.1.3 Preparation
____ 1. Put the turbo throttle valve in the closed position.
____ 2. Follow prescribed procedures to vent the process chamber.
____ 3. Turn off the generator rack circuit breaker and lockout/tagout the generator rack.
____ 4. Disconnect the connector on the throttle valve drive motor.

4.1.4 Disassembly Procedure

____ 1. Remove the linkage cover (item #31)
____ 2. Remove the insert body (item #1) along with the drive motor from the chamber.
Place assembly on a flat surface.
____ 3. Loosen the set screws that secure the drive motor to the drive shaft and slide the
drive motor off of the shaft.
____ 4. Remove and retain the hardware securing the drive attachment and remove the
drive attachment.
____ 5. Take note how the linkages are installed (item #28 and #29) and remove them
from the bellcranks (item #12 and #13).
____ 6. Remove the left, center and right blades (items #15, #16, and #17) from the shafts
and cover (item #6, #7, #8, #19 & #20). Ensure to remove the half ring (item #22).
____ 7. Remove the shafts from the body (item #1) by removing the flanges (item #13
and #2) and the retainer ring (item #11). Take note on how the o-ring, washers,
bearings and spacers are installed (item #3, #4, #12, #9, and #10).
____ 8. Repeat for each shaft.
CHAPTER 4 Corrective Maintenance Procedures 311-023-02 4-3
Turbo Throttle Valve Assembly (1 of 3)
Figure 4-1.
4-4 311-023-02 Corrective Maintenance Procedures CHAPTER 4
Turbo Throttle Valve Assembly (2 of 3)
Figure 4-2.
CHAPTER 4 Corrective Maintenance Procedures 311-023-02 4-5
Turbo Throttle Valve Assembly (3 of 3)
Figure 4-3.
4-6 311-023-02 Corrective Maintenance Procedures CHAPTER 4

4.1.5 Reassembly Procedure

____ 9. Discard the Quad O-rings Part No. 3700-01635 and install new ones in the flange
body.
____ 10. Reinstall the shafts, flange, washers, bearings and spacers in the reverse order of
removal.
____ 11. Install the blades on the shafts.
____ 12. Install the linkages on the bellcranks.
____ 13. Install the drive motor to the drive shaft.
____ 14. Install the assembly into the chamber and install the linkage cover.
____ 15. Install cable onto motor.

NOTE
Do not use any kind of lubricating material on the seals as this may result in
particle contamination in the chamber.

NOTE
To assure proper positioning of the flange blades they must be held in the fully
closed position while tightening the set screws in the hub clamps.

4.1.6 Chamber Recovery

____ 1. Prepare the chamber for processing by following the procedure in Section 2.3.4.2,
PM Recovery Procedure, 300mm Ultima HDP-CVD , with the following
addition:
• Once the leak rate is less than 1.0 mTorr/min, perform Section 4.1.7, Turbo
Throttle Valve Adjustment to calibrate the Turbo Throttle Valve.

4.1.7 Turbo Throttle Valve Adjustment

The chamber must be under vacuum and leak tight (leak rate < 1.0 mTorr/min) before
preforming this procedure. If the chamber is at atmosphere, follow the procedure PM
Recovery Procedure, 300mm Ultima HDP-CVD in Chapter 2.3.4.2 , until the leak rate is
within specification.

____ 1. Set the Argon flows as follows: Side Flow 100 sccm, Top Flow 20 sccm
____ 2. Home the Turbo Throttle Valve.
____ 3. Verify that the Turbo throttle valve is closed at the zero step count.
____ 4. Loosen the two set screws that hold (couple) the throttle valve drive gear to the
butterfly-shaft.
CHAPTER 4 Corrective Maintenance Procedures 311-023-02 4-7

____ 5. Turn the shaft to the closed position with a screwdriver inserted in the end of the
butterfly-shaft. The pressure should be >70 Torr and the Closed flag sensor should
still be on. Adjust to maximum pressure attainable.
____ 6. Tighten the set screws.
____ 7. Open and close the valve two times to verify that the chamber pressure returns to
above 70 mTorr each time the valve is closed. Readjust if necessary.
____ 8. Set the position to step 0 then increase the step position one step at a time until
the chamber pressure is between 60 mTorr and 70 mTorr.
____ 9. Insert the step position to the Throttle Valve Closed Position for the Turbo Throttle
Valve on the Throttle Control Screen.
____ 10. Command the Throttle Valve to OPEN then to CLOSED and verify pressure is
between 60 mTorr and 70 mTorr. Re-adjust until repeatable three times.

4.2 Cathode Rebuild Procedure

This procedure explains how to rebuild a cathode. Retain all hardware that is removed.This
chapter contains the following sections:

• Section 4.2.1, Parts Required

• Section 4.2.2, Tools Required
• Section 4.2.3, Cathode Removal
• Section 4.2.4, ESC Removal
• Section 4.2.5, ESC Replacement
• Section 4.2.6, Cathode Installation

4.2.1 Parts Required

Table 4-1. Cathode Assembly O-rings

Part No. Description Qty Item No.

3700-01036 O-RING ID.487 CSD.103 VITON 75DURO BLK 2 20
3700-01852 O-RING ID 0.549 CSD.103 VITON 75 DURO BLK 2 22
3700-02183 O-RING ID 0.546 CSD.139 VITON BLK 2 23
3700-02678 O-RING ID.081 CSD.103 1
3700-02677 O-RING ID.424 CSD.103 CHEMRAZ SS513 80DURO 2 29
WHT
3700-03026 SEAL FORMED CSD.139 80DURO CATH ASSY 2 25
4-8 311-023-02 Corrective Maintenance Procedures CHAPTER 4

4.2.2 Tools Required

• Cathode Assembly Stand, Part No. Yet Available.
• Standard Allen Wrenches
• Slotted Screwdriver
• O-ring Remover (plastic pick)
• Open-end Wrench Set
• Locating Pin ×2
• Bushing ×2
• Push Pin ×2
• Install Tool Collar, Part No. 0270-00689
• Install Tool Cathode Assembly, Part No. 0270-00690
• Disposable Cleanroom Wipes
• Gloves
• Bottle of IPA
• Torque wrench
• 1″ Blocks ×3
• WTM install/removal tool

4.2.3 Cathode Removal

The removal of the cathode assembly will require the assistance of 3 person’s minimum.

____ 1. Follow prescribed procedures to vent the process chamber.

____ 2. Give the SMC Heat Exchanger a set point of <30 °C.
____ 3. Open chamber lid using the mechanical lift until lid it is fully opened.
____ 4. Disconnect the water hoses to the cathode.
____ 5. Remove the bias match and components from the bias conductor. This includes
the white teflon insulator. See Figure 4-5
____ 6. Careful disconnect the WTM optic cable if any.
____ 7. Remove the process kit. Lift pins and cover. For the collar use the tool,
Part No.0270-00689.
____ 8. Remove the six covers with a screwdriver. If it is tight, apply IPA to the cover.
____ 9. Remove the six1/4″ mounting screws.
____ 10. Install the 2 bushings opposite of each in the mounting hole with the 2 alignment
pins in any position. This will help prevent the breakage of lift pin guides.
CHAPTER 4 Corrective Maintenance Procedures 311-023-02 4-9

____ 11. Install the 2 push pin tools opposite of each other in the 1/4″ mounting hole. Take
a wrench and slowly tighten each bolt until the cathode assembly raises up slightly.
This will break the seal between the cathode and chamber.
____ 12. Remove the 2 push pin tool.
____ 13. Install the cathode assembly tool. Mount it in the remaining four 1/4″ holes.
Tighten all bolts onto the cathode assembly.
____ 14. Slowly lift the cathode assembly up above the alignment pins with the help of
others.
____ 15. Once the assembly is above the pins, slightly move it towards the opposite side
of the bias match and up. Ensure that the water lines, RF strip and WTM cable
are sliding out of the opening of the chamber. Be careful as the RF strip and cables
may break. It is suggested that one person will guide the water lines, RF strip and
WTM cable through while the others are lifting.
____ 16. Place assembly on stand.

4.2.4 ESC Removal

____ 1. With cathode assembly on the stand. Remove the cathode assembly tool and
bushings.
____ 2. Drain the water with CDA.
____ 3. Apply IPA between the cathode base (item #11) and the ESC (item #10). This will
help in the separation of the ESC and insulator (item #14).
____ 4. Place the cathode assembly upside down on a flat clean surface.
____ 5. Remove the hose assembly (item #37).
____ 6. Place the 1″ blocks between the cathode base and flat surface about 120° apart.
This will create a 3″ gap between the ESC and flat surface.
____ 7. Remove the WTM optic cable block (not shown).
____ 8. Remove the water feed block (item #12). Use IPA if necessary to remove, it has
a piston seal and may require a screwdriver to pry it off.
____ 9. Remove the WTM fiber optic cable by loosening the nut with the WTM tool (not
shown). Slide the nut and tool off cable. Carefully pull cable and remove O-ring.
____ 10. Remove three bushings and ¼” bolts (item #3 and #19) from the cathode base,
leaving the other three installed. Loosen the other three bolts slowly in a pattern.
The ESC (item #10) should start to drop to the flat surface slowly. If not, try and
push down while loosening the bolts.
____ 11. Carefully remove the cathode base, ensuring not to bend the bias conductor (item
#8). Remove the O-rings (item #25 and #39) and delrin pins (item #1) from the
cathode base.
4-10 311-023-02 Corrective Maintenance Procedures CHAPTER 4

____ 12. Remove the insulator (item #14) also ensuring not to bend the bias conductor.
Remove the delrin pins from the insulator or ESC. Take note which side of the
insulator is mounted to the ESC.
____ 13. Remove the lift pin guides (item #13).
____ 14. Remove the O-ring (item #25) from the ESC.
____ 15. Remove the bias conductor (item #8) from the ESC.
____ 16. Remove the water blocks (item #2), take note of the orientation of the holes. The
most outer holes are towards the outside of the ESC.
____ 17. Remove the He feedthrough flange (item #4), if He cooling is used. The thread
(item #5) is actually installed into the feedthrough.
____ 18. Remove all the remaining o-rings (item #23 and #29).
____ 19. Replace all O-rings or parts as required.
CHAPTER 4 Corrective Maintenance Procedures 311-023-02 4-11
300mm Ultima HDP-CVD Cathode Assembly
Figure 4-4.
4-12 311-023-02 Corrective Maintenance Procedures CHAPTER 4
Bias Match and RF Feedthrough
Figure 4-5.
CHAPTER 4 Corrective Maintenance Procedures 311-023-02 4-13

