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A084160 as a simple table

na(n)
02
113
25
317
473
5293
6113
71153
8197
92557
101321
111553
12461
132161
141493
151801
1610993
179533
1815661
1927817
2076001
2124593
2216741
2340709
2453453
2558789
2662297
2733181
28256189
29110321
30112757
31344497
3239581
33138661
34269761
35448421
3678989
3750593

[2,13,5,17,73,293,113,1153,197,2557,1321,1553,461,
 2161,1493,1801,10993,9533,15661,27817,76001,24593,
 16741,40709,53453,58789,62297,33181,256189,110321,
 112757,344497,39581,138661,269761,448421,78989,
 50593]