Tri Axis Micro Gyroscope

Design and Analysis of a Tri-Axis Gyroscope

Micromachined by Surface Fabrication

Outline

Motivation
Introduction
Background
Applications
Design
Principle of Operation
Fabrication of the Gyroscope
Experimental Setup
Results
Conclusion
Motivation
Recent Progress in microfabrication techniques.
Tri-axis Gyroscope
Miniature size and low cost.
Reliable batch fabrication techniques and reduction of production cost

gradually become the focus of evolution of this device.
Various applications.
Introduction
What is Gyroscope?
Agyroscope is a device for measuring or
maintaining orientation, based on the principle of
preserving
angular
momentum.
Mechanical
gyroscopes typically comprise a spinning wheel or
disc in which the axle is free to assume any
orientation.
Background
In 1991, Greiff et al. designed conventional macroscale gyroscope with

detective resolution of 4deg/sec and 1Hz bandwidth.
In 2006, Vinay et al. proposed a micro tri-axis gyroscope in which a single

proof mass is embedded.
However, accuracy, bandwidth and decoupling efficacy of measurements

are insufficient.
Applications
Image stabilization
Inertial Navigation Systems(INS).
Rollover detection
Active suspension for advanced vehicles
Satellite posture control.
Design
The microgyroscope mainly consists of four key components
Seismic inertial mass modules
Flexure pivots
Sensing differential capacitor sets
Rotational comb-drive electrodes
Design
The proposed tri-axis microgyroscope is schematically shown in below.
Design
The seismic inertial mass modules includes: Inner disk, outer-ring,

distributed translational proof mass(DTPM)
In fact, the seismic inertial mass modules are nothing but the angular
rate detection elements whose responding motions are induced by
Coriolis effect in three axes.
1- Outer-ring
2- DTPM
3- Inner-disk
Design
Flexure pivots include four spring sets.
Spring#1(marked as S1),which is used to suspend the outerring(used for detection of angular rate about Y-direction).
The inner-disk(used for detection of angular rate about xdirection) is suspended by a set of torsion spring, named as
Spring#2(marked as S2).
Spring #3(marked as S3) and Spring #4 are, respectively,

used to resist the radial and tangential acceleration of DTPM
due to external angular excitations about z-direction.
11121314-
S1
S2
S3
S4
Design
The sensing capacitor sets include two pairs of differential capacitor

and four pairs of comb electrodes.
The comb electrode pairs by the DTPM are used to measure the
induced radial displacement of DTPM if any regular excitation about Z
axis is present.
4,6,7 Sensing electrodes

5,8,9 Comb electrodes
Operation
Operation
Change in o/p voltage ~ Measure of angular rates
Operation
Suspension flexure(S1)
Fabrication
Cleaning of wafer
Insulation layer 4m and Structure layer
40m
All mechanical components are micro
Fabrication
Al material deposited (mask#1)
Fabrication
Spin Coat Photo Resist (mask#2)

The glass photomask(mask#2) is used to
pattern the desirable PR by photolithography.
Fabrication
PR patterned and layer of Al partially removed

It is noted that the hard etching mask is
concurrently patterned with the glass photo mask,
by photolithography process.
Fabrication
PR removed and structure layer then

etched by DRIE
The mechanical structure is formed by
DRIE
Fabrication
Al removed and insulation then etched by

the BOE
The purpose of deposited Al is to resist
DRIE so that
Fabrication
Wafer cleaned
Pyrex has high optical
transmittance over wide range
wave length.
Fabrication
Spin coat PR
Fabrication
PR patterned
Fabrication
HF (Hydrogen Fluoride) etching

By standard liftoff process after the
corresponding trenches to house
Fabrication
PR removed and Au deposited as electrode
Fabrication
Bonding of Dual layers
Fabrication
A couple of scanning electron microscope(SEM) Images
Experimental Setup
Driving circuit
Sensing Circuit
Results
As the External angular velocity about

x axis or y axis is exerted, the innerdisk or outer ring responds to tilt owing
to Coriolis effect.
Hence the air gap

corresponding
mass
differential capacitors is
the voltage across
accordingly changed,
results.
between the
module
and
altered so that
capacitors is
as shown in
Results
The relation between capacitance variation

and the corresponding induced voltage is
found to be fairly linear.
In other words, it can be conveniently used

for measure of detected angular rate,
Results
Conclusion
Capability of detecting tri-axis angular motions.
Designed in geometry such that the stress of proposed microgyroscope

is considerably reduced but the resolution for angular displacements is
increased.
The mass production cost has been considered at the design stage but
the resolution, bandwidth and decoupling capability of tri axis
detection can be expected to be much upgraded .
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Design and Analysis of a Tri-Axis Gyroscope

Micromachined by Surface Fabrication

Fabrication of the Gyroscope

Recent Progress in microfabrication techniques.

Miniature size and low cost.

Reliable batch fabrication techniques and reduction of production cost

In 1991, Greiff et al. designed conventional macroscale gyroscope with

In 2006, Vinay et al. proposed a micro tri-axis gyroscope in which a single

However, accuracy, bandwidth and decoupling efficacy of measurements

Inertial Navigation Systems(INS).

Active suspension for advanced vehicles

Satellite posture control.

The microgyroscope mainly consists of four key components

Seismic inertial mass modules

Sensing differential capacitor sets

Rotational comb-drive electrodes

The proposed tri-axis microgyroscope is schematically shown in below.

The seismic inertial mass modules includes: Inner disk, outer-ring,

Flexure pivots include four spring sets.

Spring #3(marked as S3) and Spring #4 are, respectively,

The sensing capacitor sets include two pairs of differential capacitor

4,6,7 Sensing electrodes

Change in o/p voltage ~ Measure of angular rates

Al material deposited (mask#1)

Spin Coat Photo Resist (mask#2)

PR patterned and layer of Al partially removed

PR removed and structure layer then

Al removed and insulation then etched by

HF (Hydrogen Fluoride) etching

PR removed and Au deposited as electrode

Bonding of Dual layers

A couple of scanning electron microscope(SEM) Images

As the External angular velocity about

Hence the air gap

The relation between capacitance variation

In other words, it can be conveniently used

Capability of detecting tri-axis angular motions.

Designed in geometry such that the stress of proposed microgyroscope

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