IHC GAS PORTS

BIAS RF

FEED PORT

WTM FIBER-OPTIC

PORT

HEAT EXCHANGER

HOSE PORTS

Figure 4-6. 300mm Ultima HDP-CVD Cathode Port Locations

4-14 311-023-02 Corrective Maintenance Procedures CHAPTER 4

4.2.5 ESC Replacement

NOTE
If using a new ESC assembly refer to step a and step b.

a. Use a No. 4 screw to remove the two water plugs used to seal in the cooling
water.
b. Use a No. 4 screw to remove the two helium plugs used to seal in the helium.
____ 20. Clean all parts with IPA before installing.
____ 21. Inspect all O-ring grooves and ESC surface for defects.
____ 22. Install O-rings (item #23, #25 and #29) onto ESC.
____ 23. Install the two water block (item #2) onto ESC. Ensure the correct orientation as
shown in detail A. Have the outer mounting holes towards the edge of the ESC.
Make sure to have the water spiral (item #35) installed on the water block.
____ 24. Install the bias conductor (item #8) as shown in detail B.
____ 25. Install the three lift pin guides into ESC.
____ 26. Install the two delrin pins (item #1) onto ESC.
____ 27. Install the two He feedthrough flanges onto ESC. Ensure the thread (item #5) is
installed.
____ 28. Ensure to have the six spacer rings (item #31) installed on the insulator (item #14).
____ 29. Install the insulator onto ESC by sliding bias conductor thorough the center hole.
Ensure the delrin pins line up.
____ 30. Take the cathode base (item #11) and install two delrin pins (item #1). With a IPA
install the two O-rings (item #39) into base.
____ 31. Install the O-ring (item #25) onto the cathode base.
____ 32. Install the cathode base onto ESC by sliding the bias conductor thorough and line
up the delrin pins.
____ 33. Install six bushings (item #3) with 1/4″ bolts. Ensure to tighten evenly and torque
them to 35 lbs–40 lbs.
____ 34. Install the O-rings (item #20 and #22) onto two water feed blocks (item #12). It
should align with the water block (item #2).
____ 35. Install the two hose assembly (item #37) onto cathode base.
____ 36. Install WTM fiber optic cable (if applicable) onto cathode base with the
installation tool. Ensure to have the O-ring (3700-02678) installed on the quartz
side of cable and the washer on the other side. Carefully place cable into cathode
base and align. Ensure cable is snug. (Not shown).
CHAPTER 4 Corrective Maintenance Procedures 311-023-02 4-15

____ 37. Route the cable into the guide block and mount of cathode base.
____ 38. Carefully turn over cathode assembly and place on stand.
____ 39. Test the cathode assembly for water leaks by pressure or by connecting the heat
exchanger hoses.

4.2.6 Cathode Installation

The removal of the cathode assembly will require the assistance of 3 person’s minimum.

____ 1. Install the two bushings in the same position when cathode assembly was removed.
The two locating pins should be still installed in the chamber. If not, ensure that
the pins and bushings are in the same position. This will help guide the cathode
assembly into the chamber without breaking the lift pin guides.
____ 2. Install the cathode assembly tool, Part No. 0270-00690. Mount it in the remaining
four 1/4″ holes. Tighten all bolts onto the cathode assembly.
____ 3. Slowly lift the cathode assembly from the stand and align the bushings and the
locating pins on the chamber. At the same time, with the help of someone else,
guide the bias conductor, water hoses and WTM cable through the opening of the
hole.
____ 4. Remove the cathode assembly tool, bushings and locating pins.
____ 5. Install the six 1/4″ mounting screws in a star pattern.
____ 6. Install the six covers.
____ 7. Install the process kit. For the collar use the tool, Part No, 0270-00689. Lift pins
and cover.
____ 8. Install the white teflon insulator over the bias conductor and install the RF rod
onto it. Install the insulator over the rod.
____ 9. Install the bias match and components onto the chamber.
____ 10. Connect the heat exchanger hose and WTM fiber optic cable (if applicable).
____ 11. Follow the prescribed procedures for recovery.
4-16 311-023-02 Corrective Maintenance Procedures CHAPTER 4

4.3 300mm Side Coil Trouble Shooting

This procedure was created to assist in the troubleshooting process of side coil failures. If a
side coil problem occurs, Applied Materials recommends checking the following:

____ 1. Verify that system constants 3678 through 3689 are all set to the value 100. These
system constants control the temperature ramp down of the top, side, and ground
shield heaters. These values are taken from the lab tool.

Table 4-2. Dome Heater Ramp Down Constants

Syscon Description Value

3678 Chamber A dome heater top ramp down stability bandwidth. 100 °C
3679 Chamber B dome heater top ramp down stability bandwidth. 100 °C
3680 Chamber C dome heater top ramp down stability bandwidth 100 °C
3681 Chamber D dome heater top ramp down stability bandwidth. 100 °C
3682 Chamber A dome heater ground ramp down stability bandwidth 100 °C
3683 Chamber B dome heater ground ramp down stability bandwidth 100 °C
3684 Chamber C dome heater ground ramp down stability bandwidth 100 °C
3685 Chamber D dome heater ground ramp down stability bandwidth 100 °C
3686 Chamber A dome heater side ramp down stability bandwidth. 100 °C
3687 Chamber B dome heater side ramp down stability bandwidth. 100 °C
3688 Chamber C dome heater side ramp down stability bandwidth. 100 °C
3689 Chamber D dome heater side ramp down stability bandwidth. 100 °C

____ 2. Verify that all chambers using a contact TC have the correct Thermologic
Controller settings. These values are found by selecting the Dome Heater Detail
screen from the Chamber Service screen of each chamber with a contact TC. The
values should be as follows:

Table 4-3. Thermologic Control Settings

Bandwidth 2 2 5 2
Reset Factor .05 .05 .05 1.56
Rate Factor 2 2 2 2
Offset 0 0 0 0
Duty Cycle 100 100 100 100

____ 3. Confirm that the lid is getting at least 1 GPM of water flow with an external water
flow meter. Also, verify that the water flow is in the correct direction. Water should
flow from the chamber body to the lid. Water flow in the lid moves in the following
order: base → top cooling plate → ground shield → side coil.
CHAPTER 4 Corrective Maintenance Procedures 311-023-02 4-17

____ 4. Verify the resistivity of the side coil is greater than 2 MΩ using the Section 4.4,
Side Coil Inspection Procedure. Side coils which have less than
2 MΩ resistivity should be replaced.
____ 5. Verify that the side coil has been installed correctly. Gaps between the dome and
the side coil create “hot spots” which will eventually cause cracks in the side coil.

4.4 Side Coil Inspection Procedure

The following procedure outlines the steps for measuring the resistance of the dielectric
material inside the heater elements of the side coil assembly.

WARNING
Hazardous Voltage. Potentially lethal
electrical voltages and currents are present
which could cause shock, burns, or death.
Turn off, lockout and tagout.

4.4.1 Tools and Materials Required

• Standard allen wrench set
• 1 Megger meter (or Equivalent) — Combination Voltmeter and 1000 V supply
signal
• Medium Phillips head or flat head screw driver
• Latex Gloves

4.4.2 Inspection Procedure

____ 1. Turn Dome heating system OFF and allowing the dome to cool below 80 °C.
____ 2. LOTO the circuit breaker to the dome heaters. Located in the Primary or Secondary
AC rack.
____ 3. LOTO the RF generators. These breakers can be LOTO from the Primary or
Secondary AC rack or individually at the RF rack.
____ 4. Remove chamber lid cover.
____ 5. Remove Plexiglas cover to expose terminal block. (See Figure 4-7)
4-18 311-023-02 Corrective Maintenance Procedures CHAPTER 4

Remove the four screws

fastening the Plexiglas
cover, exposing the
terminal block

Figure 4-7. Dome Heater Terminal Block

____ 6. Using Phillips or flat head screw driver – remove screws fastening down heater
terminals.
____ 7. Connect the heater terminal lugs to the red lead (positive side) of the megger meter
and CONNECT THE BLACK LEAD (COMMON) TO THE GROUNDING
LEG OR COPPER TUBE OF THE SIDE COIL. See Figure 4-8.
CHAPTER 4 Corrective Maintenance Procedures 311-023-02 4-19

Black Clip
Red Clip

Two Heater wires

Attach red clip to both heater terminals

coil.
Attach black clip to copper tube on side
Set Megger to 1000V.
NOTE:
Apply Voltage and Read Display.
Ensure red clip is NOT touching
ground or you will have inaccurate
readings

Figure 4-8. Side Coil Resistance Check

4-20 311-023-02 Corrective Maintenance Procedures CHAPTER 4

____ 8. Ensure no part of your body is part of the circuit and then apply 1000 volts. If
heater dielectric resistance is less than 2 MΩ replace the side coil. If heater
dielectric resistance is greater than 2 MΩ the side coil is within operating
specifications and should be returned to operating condition again
____ 9. Remove Megger Alligator clips from ground and heater terminals.
____ 10. Reattach heater leads to terminal block
____ 11. Reattach Plexiglas cover on terminal block.
____ 12. Reinstall chamber lid cover.
____ 13. Remove LOTO from heater circuit breaker and RF generators
____ 14. Verify dome heater heats to temperature.
____ 15. Verify proper operation of heaters and source RF components

4.5 Side Coil Replacement

Table 4-4. SIDE COIL REPLACEMENT PARTS

Part Number Description QTY Item

NOT YET AVAILABLE Kit, Side Coil replacement 1
0040-04504 Side coil assembly, 300mm HDP CVD 1 34,Figure 4-9
5030-01003 Thermal compound 1
3300-02470 Fitting Elbow 3/8” union 2
0020-18909 Clamps 6 91,Figure 4-10

4.5.1 Tools and Materials Required

• Standard allen wrench set
• 11/32″, 7/16″, 5/16″, 5/8″, 11/16″, and 15/16″ open-end wrenches
• Medium flat head screw driver
• Knipex Part No. (81 03 230) or Sears Part No. (9-KN81039) Cap Pliers or similar
type instrument
• Disposable Cleanroom wipes
• IPA
• Gloves
• 3/8 Swagelok caps and plugs (2×)
• Feeler gauge 0.007″ thick to measure for gaps around the dome
CHAPTER 4 Corrective Maintenance Procedures 311-023-02 4-21

4.5.2 Installation Procedure

4.5.2.1 Preparation
____ 1. Turn Dome heating system off and allow dome to cool.
____ 2. Turn Heat Exchanger temperature down to 30° and allow system to cool.
____ 3. Turn Heat Exchanger off and close shutoff valves.
____ 4. Disconnect both the feed and return cooling water hose lines going to the lid.
____ 5. Turn the Turbo-pump off and vent the chamber.
____ 6. Turn breaker for Dome heaters off and LOTO.
____ 7. If procedure is done with lid installed on chamber, protect ESC and upper gas feed
lines from falling debris. (Clean wipes may be used as protective coverings)
____ 8. Drain the excess fluid out of the coolant hoses into a container.

