Information and Updates

The Keck Lab consists of a Cleanroom, Metrology Room and a Fume Hood/Wafer Dicing room. Updates will be periodically posted here on the main web page.

All Cleanroom users must wear pants and closed toe shoes due to the chemical hazards in the cleanroom.

We receive a lot of questions regarding thin film coatings. The Edwards 306 e-beam evaporator can do gold, silver, platinum, titanium, chromium, copper, cobalt, nickel, aluminum and other metals on request (titanium or chromium are often used as an adhesion layer on silicon wafers and dielectric substrates). Also the Edwards 306 chamber can accept up to 4 coating materials per run. Training is available on request or we can coat your samples for a standard charge of 3 hrs labor per run. We also have two sputter chambers for coating metals and dielectrics. Please send e-mail to [email protected] for all inquiries.

Updates

As a reminder all Cleanroom, Metrology and X110 users must sign in on the tablet. If the tablet is not working record your usage on the backup paper form next to the tablet or e-mail [email protected]. Users who do not login or report their usage will be charged 4 hrs.

If you reserve an instrument in advance and have to cancel you must cancel by midnight the prior day.

The AFM computer hard drive was replaced by computing and should provide more stable operation going forward. Unfortunately old data was lost and not retrievable.

For the RIE, you now have to turn on the pump manually using the pump control near the RIE computer (read the directions and follow the pictures).

The Edwards coating chamber is back up. DO NOT shut off the water during a run. Please let us know if you encounter any problems.

FTIR is fixed with new laser assembly. Let us know if you encounter any other issues.

If there are any equipment issues please stop by the office or e-mail us at [email protected].