Update atsamd-hal-macros Cargo.toml for publishing (atsamd-rs#733)

* Update atsamd-hal-macros Cargo.toml for publishing

Fix samd11_bare version (atsamd-rs#695)

atsamd-hal release 0.15.0

bump hal to v0.14 (atsamd-rs#556)

* bump hal to v0.14

* version bump tier 1 BSPs

* feather_m4 needs a hal version

* move pygamer to tier 2

Fix RTIC depencencies in BSPs (atsamd-rs#496)

* Fix RTIC depencencies for feather_m0 and metro_m0