4.5.2.2 Disassembly procedure

____ 1. Remove center TC using a 7/16″ wrench and remove the top zone TC. (Item 100
and Item 102 on Figure 4-12)
____ 2. Use a 9/64″ allen wrench to remove the gas lines on top portion of the lid assembly.
(Item 24 on Figure 4-12)
____ 3. Remove the heater cartridge from the center nozzle assembly. (Item 101 on
Figure 4-12)
____ 4. Disconnect the vacuum line on the center nozzle assembly. (Item 76 on
Figure 4-12)
____ 5. Using a 1/8″ allen wrench, remove the bolts on the center nozzle assembly and
remove the assembly.

NOTE
Be careful not to tilt the assembly to the side while removing it or the
top nozzle will break. (Item 103 on Figure 4-12).

____ 6. Using a 9/64″ allen wrench, disconnect both RF connecting straps by loosening
the clamps that grasps on to the posts. (Figure 4-12)
____ 7. Using a 5/16″ wrench, disconnect the AC wires to top heater plate. (Figure 4-12)
____ 8. Remove ground shield AC wires using an 11/32″ wrench. (E6 and E7 on
Figure 4-10)
____ 9. Remove TCs off ground shield using a flathead screwdriver. (Item 89 on
Figure 4-10)
4-22 311-023-02 Corrective Maintenance Procedures CHAPTER 4

____ 10. Disconnect cooling water lines to cooling plate and put plugs on the female side
and caps on the male side to prevent fluid from leaking out.
____ 11. Insert two 5/16-18 x 1-1/4″ bolts into top stack assembly where marked.
____ 12. Using a 5/32″ allen wrench, remove the four top stack assembly clamping screws.
____ 13. Using a 5/32″ allen wrench remove all six retaining bolts for top stack cooling
plate. (Item 78 on Figure 4-12)
____ 14. Remove cooling plate/heater assembly. (Aluminum Nitride Plate remains on the
dome)
____ 15. Remove TCs from sides. (Item 99 on Figure 4-11)
____ 16. Remove the ground shield by lifting it off of dome. (make sure the dried heat sink
compound does not get into gas feed hose or into chamber)
____ 17. Remove AC wires to side coil.
____ 18. Using a 5/32″ allen wrench, remove the six bolts and six side clamps on the coil.
Pay close attention to how the Vespell clamps are oriented, top and bottom so they
are reinstalled properly with the new side coil. Item 90, 91 and 135 on Figure 4-10)
____ 19. Remove water lines and RF lines.
____ 20. Using a 5/32″ allen wrench, remove clamping plates on tensioning blocks (Item
18 and 22 on Figure 4-9) and remove side coil (Item 34 on Figure 4-9).
____ 21. Clean the dome, graphite shield, and lid assembly with IPA using clean wipes.

4.5.2.3 Re-assembly Procedure

____ 1. Apply a thin coat of thermal compound (approximately 0.020″ to 0.030″ thick) to
the inside surface of the coil.
____ 2. Reinstall coil by very carefully expanding it and placing it on so as little compound
as possible is displaced. Please take extra care of the side coil while you
performing this task, this new side coil is not flexible like the old one. Once the
side coil is bent the wrong way, it can not be fixed.

NOTE
Compress tensioning spring and insert block device to keep it compressed
prior to installing coil. The spring should be fully compressed or as close to
full compression as possible. (See Figure 4-16).

____ 3. Install six (6) Vespell spacer and six (6) clamps but do not tighten them. Ensure
Vespell spacers are pushed down so that the bottom of the Vespell spacer sits on
top of the ceramic flange of the dome (See Figure 4-13). Also make sure they are
properly oriented, top and bottom.
CHAPTER 4 Corrective Maintenance Procedures 311-023-02 4-23

____ 4. Insert spacer block device (See Figure 4-14) and ensure spring is fully compressed.
Push left and right insulators against center tensioning wedge. Fasten both ground
and insulator caps which clamp the ends of the copper tube.
____ 5. Remove the blocking device holding the spring mechanism tensioned and using
Cap pliers — Gently but firmly — tighten the side coil around the dome to
eliminate any gaps. (See Figure 4-15)
____ 6. Using a 5/32″ allen wrench, tighten side clamps in a star pattern.

CAUTION
DO NOT over tighten. There should be some collapsing of the slot in the back of the
Vespell clamps to indicate clamp is being pushed against the coil and dome.

____ 7. Compress tensioning spring again you will notice there are gaps between the left
and right insulators and the tensioning wedge. Loosen the grounding clamp and
push the insulator towards the tensioning wedge — make sure the tube end does
not move. Eliminate the gap between the wedge & spring support and retighten
the ground clamp. Repeat process for insulator clamp.
____ 8. Loosen side clamps. Remove block from tensioning mechanism again. The
tensioning spring should be fully compressed (See Figure 4-16). Check side coil
for gaps if any are greater than 0.007″. If gaps are eliminated and tension spring
is fully compressed tighten side clamps in a star pattern. If gaps remain or spring
is loose repeat step 8.3.5 through step 8.3.8. The end goal is to end up with the
tensioning spring being as fully compressed as possible with the least amount of
gaps between the coil and dome.
____ 9. Install ground strap to tensioning block. (Item 18 on Figure 4-9)
____ 10. Reinstall cooling lines for the side coil.
____ 11. Apply fresh coat of thermal compound (approximately 0.020″ to 0.030″ thick) to
the ground shield graphite blocks.
____ 12. Reinstall ground shield by applying even pressure downwards and turning counter
clockwise. Ensure that the ground shield is not touching the side coil where the
ends come out.
____ 13. Reinstall graphfoil sheet taking precaution as to not misalign holes, especially on
the RF feeds. (RF feeds may be used as guides for this process)
____ 14. Reinstall heater stack assembly by using a 5/32″ allen wrench to tightening the
six bolts. (Item 78 on Figure 4-12)
____ 15. Reinstall the cooling lines for the cooling plate.
____ 16. Reinstall top RF insulators.
4-24 311-023-02 Corrective Maintenance Procedures CHAPTER 4

____ 17. Reinstall center nozzle assembly by using a 1/8″ allen wrench to tighten the three
bolts. (Item 103 on Figure 4-12)
____ 18. Reinstall AC wires to top heater plate by using a 5/16″ wrench to tighten the hex
nuts on the posts. (Item 160 and 161 on Figure 4-12)
____ 19. Reinstall RF connecting straps. (Figure 4-12)
____ 20. Reinstall gas lines and TCs. (Figure 4-12)
____ 21. Thread the plunger (Item 44 on Figure 4-12) in until the tip rests on the ground
shield. Then turn the plunger in ¼ turn.
____ 22. Using a 15/16″ wrench, tighten the hex nut (Item 69 on Figure 4-12) onto the
plunger to provide tension between the heater stack assembly and the ground
shield.
____ 23. Turn on SMC Heat Exchanger, verify that there are no fluid leaks after it has been
running for a few minutes. Fill the reservoir with 50% Glycol and 50% DI water.
Set heat exchanger setpoint to 65 °C.
____ 24. Remove clean wipes from chamber. Close chamber lid and pump down chamber.
____ 25. Remove LOTO from heater circuit breaker. Turn on heaters.
____ 26. Verify proper operation of heaters and source RF components.
CHAPTER 4 Corrective Maintenance Procedures 311-023-02 4-25

Ground Cap

Insulator Cap

Tensioner Wedge

Insulator, Left

Compression Spring

Insulator, Right
Spring Support

Figure 4-9. Side Coil Assembly (1 of 3)

4-26 311-023-02 Corrective Maintenance Procedures CHAPTER 4
Side Coil Assembly (2 of 3)
Figure 4-10.
CHAPTER 4 Corrective Maintenance Procedures 311-023-02 4-27

Figure 4-11. Side Coil Assembly (3 of 3)

4-28 311-023-02 Corrective Maintenance Procedures CHAPTER 4
Heater Stack and Top Gas Feed
Figure 4-12.
CHAPTER 4 Corrective Maintenance Procedures 311-023-02 4-29

Figure 4-13. Spacer and Clamp Installation

4-30 311-023-02 Corrective Maintenance Procedures CHAPTER 4

Figure 4-14. Side Coil Tensioning Mechanism

CHAPTER 4 Corrective Maintenance Procedures 311-023-02 4-31

CAP PLIERS

Tension Side Coil using Cap Pliers

Figure 4-15. Side Coil Tensioning

4-32 311-023-02 Corrective Maintenance Procedures CHAPTER 4

SPRING FULLY COMPRESSED AFTER REMOVING THE SPACER BLOCK

Figure 4-16. Compressed Spacer Block

CHAPTER 5 Spare Parts Identifier 311-023-02 5-1

5 Spare Parts Identifier

The 300mm Ultima HDP-CVD Spare Parts Identifier (SPI) provide the information you need
to identify and order spare parts. In the SPI you will find assembly drawings which provide
part numbers, quantities and descriptions. This SPI only depicts part informations and
drawing specific to 300mm Ultima HDP-CVD. For all other part information please consult
that particular chamber and platforms SPI.

• Section 5.1, Throttle Valve Assembly

• Section 5.2, Wafer Lift Mechanism Assembly
• Section 5.3, Lower Chamber Assembly
• Section 5.4, Upper Chamber Assembly
• Section 5.5, Cathode Assembly

NOTE
FOR NON STANDARD PARTS PLEASE CONTACT HDP-CVD TECHNICAL
SUPPORT

To order spare parts for any Applied Materials product, contact the Applied Materials Spare
Parts Department. The phone number is 1-800-468-8888 option 3.

When ordering parts, have the following information available:

1. Name of person ordering

2. Delivery contact, (including phone, address and pager number)
3. Customer Name
4. System Type and System Number
5. Part number
6. Part quantity
5-2 311-023-02 Spare Parts Identifier CHAPTER 5

5.1 Throttle Valve Assembly

Table 5-1. 0010-02368 Throttle Valve Assembly

Item No. Part No. Description Qty

Parent 0010-02368 THROTTLE VALVE ASSY, 300MM HDPCVD
1 0020-18812 BLADE LEFT, THROTTLE VALVE 300MM, HDPCVD 1
2 0020-07209 SHAFT, LEFT VANE TV, 300MM HDPCVD 1
3 0020-18814 INSERT BODY, THROTTLE VALVE, 300MM HDPCVD 1
4 0020-07208 SHAFT, CENTER VANE TV, 300MM HDPCVD 1
5 0020-07213 SHAFT, RIGHT VANE TV, 300MM HDPCVD 1
7 0020-18818 BLADE CENTER, THROTTLE VALVE, 300MM HDPCVD 1
8 0020-18819 BLADE RIGHT, THROTTLE VALVE, 300MM HDPCVD 1
9 0020-18820 COVER LINKAGE, THROTTLE VALVE, 300MM HDPCVD 1
10 0040-03928 ADAPTER MOUNT, THV DRIVE, 300MM HDPCVD 1
11 0020-18822 STANDOFF MOTOR MOUNT, THROTTLE VALVE, 300MM 8
HDPCVD
12 0020-18857 BELLCRANK DOUBLE END, THROTTLE VALVE, 300MM 1
HDPCVD
13 0020-18723 BELLCRANK SINGLE END, THROTTLE VALVE, 300MM 2
HDPCVD
14 0020-18265 COVER, SHAFT THRU HDP-CVD 3
15 0020-18267 HALF RING THROTTLE VALVE HDP-CVD 3
16 0020-07212 WASHER, COMPRESSION QUAD RING, 300MM HDPCVD 3
17 0020-07211 FLANGE, 0-RING SEAL TV, 300MM HDPCVD 3
18 0020-07207 SPACER, SHAFT BEARING, 300MM HDPCVD 3
19 0020-07210 FLANGE, PRE-LOAD TV, 300MM HDPCVD 3
20 0020-18366 SCREW,SLOTTED PAN HD, 8-32 X 5/16L, MONEL 400 9
21 0020-18367 SCREW,SLOTTED PAN HD, 8-32 X 0.15L, MONEL 400 6
22 0020-18610 SCREW,SHAFT,THV,HDPCVD 6
23 3060-01630 BRGBALL.253FT.625ODX.196W SST 6
24 3630-01007 RTNRRING EXT D-TYP 1/4SFT.45ODX.225IDX.025T SST 6
25 3691-01332 SCR FLT HD 4-40X1/4L TORX T10 82DEG 316SST EP 21
26 3700-01635 ORING QUAD RING Q4111 0.375 OD SHAFT ROTATION 3
27 3880-01119 WSHRWAVE SPRG.618OD X.440ID X.040FH SST 6
28 3850-01018 RODEND 10-32.190DIA SST SELF ALIGN 4
29 3810-01012 STUDTHREADED 10-32 X 2 SST DBL ENDED 4
30 3691-01365 SCR CAP SKT HD 1/4-20X1-3/4 TORXT30 316SSEP W/FW 4
31 3690-01085 SCRCAP SKT HD 6-32 X 3/8L HEX SKT SST 4
32 0040-03929 ADAPTER, THV DRIVE, 300MM HDPCVD 1
33 0010-02367 THROTTLE VALVE DRIVE ASSY, 300MM HDPCVD 1
34 3691-01349 SCR FLT HD 8-32X1/2L TORX T20 82DEG 316SST EP 4
35 3690-02529 SCRCAP FLT HD 1/4-20 X 1-3/4L PHIL SST 4
36 3691-01364 SCR CAP SKT HD 1/4-20X1-1/2 TORXT30 316SSEP W/FW 4
CHAPTER 5 Spare Parts Identifier 311-023-02 5-3
Turbo Throttle Valve (1 of 3)
Figure 5-1.
5-4 311-023-02 Spare Parts Identifier CHAPTER 5
Turbo Throttle Valve (2 of 3)
Figure 5-2.
CHAPTER 5 Spare Parts Identifier 311-023-02 5-5
Turbo Throttle Valve (3 of 3)
Figure 5-3.
5-6 311-023-02 Spare Parts Identifier CHAPTER 5

5.2 Wafer Lift Mechanism Assembly

Table 5-2. 0010-02309 Lift Mechanism Assy 300mm Ultima HDP-CVD

Item No. Part No. Description Qty
Parent 0010-02309 LIFT MECHANISM ASSY 300MM HDPCVD
1 0040-03747 LIFT PLATE, 300MM LIFT ASSY HDPCVD 1
2 0020-07045 BRACKET, ACTUATOR, 300MM LIFT ASSY HDPCVD 1
3 0020-07070 BRACKET, SENSOR, 300MM LIFT ASSY, HDPCVD 1
4 0020-18810 SCREW, HOLDER, 300MM, HDPCVD 1
5 0020-07033 BRACKET, LIFT ARM, LIFT ASSY, 300MM HDPCVD 1
6 0020-18824 CLAMP, LIFT, 300MM, HDP-CVD 1
7 0020-18825 FLAG, TOP SENSOR, LIFT 300MM, HDP-CVD 1
8 0020-18826 FLAG, LOWER SENSOR, LIFT 300MM, HDPCVD 1
9 0020-18297 COVER, BELLOWS, LIFT 1
11 0010-02268 LIFT ARM ASSY, 300MM HDPCVD 1
12 0100-09042 PCB ASSY, OPTO SWITCH 3
13 3020-01235 CYL AIR 40MMBORE 40MMSTRK DBL ACT 1
14 3760-01096 SLIDE GUIDE LM 60MMW 120MMLG SST 1
15 0040-03746 BELLOW, WELDMENT, 300MM LIFT ASSY HDPCVD 1
16 3300-02921 VALVE FLOW CONTROL 1MPA 1/8MNPT X 1/8T METER-OUT 2
18 3690-01071 SCRCAP SKT HD 1/4-20 X 1/2L HEX SKT SST 4
19 3690-01083 SCRCAP SKT HD 4-40 X 1/4L HEX SKT SST 8
21 3690-01093 SCRCAP SKT HD 10-32 X 1/2L HEX SKT SST 8
22 3690-01095 SCRCAP SKT HD 10-32 X 1-1/4L HEX SKT SST 4
23 3690-01167 SCRCAP SKT HD 4-40 X 5/16L HEX SKT SST 2
26 3690-03274 SCRCAP SKT HD 10-32 X 1-1/8L HEX SKT SST 3
27 3700-01121 ORING ID 2.109 CSD.139VITON75 DURO 1
28 3870-02372 VALVE FLOW CNTRL 1/8NPT X 1/8T METER-IN ONE TOUCH 1
29 3880-01004 WSHRFLAT #4 SST.031 THK 2
30 3880-01022 WSHRLKG SPLIT #4.203OD X.120ID X.025THK SST 11
31 3880-01246 WSHRFLAT #10.333ODX.211IDX.025THK SST 15
32 3880-01280 WSHRLKG SPLIT #.290OD X.195ID X.050THK SST 7
34 3880-01781 WSHRFLAT.687OD X.500ID X.03THK NYLON 2
35 3690-02798 SCR MACH SHLDR M4 X 5MMOD X 8MMLG HEX SKT HD SST 3
36 3700-01234 ORING ID 2.859 CSD.139 VITON 75 DURO BLK 1
38 3690-02256 SCRCAP SKT HD 8-32 X 1/2L HEX SKT SST 4
39 3690-01074 SCRCAP SKT HD 1/4-20 X 5/8L HEX SKT SST 4
CHAPTER 5 Spare Parts Identifier 311-023-02 5-7
Wafer Lift Assembly
Figure 5-4.
5-8 311-023-02 Spare Parts Identifier CHAPTER 5

5.3 Lower Chamber Assembly

Table 5-3. 0010-18225 Lower Chamber Assy, 300mm, Ultima

Item No. Part No. Description Qty Rev

Parent 0010-18225 LOWER CHAMBER ASSY,300MM,ULTIMA -
0 0240-03047 KIT, IHC GASLINE, 300MM HDPCVD 1 -
0 0150-01880 HARNESS ASSY,TURBO MOTOR INTERFACE,300MM 1 -
HDPCVD
0 0150-01416 HARNESS ASSY,RGH MOTOR INTERFACE,300MM 1 -
HDPCVD
0 0150-01413 HARNESS ASSY,SOURCE,CONDITIONING AND 1 -
INTERLOCKS
0 0240-02890 KIT, WAFER TEMP MONITOR, 300MM HDPCVD 1 -
1 0010-02368 THROTTLE VALVE ASSY, 300MM HDPCVD 1 -
2 0200-18100 LIFT PIN CERAMIC 3 -
4 0010-02226 CHAMBER ELECTRONIC CONTROL BOX, 300MM 1 -
5 0020-18869 COVER,SCREW,E-CHUCK,ULTIMA 300MM,HDPCVD 6 -
6 3870-02726 VALVE 325MM X 25.4MM ROLLCAM GATE 1 -
7 0900-01067 FLTR EMI CONN ADPTR 15 POS D-SUB 1 -
8 1350-01163 XDCRPRESS 10-100 TORR 1/4VCR-F +/-15VDC 1 -
9 3690-01405 SCRMACH HEX HD 1/4-20 X 7/8L SST 2 -
10 3690-03600 SCR JACK 4-40 HEX 3/16HT W/ NUT + WSHR CAD-PLT 2 -
11 3700-01035 ORING ID.424 CSD.103 VITON 75DURO BLK 1 -
13 3880-01045 WSHR FLAT #1/4.500OD X.265ID X.063THK SST 2 -
17 3690-03504 SCR CAP SKT HD M12X 40 HEX SKT SST 12 -
18 3880-52307 WSHR LKG SPR M12 SST 24 -
19 3880-01603 WSHR FLAT M12 13MMIDX24MMODX2.5MMTHK DIN125A 24 -
SST
21 3700-03042 ORING ID 14.975 CSD.210 CHEMRAZ 513, 80 DUROMETER 1 -
24 3691-01391 SCR CAP SKT HD 6-32X1/2L TORX T15 316SST EP W/FW 18 -
25 3440-01037 WDO SAPPHIRE LENS 25MM DIA X 2MM THK 2 -
26 0020-40190 UV FILTER 2 -
27 0020-18303 VIEW PORT 2 -
28 3700-02330 ORING ID.801 CSD.070 CHEMRAZ 80 DURO WHT 2 -
30 3700-02329 ORING ID.299 CSD.103 CHEMRAZ 90 DURO WHT 11 -
31 3320-01060 GSKT SHLD RF.094DIA 30LB/LIN-INCH STD-FORCE SST 9 -
32 3700-02515 ORING ID 20.955 CSD.210 CHEMRAZ SS513 80DURO WHT 1 -
42 3090-01219 BOLT HEX HD M12 X 35MMLG SST 12 -
46 3691-01359 SCR CAP SKT HD 10-32X3/4L TORX T27 316SSEP W/FW 6 -
48 1350-01131 XDCRPRESS 1000 TORR 1/4VCR 1% 9PIN DSUB 1 -
49 3320-01024 USE 3320-01165 GSKT VCR 1/4 IN CONTOURED RTNR 7 -
CHAPTER 5 Spare Parts Identifier 311-023-02 5-9

Table 5-3. 0010-18225 Lower Chamber Assy, 300mm, Ultima

Item No. Part No. Description Qty Rev

55 3870-02890 VALVE AIR-OPEN SPR-CL 1.5OD NW40 180DEG OPP 1 -
AIRFTG
56 3700-01087 SEAL CTR RING ASSY NW40 W/VITON ORING SST 5 -
57 0690-01036 CLAMP HINGED NW40 WING-NUT & SCR-CLOSURE AL 5 -
59 0010-09035 ASSY BWCVD THROTTLE VALVE 100,125 &150MM W/ 1 -
VITON
60 3300-02279 FTG TBG ELBOW 1/8T X 1/8MNPT 1-TOUCH QK-DISCON 1 -
61 3870-03093 VALVE AIR OPEN SPR CLOSE 2.0OD NW50 W/ 1/4VCR 1 -
62 3300-02176 FTG TBG CAP 1/4VCR-FEM HEX-BODY SST 1 -
71 0190-40098 SPRING, RF CONNECTOR SOURCE 2 -
80 0010-02036 CHAMBER FRAME ASSY, 300MM HDPCVD 1 -
81 3700-03038 ORING ID 1.296 CSD.139 CHEMRAZ SS513 80 DURO WHT 1 -
85 1270-01814 SWPRESS OPEN @50TORR CLOSE @27TORR.562-18 1 -
UNF
86 0720-05513 CONN ADPTR STR DELRIN-SQS-POL-PLUG TO SQS JACK 2 -
99 1350-01096 XDCR PRESS 10TORR 1/4VCR-F +/-15VDC 15P-D SET-PT 1 -
104 1330-01028 TIEMOUNT CABLE #6 SCR WEATH-RES BLK-NYL INDOOR 9 -
105 3690-01125 SCR MACH PAN HD 6-32 X 1/4L PHIL SST 9 -
108 0010-02792 VALVE ASSY, TURBO PUMP, 300MM HDPCVD 1 -
109 0050-18904 WELDMENT, IHC DUMP 2, ULTIMA HDPCVD 1 -
110 0050-28343 MANIFOLD, DUAL IHC 300MM, HDPCVD 1 -
111 3870-03049 VALVE GATE 14" PNEU ACT SOLENOID KALREZ SEAL 1 -
112 3620-01615 PUMP ASSY TURBO MOLECULAR 3000L/S VG350 IN KF50 1 -
115 0050-28153 WLDMT, CHMB, SIDE 02, RIGHT, 300MM, HDPCVD 1 -
116 0050-28152 WLDMT, CHMB, SIDE 02, LEFT, 300MM, HDPCVD 1 -
117 0050-28151 WLDMT, CHMB, SIDE SILANE, 300MM, HDPCVD 1 -
118 0050-28150 WLDMT, CHMB, TOP SILANE, 300MM, HDPCVD 1 -
119 0050-28149 WLDMT, CHMB, N2 VENT, 300MM, HDPCVD 1 -
200 3700-03024 SEAL FORMED CSD.139 CHEMRAZ 513 80DURO LIFT/ 1 -
CHBR
201 3700-03025 SEAL FORMED 13.908X.857 CSD.139 CHEMRAZ513 1 -
80DURO
202 3700-03026 SEAL FORMED CSD.139 CHEMRAZ513 80DURO CATH 1 -
ASSY
203 3700-02518 SEAL ASSY 20.135ID X.28W FLUOROLY W/SST SPR 1 -
204 0010-02269 CATHODE ASSY, 300MM HDPCVD 1 -
205 0200-00576 PIN, WEIGHT 300MM HDPCVD 3 -
206 0200-00454 BUSHING, LIFT PIN, 300MM HDPCVD 3 -
5-10 311-023-02 Spare Parts Identifier CHAPTER 5

Table 5-3. 0010-18225 Lower Chamber Assy, 300mm, Ultima

Item No. Part No. Description Qty Rev

207 0010-00013 WATER MANIFOLD ASSY, 300MM HDPCVD 1 -
208 0240-02902 KIT, WATER LINES, LOWER CHAMBER, 300MM HDPCVD 1 -
209 3300-03848 FTG QDIS’C MALE 3/4-16 UNF-2A HEX STEM 1 -
210 0190-01174 TUBE ASSY, LOWER CHAMBER WATER, 300MM HDPCVD 1 -
218 0690-01628 CLAMP BULKHEAD ALUM #6 NW40 SST 1 -
219 3700-01088 SEAL CTR RING ASSY NW50 W/VITON ORING SST304 4 -
220 0690-01037 CLAMP HINGED NW50 WING-NUT & SCR-CLOSURE AL 3 -
221 0690-01648 CLAMP BULKHEAD NW50 ALUM 1 -
222 3300-03888 FTG ELBOW 45’DEG 1.50T X 1.010RAD NW40 SST 1 -
223 3300-01405 FTGPIPE NIP RDCR CONICAL NW50XNW40 1.57L SST304 1 -
224 3300-03436 FTG TBG ADPTR NW25 X 1/4MVCR 1.4"LG SST 2 -
225 3700-01089 SEAL CTR RING ASSY NW25 W/VITON ORING SST 2 -
226 0690-01555 CLAMP BULKHEAD NW 25 6 BOLTS ALUM 2 -
227 0620-02819 CABLE ASSY MOTOR ANGLE/PUMP TO STR/PWR SUPPLY 1 -
3M
228 0620-02820 CABLE ASSY CONTROL ANG/PUMP TO STR/PWR SUPPLY 1 -
3M
234 0010-02561 LIFT MECHANISM ASSY, 300MM HDPCVD 1 -
235 0020-07046 BRACKET, STOP, 300MM LIFT ASSY, HDPCVD 1 -
236 3480-01055 DMPR SHOCK ABSORBER 1 -
241 0140-01119 MW AND DUAL HELIUM CONTROL 1 -
242 0140-01120 HARN ASSY, WATER LEAK & WATER FLOE INTLKS 1 -
243 0140-01122 HARNESS ASSY CHAMBER INTERCONNECT 1 -
244 0150-01267 HARN ASSY, MOTOR INTERFACE 1 -
245 0140-01121 HARN ASSY, CH. & FORLINE PRESSURE 300MM HDPCVD 1 -
246 0020-07220 OBS, HOLDER, PIN, 300MM, HDP-CVD 3 -
246 0020-01107 HOLDER, PIN, 300MM HDPCVD 3 -
247 0020-07221 INSULATOR BIAS MATCH HDP-CVD, ULTIMA 1 -
248 0050-28831 EPD, GAUGE 300MM HDPCVD 1 -
249 3700-02663 ORING ID .296 CSD .139 CHEMRAZ SC513 80 DURO WHT 2 -
250 3700-03048 ORING ID 9.984 CSD .139 CHEMRAZ SS513, 80DURO WHT 1 -
251 3700-03051 SEAL ASSY FORMED .228W FLUOROLY W/SST SPR 1 -
252 3690-03681 SCRCAP PNL SKT HD 1/4-20 X .360L SST 8 -
253 0050-27826 FORELINE, ENDPOINT TEE, 300MM HDPCVD 1 -
255 0020-07257 BLOCK, ASTRON, RPS, 300MM, HDPCVD 1 -
258 0040-04350 SPRING, RF SOURCE 300MM, HDPCVD 2 -
259 0090-36187 SWITCH RF INTERLOCK SOURCE 1 2 -
CHAPTER 5 Spare Parts Identifier 311-023-02 5-11

Table 5-3. 0010-18225 Lower Chamber Assy, 300mm, Ultima

Item No. Part No. Description Qty Rev

260 0020-41162 SLEEVE 4 -
261 0020-41133 SPRING SPACER 2 -
264 3700-01753 ORING ID 8.984 CSD .139 CHEMRAZ SC513 1 -
265 0020-07415 FLANGE, BIAS 300MM, HDPCVD 1 -
266 0020-07416 INSULATOR, BIAS 300MM, HDPCVD 1 -
267 0020-07417 CONDUCTOR, BIAS 300MM, HDPCVD 1 -
268 0020-07418 DOOR, SLIT VALVE 300MM, HDPCVD 1 -
269 0020-07363 COVER, SLIT VALVE, CH. TOP, 300MM, HDPCVD 1 -
270 0140-01458 HARNESS ASSY, PNEUMATIC 300MM HDPCVD 1 -
271 0050-28758 FORELINE, TURBO THV (PE EPD) 300MM, HDPCVD 1 -
277 0040-05015 COVER, LIFT ASSEMBLY, 300MM HDPCVD 1 -
278 0020-07853 COVER, LH GAS LINE, 300MM HDPCVD 1 -
279 0020-07854 COVER, RH GAS LINE, 300MM HDPCVD 1 -
280 0040-05107 BRACKET, LIFT CHAM 01-SP, 300MM HDPCVD 1 -
281 0040-05108 COVER, LIFT 01-SP, 300MM HDPCVD 1 -
282 0040-05109 SPACER, LIFT LOW, 01-SP, 300MM HDPCVD 1 -
283 3691-01217 SCR CAP SKT HD 1/2-13X1-1/2L TORX T55 SST 8 -
284 3691-01196 SCR CAP SKT HD 3/8-16X1-1/4L TORX T50 SST 4 -
285 0190-01402 RF AUTO-TUNE MATCH, 13.56MHZ, BIAS, 300MM HDPCVD 1 -
286 0020-01118 BLANKOFF, FLANGE GAS, 300MM HDPCVD 1 -
287 0020-01109 STRAIN, RELIEF BIAS RF MATCH, 300MM HDPCVD 1 -
288 0020-01110 BRACKET, STRLF BIAS RF MATCH, 30MM HDPCVD 1 -
289 0020-01111 BASIN, CHAMBER, 300MM HDPCVD 1 -
290 0020-01112 PLATE, RF INTERLOCK SWITCH, 300MM HDPCVD 2 -
291 0040-05445 RETAINER, SPRING R, RF SOURCE, 300MM HDPCVD 1 -
292 0040-05446 RETAINER, SPRING L, RF SOURCE, 300MM HDPCVD 1 -
293 3270-01026 DUCT COVER 1.5"W X 6’LG LT GRY PVC TYPE G 1 -
294 3270-01027 DUCT WIRING 1.5"W X 2"HT X 6’LG LT GRY PVC TYPE G 1 -
5-12
311-023-02
Spare Parts Identifier
CHAPTER
Figure 5-5. 0010-18255 Lower Chamber Assembly (1 of 7)

5
5CHAPTER
Spare Parts Identifier
311-023-02
Figure 5-6. 0010-18255 Lower Chamber Assembly (2 of 7)

5-13
5-14
311-023-02
Spare Parts Identifier
CHAPTER
Figure 5-7. 0010-18255 Lower Chamber Assembly (3 of 7)

5
5CHAPTER
Spare Parts Identifier
311-023-02
5-15
Figure 5-8. 0010-18255 Lower Chamber Assembly (4 of 7)
5CHAPTER
Spare Parts Identifier
311-023-02
Figure 5-9. 0010-18255 Lower Chamber Assembly (5 of 7)

5-16
5CHAPTER
Spare Parts Identifier
311-023-02
5-17
Figure 5-10. 0010-18255 Lower Chamber Assembly (6 of 7)
5CHAPTER
Spare Parts Identifier
311-023-02
5-18
Figure 5-11. 0010-18255 Lower Chamber Assembly (7 of 7)
CHAPTER 5 Spare Parts Identifier 311-023-02 5-19

5.4 Upper Chamber Assembly

The following pages include the upper chamber assembly.

Table 5-4. Upper Chamber Assembly

Item No. Part No. Description Qty

Parent 0010-18226 UPPER CHAMBER ASSY 300MM ULTIMA
1 0200-00311 DOME, 300MM HDPCVD 1
2 3690-01517 SCRMACH SHLDR 10-32X.2495ODX3/16L HEXSKT HD SST 2
4 0200-18082 NOZZLE, CERMANIC 1.76L CENTER HDPCVD, ULTIMA 1
7 0020-04993 BLOCK GAS FEED ULTIMA HDP-CVD 1
8 0020-18899 WASHER, NOZZLE, ULTIMA HDPCVD 1
9 3700-01725 ORING ID .549 CSD .103 CHEMRAZ SC513 80 DURO WHT 1
16 3690-04205 SCRCAPTIVE PNL 5/16-18X1.0LGX3/8THD HEX SKT SST 16
18 0020-18436 GROUND CAP, SIDE COIL TENSIONER 1
19 0020-18438 SUPPORT, SIDE COIL TENSIONER HDP-CVD 1
20 0020-18439 INSULATOR, SIDE COIL TENSIONER HDP-CVD 1
21 0020-18440 INSULATOR, LEFT SIDE COIL TENSIONER 1
22 0020-18441 INSULATOR CAP, SIDE COIL TENSIONER 1
23 0020-18442 WEDGE, SIDE COIL TENSIONER 1
24 0050-28362 GAS LINE, TOP FEED, 300MM, R1 HDPCVD 1
26 3690-03737 SCRSHLDR 5/16-18X.3745OD X 1.0L HEX SKT 316SST 4
27 3790-01343 SPCRSHAFT .375 OD .250ID .031 SST 2
28 3780-02236 SPRCPRSN 1.25FL X .540OD X .067WIRE SST 1
29 3690-03839 SCRSHLDR HD 5/16-18X.375ODX1.5L HEX SKT SST 1
30 3060-01673 BRGBALL .2500BOREX.5000ODX.125W ABEC-5 SST 440C 2
31 3700-02329 ORING ID .299 CSD .103 CHEMRAZ 90 DURO WHT 3
32 3300-02944 FTG PLUG SAE 7/16-20 THD STR HOLLOW HEX SST 8
33 0720-03235 CONNRCPT PNL MTG HEX-COAX SQ-TYP 50OHM 4H 1.28SQ 2
34 0040-04504 SIDE COIL ASSY, 300MM HDPCVD 1
36 0020-07372 STRAP, RF IN/TOP SOURCE/MATCH, 300MM, HDPCVD 1
37 0020-07365 STRAP, RF IN/SIDE SOURCE/MATCH, 300MM, HDPCVD 1
40 0020-06864 HOLDER, DOME 300MM, ULTIMA, HDPCVD 9
41 0040-03657 STANDOFF, Y-BAR GAS PL, 300MM 2
42 0040-03658 STANDOFF, ROUND, SC 300MM 2
43 3700-02724 ORING ID 18.955 CSD .210 CHEMRAZ SS513 80DURO WHT 1
44 4040-01018 PLNGR SPR 5/8-11 X 1.5L 10.5-25.5LBS NYL LKNG SST 3
45 0690-01684 CLAMP STRIKE TOGGLE SST .59" 3
5-20 311-023-02 Spare Parts Identifier CHAPTER 5

Table 5-4. Upper Chamber Assembly

Item No. Part No. Description Qty

46 0010-02651 LOCAL MATCH ASSY, TOP, 300MM ULTIMA 1
46 0010-02652 LOCAL MATCH ASSY, SIDE , 300MM ULTIMA 1
50 0010-02255 GROUND SHIELD ASSY, 300MM HDPCVD 1
51 0010-02476 TOP COIL ASSY, HDPCVD 300MM ULTIMA, SILV PLTD
52 0020-18386 ADAPTER,TC,B2,MK2 1
53 0020-07635 CLAMP TOP COIL, 300MM, ULTIMA 2
61 0020-07631 STRAP TOP COIL/MATCH, 300MM, ULTIMA 1
62 0020-07636 STRAP TOP COIL/GROUND, 300MM, ULTIMA 1
63 0020-07634 CLAMP, SIDE COIL 300MM, ULTIMA 1
64 0020-07633 STRAP COIL/GROUND, 300MM, ULTIMA 1
68 3880-01634 WSHRLKG SPLIT #3 SIL BRONZE PLN 24
69 3500-01073 NUTHEX JAM 5/8-11 SST 3
74 3300-02184 FTGTBG ELBOW 3/8T X 9/16-18 EXT SAE 90 DEG SST 2
76 3300-01054 FTG TBG CONN 1/4T 1/8MP BRS 1
77 3300-04409 FTGTEMP SEAL 1/8OD 1/8MNPT 1.18LG BRS 1
78 3690-03880 SCRMACH SHLDR 1/4-20X.312OD 1.0L HEX SKT SST303 6
81 0020-06865 EXTENDER, SW INTERLOCK, LID 300MM, R1 1
82 0020-18518 BRACKET,SWITCH,LID INTERLOCK 1
83 0020-18519 MOUNT,SWITCH,INTERLOCK 1
84 0020-07067 RING, 18" DOME 300MM, ULTIMA 1
86 0020-07625 PARTITION, LID, 300MM R1 UPPER CHAMBER 1
88 0020-07632 STRAP SIDE COIL/MATCH, 300MM, ULTIMA 1
89 3690-03888 SCRMACH PAN 8-32 X 1/4L SLOT ULTEM 2300(NAT) 2
90 0040-04506 CLAMP, SIDE COIL, 300MM, HDPCVD 9
91 0020-07367 SPACER , SIDE COIL, 300MM, HDPCVD 9
97 1270-01589 SWPB MOM SPST 10A 125/250VAC PNL-MT SLDR-TERM 2
98 3780-02270 SPRCPRSN .44FL .360OD X .051 WIRE DIA SST 3
99 1310-01091 TC DUAL TYPEK SST MNT 1/2-20 KNURL HD #8RINGLUG 1
100 1310-01059 TCPROBE DUAL CIRCUIT K-TYPE TFE-INSUL ROOF 1
101 0150-01762 CABLE ASSY, HTR CARTRIDGE, 300MM ULTIMA 1
102 0150-18105 CABLE ASSY. CTR DUAL TC, ULTIMA HDP-CVD 1
103 3690-01412 SCRMACH SHLDR 10-32X.250ODX1.0L HEX SKT SST303 3
104 0150-18059 CABLE ASSY,GND SHLD TC,ULTIMA HDP-CVD 2
105 3700-02025 ORING ID .609 CSD .139 VITON 75DURO BLK 1
CHAPTER 5 Spare Parts Identifier 311-023-02 5-21

Table 5-4. Upper Chamber Assembly

Item No. Part No. Description Qty

106 3420-01042 INSUL XSTR TO-220 SILICONE RBR/FBRGLS .009"T W/ADH 2
108 3690-01534 SCRSET 1/4-20 X 3/4L HEX SKT SST OVAL POINT 2
111 3300-02286 FTGQDISC STEM 1/2T X 1/2FNPT X 2.96L 3.0CC SST 1
112 3300-02287 FTG CPLG QDISC 1-1/16BODY X 1/2FP 3.23"L SST316 1
113 3300-02470 FTG UNION ELBOW 3/8T BRS 2
118 3880-01045 WSHRFLAT #1/4 .500OD X .265ID X .063THK SST 10
120 3691-01565 SCR CAP SKT HD 1/4-20X5/8L TORX T30 316SST EP FW 2
121 3691-01554 SCR CAP SKT HD 10-32X7/8L TORX T27 316SST EP FW 8
122 3880-01280 WSHRLKG SPLIT # .290OD X .195ID X .050THK SST 20
123 3880-01246 WSHRFLAT #10 .333ODX.211IDX.025THK SST 31
124 3691-01553 SCR CAP SKT HD 10-32X3/8L TORX T27 316SST EP FW 11
125 3690-01400 SCRCAP SKT HD 1/4-20 X 7/8L HEX SKT SST 4
127 3691-01398 SCR CAP SKT HD 8-32X1/4L TORX T25 316SST EP FW 18
128 3691-01494 SCR CAP SKT HD 6-32X3/8L TORX T15 316SST EP FW 6
130 3691-01399 SCR CAP SKT HD 8-32X1/2L TORX T25 316SST EP FW 10
133 3690-01806 SCR MACH BTN HD 10-32 X 1/2L HEX SKT SST 3
135 3691-01357 SCRCAP SKT HD 10-32 X 1/2L HEX SKT SST 12
136 3880-01024 WSHRLKG SPLIT #8 .293OD X .174ID X .040THK SST 24
137 3880-01007 WSHRFLAT #8 .031 THK SST 12
138 3880-01023 WSHRLKG SPLIT #6 .25OD X .148ID X .031THK SST 6
144 3880-01074 WSHRFLAT #5/16 .625ODX.344IDX.063T SST 6
152 5030-01003 CMPDTHERMAL 5OZ TUBE HEAT-SINK WHT 1
154 3880-01020 WSHRLKG INT T #10 .381OD X .199ID X .022THK SST 2
155 3880-01015 WSHRLKG EXT T #8 .381OD X .168ID X .020THK SST 2
156 3880-01064 WSHRLKG EXT T #6 .317OD X .142ID X .020THK SST 4
157 3880-01490 WSHRFLAT #8 .307OD X .147ID X .03THK SST 10
160 0150-18066 CABLE ASSY, JUMPER, ULTIMA HDP-CVD 2
161 0150-01763 CABLE ASSY, TOP COIL, 300MM ULTIMA 2
162 0150-01764 CABLE ASSY, GND SHLD, 300MM ULTIMA 2
176 3300-03023 FTGUNION 3/8 AN FLARE 3/8 SWAGELOK 37 DEG SST 4
178 0020-18702 TUBE,.375 DIA ADAPTER,ULTIMA HDP-CVD 1
182 5070-01030 GRSSMOOTH OFF WHT OPR-73.3 DEG TO+204 2OZ SYRNG 1
183 3300-04697 FTGTBG ADPTR 3/8MPT X 9/16-18 JIC-FLARE SST 2
184 3300-01752 FTGTBG CONN 3/8T 3/8TS SST PORT CONN 3
5-22 311-023-02 Spare Parts Identifier CHAPTER 5

Table 5-4. Upper Chamber Assembly

Item No. Part No. Description Qty

185 3400-01405 HOSE ASSY NOMEX BRAID 3/8ID X 98"LG 9/16-18 F-JIC 1
187 3400-01401 HOSE FLEX 3/8ID 21"L PTFE NOMEX BRAID 37DEG F-JIC 1
188 3400-01396 HOSE ASSY NOMEX BRAID 3/8ID X36"LG 9/16-18 F-JIC 1
189 0020-18855 SPACER, NOMEX HOSE, WATER 4
190 3400-01392 HOSE ASSY NOMEX BRAID 3/8ID X 55"LG 9/16-18 F-JIC 2
191 3300-04999 FTGHOSE ADPTR 9/16-18JIC X 1/2NPT SST 2
193 0140-18118 HARNESS ASSY. COVER, LID, WATER LEAK 1
195 0020-07362 COVER, HOSE, LID 300MM, R1 HDPCVD 1
197 0040-04349 RING, 300MM SYS. GAS DIST. ULTIMA, HDPCVD 1
200 3320-01123 GSKTPF-EMI FINGER 15"L BR-CU ADHESIVE 11
201 0020-07626 BRACKET, LID, SOURCE BOX, 300MM, R1 1
202 0020-07637 HANDLE, LID, CHAMBER, 300MM, ULTIMA 2
203 3320-01124 GSKTRF-EMI FINGER 24"L BR-CU ADHESIVE 3
204 0040-05111 BRACKET, LIFT LID, 300MM HDPCVD
205 0040-05112 COVER , LIFT LID, 300MM HDPCVD
206 3691-01196 SCR CAP SKT HD 3/8-16X1-1/4L TORX T50 SST 2
207 3691-01217 SCR CAP SKT HD 1/2-13X1-1/2L TORX T55 SST 3
CHAPTER 5 Spare Parts Identifier 311-023-02 5-23

32

Figure 5-12. 300mm Ultima HDP-CVD Upper Chamber Assembly (1 of 6)

5CHAPTER
Spare Parts Identifier
311-023-02
5-24
Figure 5-13. 300mm Ultima HDP-CVD Upper Chamber Assembly (2 of 6)
5CHAPTER
Spare Parts Identifier
311-023-02
5-25
Figure 5-14. 300mm Ultima HDP-CVD Upper Chamber Assembly (3 of 6)
5-26 311-023-02 Spare Parts Identifier CHAPTER 5

Figure 5-15. 300mm Ultima HDP-CVD Upper Chamber Assembly (4 of 6)

5CHAPTER
Spare Parts Identifier
311-023-02
Figure 5-16. 300mm Ultima HDP-CVD Upper Chamber Assembly (5 of 6)

5-27
5-28 311-023-02 Spare Parts Identifier CHAPTER 5

Figure 5-17. 300mm Ultima HDP-CVD Upper Chamber Assembly (6 of 6)

CHAPTER 5 Spare Parts Identifier 311-023-02 5-29

5.5 Cathode Assembly

Table 5-5. Cathode Assembly

Item No. Part No. Description Qty

1 0020-18121 PINS, DELRIN HDP CVDGECO 4
2 0040-03743 BLOCK,WATER ESC,300MM HDPCVD 2
3 0020-18866 BUSHING CATHODE,300MM HDPCVD 6
4 0020-06908 FLANGE,SIDE,HE FEED 300MM,HDPCVD 2
4 0020-18773 ESC WATER PLUG, 300MM 2
5 0020-06907 THREAD, 300MM HE FEED, HDPCVD 2
6 3410-01060 INSR.156"DIA .245"LG 316SST 1
8 0020-07180 CONDUCTOR, BIAS 300MM, HDPCVD, ULTIMA 1
10 0040-02987 ESC, TESTED, 300MM DUAL HE, HDPCVD 1
11 0040-03140 CATHODE BASE, 300MM HDPCVD 1
12 0040-18174 BLOCK,WATER FEED,CATHODE,ULTIMA 300MM HDPCVD 2
13 0200-00453 GUIDE, LIFT PIN 300MM, ESC HDPCVD 3
14 0200-00374 INSULATOR, 300MM HDPCVD ULTIMA 1
15 3690-01086 SCRCAP SKT HD 8-32 X 1/2L HEX SKT SST 9
16 3880-01027 WSHRLKG SPLIT #5/16 .125W X .078THK SST 3
17 3690-01309 SCRCAP SKT HD 8-32 X 5/16L HEX SKT SST 3
18 3690-01767 SCRCAP SKT HD 8-32 X 7/8L HEX SKT SST 8
19 3690-04192 SCRCAP SKT HD 5/16-18 X 2.0L HEX SKT 303SST 6
20 3700-01036 ORING ID .487 CSD .103 VITON 75DURO BLK 2
22 3700-01852 ORING ID .549 CSD .103 VITON 75DURO BLK 2
23 3700-02183 ORING ID .546 CSD .139 VITON BLK 2
25 3700-03026 SEAL FORMED CSD .139 CHEMRAZ513 80DURO CATH ASSY 2
28 3700-02676 ORING ID .674 CSD .103 CHEMRAZ SS513 80DURO WHT 1
29 3700-02677 ORING ID .424 CSD .103 CHEMRAZ SS513 80DURO WHT 1
31 0190-18262 RING, SPACER ESC PEDESTAL ULTIMA HDPCVD 6
32 3880-01007 WSHRFLAT #8 .031 THK SST 6
33 3880-01024 WSHRLKG SPLIT #8 .293OD X .174ID X .040THK SST 6
34 3880-01288 WSHRFLAT #5/16 .625ODX.338IDX.06THK SST 6
35 0020-06913 SPRIAL, 300MM WATER, HDPCVD 2
37 0190-01069 HOSE ASSY, OUTLET/SUP & RETURN TO CATHODE 2
5CHAPTER
Spare Parts Identifier
311-023-02
5-30
Figure 5-18. 300mm Ultima HDP-CVD Cathode Assembly (1 of 2)
5CHAPTER
Spare Parts Identifier
311-023-02
Figure 5-19. 300mm Ultima HDP-CVD Cathode Assembly (2 of 2)

5-31
5-32 311-023-02 Spare Parts Identifier CHAPTER 5
APPENDIX A Equipment Decontamination 311-023-02 A-1

A Equipment Decontamination
The following decontamination procedure and reference material has been taken from the
Applied Materials Corporate Safety Manual. Make sure to have the entire manual to fully
understand and utilize all safety concerns associated with the tool that is being used. If the
Safety Manual is not available please contact the regional and/or customer service
representative for a copy.

A.1 Equipment Decontamination

APPLIED MATERIALS Number 24.5
CORPORATE SAFETY MANUAL Revision 7
Effective Date 10/23/98
SUBJECT: 24.5 EQUIPMENT Signators: Robert Lucacher (Approved)
DECONTAMINATION Steven Green (Authorized)

A.2 Policy
1. It is the policy of Applied Materials that parts and equipment are shipped to or
received from internal or external customers free from hazardous contamination.

A.3 Scope
1. This document establishes guidelines for decontamination, identifies the
responsible parties, and defines a process for notification, testing, and providing
documentation for parts and equipment that have been exposed to hazardous
materials before shipment.
2. This Standard applies to all Applied Materials locations and operations,
world-wide. Where governmental agencies provide more stringent regulations,
the more stringent requirements shall apply.
3. All Officers, Directors, Managers and Supervisors are responsible, within their
areas of responsibility, for implementation of and adherence to this Standard.
4. Customers, Contractors, Applied Materials Customer Engineers, and other
personnel who ship components, parts, systems, or equipment to or from
Applied Materials are required to conform to this standard.
A-2 311-023-02 Equipment Decontamination APPENDIX A

A.4 Definitions
1. Contaminated Parts — is any component, part, system, or equipment which has
been exposed to or operated with hazardous gas, liquid, or solid chemicals during
semiconductor processing and which could pose risks or hazards to human health
or the environment.
2. Decontamination — the removal of risks or hazards to human health or the
environment resulting from the presence of hazardous materials in or on the
equipment.
3. Hazardous Material — any chemical, substance, or compound which is defined
or interpreted to pose risks or hazards to human health or the environment by
applicable international, national, regional, or local laws or regulations.
4. Local Safety Department — The safety department which provides services to
Applied Materials management at the local level.

A.4.1 Limitations
1. It is recognized that, in some cases, complete chemical contamination can not or
will not be achieved nor desired, e.g., because it would destroy the part
(i.e., Pumps), the part needs failure analysis, etc. In these cases, the shipper must
ensure that any remaining potential hazards are clearly identified to all those
handling and receiving these parts, and that all other requirements of this Standard
are followed. In addition, these parts may require classification and shipping as
hazardous material according to the laws and regulations of the site and region.
2. The documentation required by this Standard is supplemental to applicable
documentation required by local state, national, and international regulations.
3. This standard applies to parts and equipment that have been exposed to hazardous
materials during semiconductor processing and does not include facilities
equipment such as scrubbers, tanks, etc. which would be covered by other
environmental standards.

A.5 Requirements for Contaminated Parts

A.5.1 Responsibility

A.5.1.1 External Customer/Equipment Owner

1. The external customer or equipment owner is responsible for arranging for and
ensuring decontamination of equipment and parts takes place prior to shipment
to Applied Materials or other outside vendors or suppliers.
2. When parts are to be returned to Applied Materials without prior decontamination
for engineering evaluation, the customer must obtain authorization from
Applied Materials prior to shipment.
APPENDIX A Equipment Decontamination 311-023-02 A-3

A.5.1.2 Applied Materials Management

1. Applied Materials Line management is responsible to ensure decontamination of
Applied Materials owned equipment under their control prior to shipment from
or between Applied Materials facilities or to an outside vendor.
2. When a customer seeks to return decontaminated parts or equipment,
Applied Materials will authorize the shipment by issuing an RMA number.
CONTAMINATED PARTS WILL NOT BE GIVEN AN RMA NUMBER.
3. Exception: For pumps returned under an RMA, see the Pump Preparation
guidelines (see Section A.7) for detailed procedures.
4. The Local Field Sales and Service Managers are responsible to communicate the
requirements of this Standard to all Applied Materials customers, who may intend
to return components, parts, or systems.

A.5.1.3 Local Safety Department

1. Provides technical assistance to management on verification of decontamination
and selection of personal protective equipment.

A.5.2 Handling of Contaminated Parts

1. Chemical compounds deposited on or contained in parts resulting from customer
use are the property and responsibility of the customer. Applied Materials will not
accept responsibility for handling or receiving contaminated parts without prior
authorization and approval. (See Section 5.2.3)
2. Chemical compounds deposited on or contained in parts will be assumed to be
hazardous unless otherwise determined and documented.
3. Components, parts, or systems that have been exposed to process chemicals must
be cleaned unless known to be non-hazardous. They must also be secured in
see-through, sealed, plastic or polyethylene bags or wrap before shipment.
Applied Materials has various sizes of polyethylene bags available from Spares
as identified below:
Applied Materials Clear Polyethylene Parts Shipping Bags
1. Size 14 x 16 inches Part No. 3540-01086
2. Size 21 x 22 inches Part No. 3540-01087
3. Size 30 x 32 inches Part No. 3540-01088
The Returned Part Information Form or Field Report/Traveler.
Exception: Contaminated parts may be shipped and accepted, only with proper
approvals, when necessary for purpose of engineering evaluation or failure
analysis. Required approval shall consist of a Returned Part Information Form
signed by the Manager of the Applied Materials’ department receiving the
contaminated material prior to shipment.
A-4 311-023-02 Equipment Decontamination APPENDIX A

4. Decontamination and packaging of all parts and materials will be done in

accordance with procedures established by Applied Materials. Other vendor or
customer supplied procedures may be used if determined by Applied Materials to
be equivalent or better than the attached.
5. Any charges incurred for fines, labor, materials or disposal resulting from
violations of this standard will be charged to the responsible organization.

A.5.3 Testing and Verification

1. The party conducting decontamination is responsible for verification that the
system is adequately clean prior to shipment. Verification will be determined by
the following methods, depending on the process exposure of the tool.
2. Visual inspection for process residues on component surfaces is required for all
returns. All surfaces of the equipment being cleaned shall be free of liquids,
powders, flakes, films and residues. Any remaining visual evidence of process
residues indicates inadequate decontamination procedures.
3. The following guidelines may provide additional procedures to be followed to
verify adequate decontamination of specific parts or equipment.

A.6 Process Kit, Gate Valves, and Miscellaneous Parts

Following are the procedures for the decontamination and packaging of the above mentioned
parts prior to shipping and handling. These include any parts which have come in contact
with process gases or chamber exhaust, but DOES NOT refer to pumps, systems, implant
parts, gas and liquid source handling equipment or susceptors. More detailed procedures may
be required for your location.

WARNING
These parts have been exposed to various
hazardous and toxic gases and liquid sources
which may be contained in or have deposited
residues on them. Always wear protective
gloves, eye protection, clothing, and provide
adequate ventilation or a respirator while
performing these procedures as applicable to
the type of process exposure.

1. Follow established procedures for wet cleans and removal of the used parts. Be
sure to wear proper protective gloves (not lightweight cleanroom type) when
handling these parts as they may have corrosive or toxic residues on the surface.
2. Wipe down all surfaces of the returning parts with a wipe or cloth containing
de-ionized water.
3. Test all surfaces of the parts with a wetted piece of pH paper. Range of pH should
be between 5 pH and 10 pH. If not, redo wipe down.
APPENDIX A Equipment Decontamination 311-023-02 A-5

4. Follow this with a wipe down of all surfaces with a wipe or cloth containing
isopropanol.
5. Dispose of all used wipes as hazardous waste at the Customer site.
6. Place the parts into the Applied Materials approved clear polyethylene bag (See
Section A.5.2 for part numbers) or bag of similar design and SEAL the bag.

A.6.1 Labeling
1. Fill out the information required on the Applied Materials Returned Part
Information Form or Field Report/Traveler. Ensure information is provided on the
chemicals used in the equipment these parts were removed from.
2. All parts must be accompanied by an RMA number and the Returned Part
Information Form or Field Report/Traveler. Attach copies of all paperwork to the
outside of the shipping container. The parts are now ready for shipment.
Following are the procedures for the decontamination and packaging of all contaminated
gas and liquid source handling system parts prior to shipping and handling. These parts
include flow controllers (AFCs and MFCs), gas lines, valves, vacuum components, Neslabs,
cooling lines/reservoirs, etc. but DOES NOT refer to pumps, implant parts, or susceptors.
More detailed procedures may be required for your location.

WARNING
These parts have been exposed to various
hazardous and toxic gases and liquid sources
which may be contained in or have deposited
residues on them. Always wear protective
gloves, eye protection, clothing, and provide
adequate ventilation or a respirator while
performing these procedures as applicable to
the type of process exposure.
A-6 311-023-02 Equipment Decontamination APPENDIX A

A.6.2 Purging
Before removing parts for handling or shipment, the gas and liquid source handling system
must be purged with an inert gas and drained of all liquids to remove hazardous and toxic
gases and/or free liquids. IF THE PARTS CANNOT BE PURGED OR DRAINED
COMPLETELY FOR ANY REASON, AND RESIDUAL HAZARDOUS GAS OR LIQUID MAY
REMAIN INSIDE, THIS PARTS SHOULD BE SCRAPPED ON SITE AND NOT RETURNED
TO APPLIED MATERIALS OR ITS VENDORS.

1. Ensure that the process gas or liquid is shut off at the source.
2. Pump out the lines to be serviced to the source. Drain all coolant lines and
reservoirs completely.
3. Perform cycle purges with inert gas at least 20 times for non-toxic gases
(ex. Freons), at least 60 times for toxics before removing any parts from the system.
(Liquid sources such as BCl3, TMB, TMP, and TEOS may require additional cycle
purges as indicated in Applied Materials maintenance manuals. NO LIQUID/GAS
RESIDUES WITHIN GAS OR LIQUID SOURCE HANDLING SYSTEMS WILL
BE ACCEPTABLE) NOTE: IF THE PART CANNOT BE COMPLETELY
PURGED OF GAS OR LIQUID, DO NOT RETURN IT!
4. Once the system is completely purged or drained, you may proceed in removing
flow controllers, valves, gas lines, etc. from the system. COVER ALL OPENINGS
with the proper fittings preferably or caps, including flow controllers, valves,
Neslabs, cooling lines, etc. that are being returned.
5. Place the parts into the Applied Materials approved clear polyethylene bag (See
Section 5.0 for part numbers) or bag of similar design and SEAL the bag.

A.6.3 Labeling
1. Fill out the information required on the Applied Materials Returned Part
Information Form or Field Report/Traveler. Ensure information is provided on the
chemicals used in the equipment these parts were removed from.
2. All parts must be accompanied by an RMA number. Securely attach copies of all
paperwork to the outside of the returning part. The parts are now ready for
shipment.
APPENDIX A Equipment Decontamination 311-023-02 A-7

A.7 Pumps

WARNING
Most of Applied Materials equipment pumps
have been exposed to various corrosive and
toxic gases which could have contaminated
pumps and pump fluids. Always wear
protective gloves, eye wear, and clothing and
provide adequate ventilation or wear an air
purifying respirator when performing this
procedure as applicable to the type of
process exposure.

All pumps (including turbopumps) that have been removed from service must be properly
prepared before being transported since they may contain hazardous materials. Strict
transportation and environmental laws, as well as the safety of our employees and vendors,
make this essential. Global Environmental Safety and Health has researched this issue and
recommends the following procedure. More detailed procedures may be required for your
location.
.

NOTE
“Wet” pumps refer to oil-lubricated pumps, whereas “dry” pumps refer
to oil-free pumps

1. Purge pumps with Nitrogen or another inert gas according to established

Applied Materials procedures.
2. Obtain a polyethylene container or pump cart to collect all used oil from wet
pumps. Drain the oil from the oil reservoir on the wet pump into the container.
Remove the filters and cartridges from the wet pump and drain them into the same
container. Leave as little residual oil as possible. Also drain any liquid coolant
(glycol or water) into a separate container.
3. Wipe down the outside surfaces of the pump, using isopropanol to remove oil
residues.
4. CAP OR COVER, AND SEAL all intake, exhaust, coolant lines, and other open
ports on all wet and dry pumps with blanking flanges, caps, or heavy gauge PVC
tape to prevent any residual oil, coolant, or gases from escaping. Use vendor
supplied sealing kits when available.
5. Place the drained filters, cartridges and wipes into a thick plastic bag and seal the
bag.
A-8 311-023-02 Equipment Decontamination APPENDIX A

6. Label the bag with the following information: contents, date and name of the
person generating the waste. The waste materials generated during the pump
decontamination (oil, coolant, filters, cartridges and wipes) must be handled and
disposed of by the site Safety or Environmental Representative according to local
waste disposal requirements.
7. If possible, place the pump in an Applied Materials approved clear polyethylene
bag (see Section A.5.2 for part numbers) and seal the bag. If the pump is too large
to fit into the bags, wrap the exterior of the pump with clear plastic or poly and
secure with tape. Secure the pump in a (DOT or other agency) approved wooden
or strong fiberboard box, or sealable polyethylene container for easy handling.
Ship only one pump per container.

A.7.1 Labeling/Marking
1. When possible, ship pumps directly to your local pump vendor, with any additional
paperwork required by that vendor.
2. If the pump is to be shipped to Applied Materials, obtain an RMA (Return Material
Authorization) number and complete an Applied Materials Returned Part
Information Form, Field Report/Traveler, or other acceptable customer/vendor
form which provide the same information. Ensure that information is provided
about the chemicals used in the system/chamber from which the pump was
removed. Securely attach copies of all paperwork to the outside of the pump and
the shipping container.
3. Pumps containing residues of hazardous materials must be labeled, packaged, and
shipped according to regional shipping regulations (DOT, IATA, etc.). A
recommended UN/NA shipping classification for each process is provided on the
Process Reference Sheet but THE CORRECT CLASSIFICATION AND
LABELING IS THE RESPONSIBILITY OF THE SITE SAFETY/
ENVIRONMENTAL OR SHIPPING ORGANIZATION.
4. Shipping papers (waybills, etc.) must be filled out and hazardous materials labels
must be applied by the SITE SAFETY/ENVIRONMENTAL OR SHIPPING
ORGANIZATION who have training and certification in the applicable regional
transportation requirements.

NOTE
Applied Materials Customer Engineers must not fill out the above legal
shipping documentation for their Customers!

5. The pump is now ready for shipment.

Applied Materials, Inc.
3050 Bowers Avenue
Santa Clara, CA 95054-3299

Address correspondence to:

Applied Materials, Inc.
P.O. Box 58039
Santa Clara, CA 95052-8039
Tel: (408) 727-5555
Telex: 6719476 AMTUW
Fax: (408) 727-9943
Web Site: http://www.AppliedMaterials.com

To order copies of this manual or other

manuals, call 1-800-HOT-TTTT option 2

Applied Materials, Inc. 1999. All rights reserved. Printed in U.S.A. 12/1199 IBSS